How Technology Manufacturers Use Chemical Delivery Systems

Safe handling and secure storage of chemicals, as well as their delivery in precise amounts, is the requirement of technology manufacturing. Corrosive chemicals (for etching, cleaning, plating, etc.) should be delivered to the process safely, in accurate amounts, and neutralized properly before disposal. Automated chemical delivery systems are able to handle these requirements with precision.

The key to supplying effective chemical delivery systems is an adaptable approach combined with the capability to develop systems that are tailor-made to meet the client's specific needs.

Modutek’s Chemical Delivery Systems feature fluid paths -- all made of Teflon -- double containment cabinet construction, leak detection and chemical level sensing. The software that commands the chemical delivery system can be highly customizable to meet the manufacturers' needs. These systems are flexible because of the customizable software which adapts to the manufacturer’s specific applications. For example, a company that manufactures silicon wafers may have different requirements compared to another company that makes solar cells or hard disk drives. For more details, read the full blog article “How Chemical Delivery Systems Are Used by Technology Manufacturers.” Contact Modutek Corporation at 866-803-1533 or send an email to sales@modutek.com.

Improvements to the Silicon Wet Etching Process

Continuous improvements to equipment design and materials has enabled the silicon wet etching process to produce improved wafer yields with less minimized defects on smaller sized geometries. To promote further improvements, Modutek strives to provide equipment designed to promote efficiency, safety, and low cost. 

·         Modutek's QFa Series High Temperature Recirculating Quartz Baths/Qa Series Constant Temperature Quartz Baths have been designed for etching, stripping, and heating.

·         Teflon Tanks - Standard and customized carrier sizes, different tank configurations, inline heating, and immersion heating are also available.

·         Silicon nitride etch baths - deliver exceptional process control while retaining flexibility in installation and operation.

·         Quick Dump Rinsers - can boost process efficiency by reducing rinse times and DI water consumption.

Modutek provides equipment and solutions that meet customer requirements. For more information on this topic read the blog article titled “Improvements to the silicon wet etching process”. For any questions on selecting the right manufacturing equipment for your requirements call Modutek at 866-803-1533.

Wet Processing Equipment Applications

Modutek provides technologically advanced yet cost-effective wet processing equipment and solutions that produce high-quality output. Applications include wafer etching, cleaning, drying, metal etching and stripping. Particular solutions include KOH etch and nitride etch.

The rotary wafer etching system has the ability to etch, clean, reclaim, develop, and strip semiconductor wafers and substrates. It features a dual tank design with a transfer between tanks for etching and then cleansing or rinsing.

Modutek’s vacuum metal etcher can etch aluminum layers on semiconductor wafers with high precision. It is fully automated, and etches aluminum in a vacuum to remove hydrogen bubbles that impede the etching process and generate "snow" and bridging of the etched wafers.

Modutek’s IPA Vapor Dryer cleans dry wafers without creating water spots. It can utilize ozone in the drying chamber to remove organic contaminants. Most drying cycles can be done in 10 to 15 minutes.

Modutek's state-of-the-art wet processing equipment is designed to meet the applications of any semiconductor manufacturing or research facility with either standard products or custom-designed solutions. If you need help with selecting the right equipment for your application, contact Modutek at 866-803-1533.

MEMS Manufacturing with Wet Processing Equipment

MEMS -- or micro electro mechanical systems -- are composed of minute manufactured components that can acquire, analyze, and process data and produce a desired mechanical output. Wet processing equipment provides micro-fabrication capabilities to meet the requirements of MEMS manufacturing. While wet processing equipment can help with the MEMS fabrication, it also has the capability to support it in different ways.

Using automated wet processing equipment ensures the consistency of process parameters and low product variability in manufacturing. The dimensions of the resulting micro-structures are sufficiently accurate so that the resulting MEMS will be able to maintain its consistency and high performance. Another advantage of using automated wet processing equipment is that it can reduce the production costs of MEMS compared to other fabrication options.

Modutek Corporation has been designing and manufacturing high quality semiconductor manufacturing and wet processing equipment for over 30 years. They also provide comprehensive experience and expertise in customizing equipment to meet their clients' specifications and needs. Contact Modutek at 866-803-1533 or by email at sales@modutek.com for more information.

What to Look for in a Semiconductor Equipment Supplier

When purchasing semiconductor manufacturing equipment, it is important to qualify that a supplier can provide equipment that meets all the requirements for your application. Identifying a qualified supplier will insure that the equipment that is purchased will perform as expected. The supplier:

- Must be an established company.

- Must be capable of providing a range of equipment for a broad set of applications.

- Should understand your requirements and confirm that their equipment will meet the specifications of your application.

- Must provide state-of-the-art equipment and are able to demonstrate constant development and improvement of their current products.

- Can prove that their equipment is of high quality and reliable.

- Must have reliable customer supports in case there are issues with servicing the equipment.

