New SPM Process Provides 75% Improvement in Chemical Savings

Modutek has recently implemented the new SPM process and the company now has benchmark results from real process applications which show a significant improvement in chemical savings. The new SPM process requires the use of Modutek’s custom designed SPM process wet bench. Modutek designs and assembles wet benches and semiconductor manufacturing equipment at their facility in San Jose, California and provides systems that exactly meet their customers’ requirements.

Usually, the SPM mixture deteriorates as hydrogen peroxide turns to water and dilutes the concentration. The SPM mixture must be completely replaced at least every eight hours. This results in downtime during new mixture pour, replacement of the chemicals as well as neutralizing and disposal of the corrosive mixture in an environmentally safe way – and all these costs a lot. The SPM clean process is proven to provide results.

Modutek's “Bleed and Feed” system is designed to maintain the SPM mixture concentration automatically over extended periods. In this system, there is a “clean” tank and a “dirty” tank. A programmable amount of mixture goes out of the dirty tank, and another programmable mixture is automatically transferred from the clean tank to the dirty tank. To make up for that, an appropriate amount of sulfuric acid is added, and both tanks have hydrogen peroxide to restore and maintain the concentration.

One of Modutek’s customers that have used their semiconductor manufacturing equipment now has real life results from using the “Bleed and Feed” SPM process improvements. The results show remarkable improvements that include the reduction in volume of the following: sulfuric acid use, acid neutralizer use and chemical disposal volume. Costs in acid re-agent use are also significantly reduced. System drains are now cut down from three times a day to once a week. Downtime is not needed to drain and re-pour the mixture, and throughput is also increased. Safety is now improved due to reduced operater interaction with dangerous chemicals.

You can learn more about the new SPM Process by reading the complete article titled “New SPM Process Provides 75% Improvement in Chemical Savings.” Modutek is available to answer questions or provide a free consultation. You may reach them by calling 866-803-1533 or email modutek@modutek.com. 

How Chemical Delivery Systems Are Designed to Meet Customer Requirements

Many industry activities require the supply of various chemicals for their manufacturing and production processes. Chemical delivery systems often must be customized to exactly meet the requirements of a facility, since certain industrial processes may include special procedures and the use of specific chemicals.

Typical custom requirements deal with the following:

Delivery volumes

The quantities of chemicals used will significantly impact the design of a chemical delivery system. There are bigger bulk containers that handle large volumes of chemicals as well as drums or tanks that carry smaller volumes (but they have to be changed sometimes when the process requires a different chemical or when a new production process starts). In each caseload or level sensing must be available so that production personnel can plan the required delivery. The use of software allows operators to predict flow requirements so adequate chemical supplies can be kept on hand.

Precision and Repeatability

Different industrial processes, such as semiconductor manufacturing processes may have their own specific requirements for precision. Precision is often connected with repeatability – if a process must run in the same manner each time, the precision for chemical delivery must be the same for each run. Custom designs can ensure that precision and reliability are achieved, especially when high precision is required.

Safe Handling and Disposal

Since each chemical presents its own hazards and dangers, safe handling and disposal are of another importance. Customized chemical delivery systems provide an additional level of safety to employees handling chemicals and operating the delivery systems for specialized applications. Custom designs can incorporate the use of double-walled containment, corrosion-resistant fluid paths, and leak detection. Neutralization and disposal also require a customized approach because of the different ways chemicals are used and due to different disposal requirements.

Custom Chemical Delivery Systems from Modutek

Modutek can customize chemical delivery systems to meet the specific requirements of their customers. They design and build their systems in-house and can also customize the chemical delivery software according to the requirements of each manufacturing or production facility.


Read the complete article “How Chemical Delivery Systems Are Designed to Meet Customer Requirements” to learn more about Modutek’s chemical delivery systems. If you have questions or would like to discuss your specific needs, call 866-803-1533 or email Modutek@modutek.com.