Ways the Ozone Cleaning Process Supports Green Technology

The chemical solvents that most companies use during semiconductor manufacturing require special handling and are not environmentally friendly. Due to increasing concerns regarding environmental issues and disposing of chemical solvents, Modutek supports an alternative method called Ozone cleaning (stripping) process.

Rather than using chemical solvents which serve their purpose and are not environmentally friendly, Modutek’s Ozone cleaning process reduces or eliminates the use of chemical solvents in the process. This makes it much more cost-effective in a manufacturing facility. The equipment used in this process eliminates the need for solvents such as base strippers or sulfuric acid. These chemicals are not only costly to buy and dispose of, but also pose added risk to employees and to the environment.

Modutek's Ozone cleaning process is cleaner than using chemical solvents, safe to use, and environmentally-friendly. For more details read the article titled How the Ozone cleaning Process Supports Green Technology. If you have questions, you may call us at 866-803-1533 or email us at sales@modutek.com.

Wafer Processing Equipment To Meet Your Specific Requirements

Wafer processing equipment is needed by every semiconductor manufacturer and research facility. It provides optimum results for the continually shrinking geometries of integrated circuits. Semiconductor wafer manufacturing requires the use of durable and technologically-advanced wet bench stations that provide optimum yields with the lowest number of circuit defects.

Modutek Corporation manufactures all types of silicon wafer processing equipment that uses the most advanced technology:

·         Manual - cost-efficient equipment that can be used in every clean room process.

·         Semi-automated – a lower-cost alternative to the fully-automated station that utilizes touch screen controls, servo motor robots, and three degrees of flexibility which provides complete turnkey support.

·         Fully automated – includes full automation control and optional features to ensure convenience, efficiency, and increased throughput for your silicon wafer processing equipment.

·         Rotary wafer etching system - for efficient etching, developing, stripping, and cleaning process

For over 30 years Modutek has been designing, manufacturing, and installing all types of wafer processing equipment to meet every client's specific needs and requirements. Contact Modutek at 866-803-1533 or by email sales@modutek.com if you would like a free quote or discuss your specific requirements.

Use the KOH Etching Process with Modutek's Teflon Tanks

The potassium hydroxide (KOH) etching is an effective chemical process allowing for precise impressions within a silicon body. The process uses a solution of DI water along with heavy alkalinity (pH levels greater than 12). The solution's temperature is then adjusted to an ideal thermal degree required for etching. Unlike other forms of etching, this process allows for greater precision in terms of manufacturing silicon wafers.

Unlike dry etching, the KOH etching process reduces the risk of exposure to toxic (and even explosive) chemicals, creating a safe environment for manufacturing.

Modutek's Teflon Tanks are designed to facilitate the maximum potential of KOH etching. Each unit is manufactured to cater to the specific needs of clients. It can be used with wet bench equipment to greatly reduce the impurities other etching process may establish, providing more reliable, consistent results. For more details read the blog article titled “Using the KOH Etching Process with Modutek's Teflon Tanks.”

For more info about our Teflon Tanks, contact Modutek at 866-803-1533 or sales@modutek.com. 

Benefits of Using Quick Dump Rinsers for Silicon Wet Etching

Modutek's DR Series Quick Dump Rinser is designed for use during the rinse cycle in a silicon wet etching process. The use Deionized water (DI) during the rise cycle provides an essential step that is needed for particle and defect density reduction.

The DR Series Quick Dump Rinser provides a thorough and economical cleaning process. Its features and functionality allow for limited DI water use and ease of installation into new and existing stations. Our specialists can easily upgrade existing rinsing modules and install newly manufactured wet bench process stations to suit a client's needs.

The DR Series Quick Dump Rinser is compatible with the Modutek C15sa Rinser Controller, which is designed specifically for the rinse module. It also provides convenience to the cleaning process and is also highly adjustable.

The DR Series can also be used with Modutek's own Resistivity Motor RM30a for a more meticulous supervision of the cleaning process.

If you would like to learn more about Modutek’s DR Series Quick Dump Rinser, contact us at 866-803-1533 or email us at sales@modutek.com.