Modutek Corporation succeeds on all these characteristics as a reliable supplier of semiconductor manufacturing equipment. With over 30 years in the industry, you can be sure that Modutek is an excellent choice for projects in the high tech industry. Contact Modutek toll free at 866-803-1533 or send an email to sales@modutek.com.

Benefits of Using Modutek Acid Neutralization Systems

Modutek’s Acid Neutralization systems help regulate the pH level of a process stream in self-contained systems, whether it is continuous or in batches. These particular systems help counterbalance the pH value of a particular batch and only permit an action of discharge when the fixed criteria has reached.

These systems are available in many sizes, configurations, and designs and are built to suit the specific requirements of clients. While they do their job well in regulating the pH level of acid, these systems are also built with an emphasis on safety and dependability. Whether these batches are acid or alkaline, Modutek's Acid Neutralization Systems can fully function in automatic mode. With its range of neutralization options, it offers flexibility in application. Low-cost and affordable, as well as easy to install, it has comprehensive monitoring and alarm features which allow the operator to ensure the system is working as intended.

If you have questions about your specific requirements or want a quote for a Modutek Acid Neutralization system, send an email to sales@modutek.com or call at 866-803-1533.

Select Modutek Chemical Delivery Systems to Match Your Requirements

Chemical delivery systems from Modutek combine flexibility and high performance to provide the best solutions for the handling of chemicals. The flexibility of these systems can manage distribution, mixing, and recovery of chemicals. They also function effectively with Modutek's range of wet bench systems.

The chemical delivery systems have integrated operating controls for easy of use and insure accurate delivery and minimize waste. The systems will deliver, distribute, mix, transport and recover your chemicals exactly the way you want.  

These systems are fully automated. This means Modutek creates their own software which provides efficient and accurate handling of chemicals. The systems are designed, built and are guaranteed to meet the client's requirements.

Modutek's chemical delivery systems are high quality, safe, highly reliable as well as low in maintenance. Contact Modutek at 866-803-1533 or send an email to sales@modutek.com if you would like a free quote or need to discuss your specific requirements.

Improved Process Control with Modutek's Silicon Nitride Wet Etching Bath

Modutek Corporation, known for manufacturing silicon wet etching equipment (including rotary wafer etching system and quartz baths) offers the Nb silicon nitride etch baths, upgrading their Na series.

Silicon nitride etching is done in a solution that contains 85% phosphoric acid and 15% deionized (DI) water. This acidic compound is set to a boiling point of 160 degrees C, leading to steaming and eventual water loss, which in turn results in increased boiling temperature. The Nb series features improved controls including:

•         A condenser which takes back some of the steam to the bath
•         A temperature controller that detects the rise of the boiling solution
•         A thermocouple that activates an interlock if there's no steam
•         Additional safety interlocks
•         An etched foil resistance heater

The Nb series' design allows for accurate nitride etching control, good etching consistency, boiling control, easy installation, and a high degree of safety. If you would like to learn more about any of Modutek’s silicon wet etching equipment, contact us at 866-803-1533 or by sending an email to sales@modutek.com to receive a free quote.

How the IPA Vapor Dryer Improves Wafer Processing Time

The IPA Vapor Dryer from Modutek meets the demands of facilities and process engineers who are continually looking for ways to improve silicon wafer processing time. This system includes the SolidWorks Flow Simulation and Simulation Professional software to ensure improved operations and drying time with one or two 150-450mm cassettes or glass substrates.

Modutek’s IPA Vapor Dryer design has both rinsing and drying capabilities. This Marangoni drying system incorporates a single chamber to facilitate the final stages of the cleaning process. The system provides high throughput along with other advantages including:

·         elimination of watermarks on substrates and hydrophilic/hydrophobic films with no feature damage

·         15-minute batch drying for most applications

·         secure system interface bottle change that allows for fast, deck-level applications

The IPA Vapor Dryer also has a variety of additional safety features and optional features to provide optimal wafer processing with wet processing equipment. If you have questions, call 866-803-1533 or send an email to sales@modutek.com for answers.

Ways the Ozone Cleaning Process Supports Green Technology

The chemical solvents that most companies use during semiconductor manufacturing require special handling and are not environmentally friendly. Due to increasing concerns regarding environmental issues and disposing of chemical solvents, Modutek supports an alternative method called Ozone cleaning (stripping) process.

Rather than using chemical solvents which serve their purpose and are not environmentally friendly, Modutek’s Ozone cleaning process reduces or eliminates the use of chemical solvents in the process. This makes it much more cost-effective in a manufacturing facility. The equipment used in this process eliminates the need for solvents such as base strippers or sulfuric acid. These chemicals are not only costly to buy and dispose of, but also pose added risk to employees and to the environment.

Modutek's Ozone cleaning process is cleaner than using chemical solvents, safe to use, and environmentally-friendly. For more details read the article titled How the Ozone cleaning Process Supports Green Technology. If you have questions, you may call us at 866-803-1533 or email us at sales@modutek.com.

