How Process Controls Are Improved with Automated Wet Bench Equipment

When semiconductor manufacturing is automated, tight process control can improve overall facility performance.

Among the advantages of an optimized manufacturing process is the reduction of consumption of consumables and more uniform production results. Once a batch has run successfully, an automated process ensures that it will run the same way for the next batches. Well-designed automation will also help reduce silicon wafer handling and particle contamination.

Wet process equipment should also be able to customize the automated functions to meet the needs of the application. Once the process is set up, it can run with a minimum amount of operator interference and monitor.

Here are some of the advantages of an optimized automated wet bench equipment:

·         It can reduce chemical use – A fully automated wet bench equipment uses the least amount of chemicals required to carry out the etching or cleaning function and continues do so reliably.

·         Output quality is improved – With fully automated wafer fabrication equipment, semiconductor component output is consistent with fewer defects and rejections.

·         It reduces environmental impact – Automation can ensure that acid and solvent chemical waste is neutralized, and an automated system can block discharge if the output pH is not within predefined limits. Since all chemical use and discharge is tracked, compliance with environmental regulations can easily be demonstrated.

 Depending on what kind of semiconductor components are being produced, a manufacturing or research facility may require highly customized equipment to carry out the process steps required. The automation has to be flexible enough to accommodate custom process steps and the equipment provider should be experienced enough to customize both equipment and automation.

Ideally, the equipment provider should work with customers to exactly define what is required and then design and develop the wafer fabrication equipment with the required automation.

An experienced equipment provider, such as Modutek, designs and builds its own equipment in house based on extensive experience in wet process technology, leaving it in the ideal position to customize wafer processing equipment as needed to meet specific customer requirements.

Our latest article, How Process Controls Are Improved with Automated Wet Bench Equipment, goes into further detail. After you’ve read it, if you have questions or would like to set up a free consultation to discuss your specific needs, contact us at Sales@Modutek.com or by calling 866-803-1533.

How Chemical Carts Provide Safe Handling and Disposal of Chemicals

The chemicals used in the etching and cleaning semiconductor wafers are usually aggressive. That’s hy it’s crucial that they should be stored, delivered to the process, and disposed of properly and safely.

Chemical handling equipment, such as chemical carts (also referred to as chemical pump carts or chemical collection carts), are a convenient way to remove waste chemicals from the process and ready them for disposal.

Modutek’s chemical carts are specifically designed for safe pumping and containment of the chemicals and for moving them to a safe location for further treatment. They allow operators to quickly remove used chemicals from a process line and let the process continue to the next step with a minimum of delay. They are easily rolled up to the process tank that contains the used chemicals and operators can safely transfer even toxic or corrosive chemicals. 

Chemical cart design features:

• Compact profile at 36 inches long, 18 inches wide, and 42 inches high.
• Made of white polypropylene resistant against acids (also available in stainless steel for solvent applications).
• Mounted on lockable swivel casters.
• Suction wand for emptying process tanks.
• Independent discharge tube for transfer of waste chemicals to a neutralization system.
• Pneumatic pump, three-eighths inch.
• On-cart five-gallon chemical tank with double containment (Department of Transport-approved).
• High-level sensor interlocked with pump for added safety.
•  All-Teflon piping.

Modutek’s chemical carts allow operators to receive, store, deliver, and discharge these toxic and dangerous chemicals safely. These well-designed carts can help reduce waste, deliver accurate dosages to the process, and track chemical use.

Containment of spills is a crucial safety and environmental issue that can be addressed by good design practices. Modutek’s extensive experience with wet process technology and acids used ensure that the company’s chemical handling equipment operate in a completely safe and reliable manner.

Units similar to chemical carts can take on other functions. For instance, chemical delivery system can handle chemical reception, storage, and delivery to the process. They can include bulk storage such as in large tote chemical containers that can supply high volumes of chemicals, or 55-gallon drums located at the process. These systems can include software for dosage control and software can also control the mixing of chemicals.

Read our newest article, How Chemical Carts Provide Safe Handling and Disposal of Chemicals, to learn more. If you would like to discuss your specific needs or get answers to your questions, contact us via email at Sales@Modutek.com or by calling 866-803-1533.