Wafer Processing Equipment To Meet Your Specific Requirements

Wafer processing equipment is needed by every semiconductor manufacturer and research facility. It provides optimum results for the continually shrinking geometries of integrated circuits. Semiconductor wafer manufacturing requires the use of durable and technologically-advanced wet bench stations that provide optimum yields with the lowest number of circuit defects.

Modutek Corporation manufactures all types of silicon wafer processing equipment that uses the most advanced technology:

·         Manual - cost-efficient equipment that can be used in every clean room process.

·         Semi-automated – a lower-cost alternative to the fully-automated station that utilizes touch screen controls, servo motor robots, and three degrees of flexibility which provides complete turnkey support.

·         Fully automated – includes full automation control and optional features to ensure convenience, efficiency, and increased throughput for your silicon wafer processing equipment.

·         Rotary wafer etching system - for efficient etching, developing, stripping, and cleaning process

For over 30 years Modutek has been designing, manufacturing, and installing all types of wafer processing equipment to meet every client's specific needs and requirements. Contact Modutek at 866-803-1533 or by email sales@modutek.com if you would like a free quote or discuss your specific requirements.

Use the KOH Etching Process with Modutek's Teflon Tanks

The potassium hydroxide (KOH) etching is an effective chemical process allowing for precise impressions within a silicon body. The process uses a solution of DI water along with heavy alkalinity (pH levels greater than 12). The solution's temperature is then adjusted to an ideal thermal degree required for etching. Unlike other forms of etching, this process allows for greater precision in terms of manufacturing silicon wafers.

Unlike dry etching, the KOH etching process reduces the risk of exposure to toxic (and even explosive) chemicals, creating a safe environment for manufacturing.

Modutek's Teflon Tanks are designed to facilitate the maximum potential of KOH etching. Each unit is manufactured to cater to the specific needs of clients. It can be used with wet bench equipment to greatly reduce the impurities other etching process may establish, providing more reliable, consistent results. For more details read the blog article titled “Using the KOH Etching Process with Modutek's Teflon Tanks.”

For more info about our Teflon Tanks, contact Modutek at 866-803-1533 or sales@modutek.com. 

Benefits of Using Quick Dump Rinsers for Silicon Wet Etching

Modutek's DR Series Quick Dump Rinser is designed for use during the rinse cycle in a silicon wet etching process. The use Deionized water (DI) during the rise cycle provides an essential step that is needed for particle and defect density reduction.

The DR Series Quick Dump Rinser provides a thorough and economical cleaning process. Its features and functionality allow for limited DI water use and ease of installation into new and existing stations. Our specialists can easily upgrade existing rinsing modules and install newly manufactured wet bench process stations to suit a client's needs.

The DR Series Quick Dump Rinser is compatible with the Modutek C15sa Rinser Controller, which is designed specifically for the rinse module. It also provides convenience to the cleaning process and is also highly adjustable.

The DR Series can also be used with Modutek's own Resistivity Motor RM30a for a more meticulous supervision of the cleaning process.

If you would like to learn more about Modutek’s DR Series Quick Dump Rinser, contact us at 866-803-1533 or email us at sales@modutek.com. 

Using RCA Clean in a Wet Bench Process

A wet bench process is a procedure involving the removal of organic residues from a silicon wafer and replacement of the surface layer of oxide with a new, thin layer. Semiconductor process engineers do this process first before processing silicon wafers under high temperatures.

SC-1 and the SC-2 are the solutions applied in this process.

The SC-1 removes impurities sticking to the silicon, quartz, and oxide surfaces in a 15-minute soak. It also gives way to regeneration of surface oxide layers.

After the SC-1 application, the wafer is soaked in SC-2 for 10 minutes. This eliminates other impurities such as microscopic metal hydroxides and alkali residues, ensuring that the silicon is thoroughly clean.

Modutek produces high-quality and technologically advanced wet bench processing equipment suited for RCA clean. Modutek also has IPA Vapor Dryers which can be incorporated to your wet bench and finalizes the cleaning process.

Find the Right Wafer Fabrication Equipment for Your Application

Whether manufacturing solar panels or semiconductors, for commercial, medical or military use, it's imperative to buy the right wafer fabrication equipment for your wet bench processing applications. Manufacturers need to consider these five factors when selecting a reliable wet bench:

·         High quality control standards and safety

·         Custom fabrication options

·         Wafer size and production volumes

·         A full service vendor

·         A vendor with a wide product selection

Modutek manufactures and supplies custom wafer fabrication equipment that comes in three different categories:

·         Manual wet benches - economical but efficient in your clean room applications.

·         Semi-automated wet benches - incorporated with servo motor automated robots and touch screen controls.

·         Fully-automated wet benches - enjoy a hands-off approach with Modutek's wet process stations.

Modutek has 30-plus years experience in supplying wet process equipment to industry. Our certified specialists are ready to work with you from the initial design to final installation, and also provide future assistance and service repairs.