Why Your Company Should Consider Modutek's Wet Processing Equipment

Modutek has been providing top quality wet process equipment for almost forty years. The industry of chemical etching has been well served by the durability, reliability, and cost effectiveness provided by the complete product line of wet processing equipment.

The complete range of techniques used by the industry is supported. The processes that use Modutek's equipment include Metal Etch, Aqua Regia, KOH (Anisotropic Etch), HF, Piranha, Photo Resist Strip, Develop Process, Buffered Oxide Etch, RCA Clean (SC1 and SC2), Aluminum Etch, and Silicon Nitride Etch.

Modutek's wet processing equipment comes in a variety of lengths and sizes to fit the needs of your company. There are two options for construction: white polypropylene (used for processing with acids and bases) and stainless steel (for solvents). All stations include wiring per NFPA 70 & 79, an EPO mushroom button, and safety interlocks. An N2 head case purge is installed on all benches, photohelicly interlocked to the EPO. There is an included DI water manifold for continuous flow, and can be moved easily with build in casters and adjusted with levelers when the machine is in position. The manual is available both online and on paper, and a one-year warranty is provided on all equipment.

Optional features include PVC-C construction, seismic zone 4 structural certification, certification from such third parties as NFPA, NEC, or CE mark, HEPA fan filters, overhead deck lighting, three-color light towers, dedicated drains and carboys with DOT containment, and counterbalance safety shields.

Your company's needs are sure to be met through Modutek's wet processing equipment. The full line consists of automatic and manual equipment, as well as custom designs or standard. Offering a variety of options means that your company's requirements for price and safety can be met, as well as providing expansion capabilities that are built in to the high-end wet processing equipment that your company needs, both now and in the future.

Whether you are starting with a new etching station, upgrading the process you already have, or purchasing additional stations, Modutek can be of assistance to you. Modutek designs and manufactures the equipment in-house for every process. These include quartz for high temperature acid baths with filtration and circulation available, stainless steel for solvent applications with filtration and circulation, plastic for materials such as FM4910, Polypro, HDPE, Teflon, Halar, PVDF, and certified welders, and support equipment including chemical mixing, chemical collect, chemical delivery, sub-ambient systems, fume scrubber, chemical neutralizers, and IPA vapor dryers.

Over thirty-five years of operation during which Modutek has provided semiconductor, solar manufacturing, and MEMS equipment has resulted in experience that means quality and reliability for your business. Modutek partners with you to create, design, and build your custom wet processing equipment, as well as installing and maintaining it as necessary. Call us today at 866-803-1533 or visit us online at Modutek.com for more information.

Benefits of Modutek's Dry to Dry Etching Process Equipment

Modutek Corporation offers fully automated Dry to Dry wet process equipment for base / acid that can be configured in many different ways to suit your company's wet process requirements. This equipment, used for processing / etching or cleaning, has been designed with much effort by Modutek's engineering team in order to provide the most effectiveness. Glass substrates to 30" x 60" glass solar panels, and standard silicon wafers can be accommodated by the water carriers.

All components, whether for etching, wet process, or cleaning, are manufactured after being designed in-house and complete support is provided. The dry-to-dry station makes use of the IPA Vapor Dryer, which is labeled MVD series (Modutek Vapor Dryer). The integrated dryer prevents the necessity of a separate drying tool, reducing transfer time and increasing yield and throughput. This is all handled by the advanced software designed by the software team. Modutek experts design, assemble, and test the whole robotic system in the facility at San Jose, CA. DI water is used for all quality testing procedures.

Some of the standard features that make the wet process equipment useful for your every-day applications include PVC safety shields, white polypropylene construction, photohelic interlocked to EPO, DI water and Teflon N2 gun hand spray, casters and leg levelers, encoder feedback on servo motors, touch screen with graphic user interface (GUI) on the PLC, 1" lip exhaust on every wet process tank, NFPA 70 and 79 wiring on all stations, IPA Vapor Dryer on board, Emergency Power Off (EPO) on all safety locks, multiple size and length options, and two copies of the manual of which one is paper and one is digital.

The software for the equipment includes SolidWorks Simulation Professional and SolidWorks Flow Simulation. The software and robotic design are completed in house and are not outsourced. The design work, assembly, and quality testing is all handled in one location.

Some of the applications for which Modutek's dry-to-dry wet processing equipment can be used include SC1 and SC2 containing Megasonic Energy, SPM Clean, Silicon Nitride Etch, Buffered Oxide Etching (BOE), KOH Etching, Ozone Cleaning, Ozone Etching, and Diffusion Clean.

The ozone feature known as DryZone is a revolutionary solvent gradient dryer that has been patented. The volatile organic carbon (VOC) and total organic carbon (TOC) guidelines have been exceeded with this technology. In this optional feature, deionized water is used to rinse silicon substrates in order to wash away any inorganic impurities. The pieces then move into a solvent chamber where a boundary layer is developed, serving to expunge organic impurities. The next step is the ozone chamber, which may also include ultraviolet light, where any leftover organic traces are turned into carbon dioxide gas. The surface is then clear of all particles, including moisture and trace organics, leaving a stable hydrophilic surface on the substrates. The surface of silicon wafers is Si-O terminated, unless a hydrophobic surface is needed, in which case a 10 second conversion step after the ozone changes them to Si-H terminated.

An advantage to the dryer is the lack of VOCs in the exhaust. It supports initiatives for green chemistry, unlike dryers that consume isopropyl alcohol. The reactive chemistries used in the dryer make it particle reducing.

Modutek's engineering team has the expertise and experience to design the most effective wet processing equipment for cleaning or etching your application. Call for more information or a quote: 866-803-1533.

Find Out More about the Modutek Chemical Delivery System

Chemical process engineering requires reliability and effectiveness. The system must deliver consistent results every time, and must be durable so it will last through many uses, with as little maintenance as possible. Simplicity for the user is also helpful. Modutek has designed its chemical delivery systems to meet all of these needs.

The updated version of Modutek's system for chemical mixing and delivery offers better performance than competitors. Modutek also has the ability to customize it to meet your particular needs. The design is compact with an assortment of control features which, when combined with software that is user-friendly, providing your company with a machine that is cost effective, safe, and fast in delivering results.

Modutek offers wet processing equipment that ranges from manual wet processing stations to fully automated lines. These combine skill with technology in a way that allows the machines to deliver 100% of requirements for clean rooms.

Modutek designs the systems to work with your specifications. The interface for chemical delivery can use anything from 330 gallon totes down to one gallon bottles, based on what you need. The systems for delivery and mixing result in safe and precise chemical supplies for your projects.

Because control software for Modutek systems is all written in-house, and tests are run to verify proper processing and iron out bugs or errors, you can be sure that the machinery will work as you expect when it is installed into your facility. Software, testing, and design are never subcontracted; everything is done at the facility in San Jose, California. DI water is used for all tests, and each and every process and part is designed, then created and tested in-house. On point calculations can be expected from the SolidWorks Flow Simulation and also from the SolidWorks Simulation Professional.

Your company will benefit from the expertise involved in the manufacture and support of the systems by Modutek. Since they designed, created, and tested the entire process, its performance is familiar and they will be able to service it and provide support whenever needed in its lifetime.

You can rest assured that your project requirements will be met by the custom designers. The fluid path of the wet processing equipment is all Teflon. The user-friendly software is also custom designed. The fast chemical changes allow for throughput that is greater than other machines. The operator interface is no longer needed.

Some of the basic specifications for the wet processing equipment include a 5 acid mixing system, two 10 gallon delivery tanks, FM 4910 material construction, materials that are acid resistant, optical leak detect with the 150% double containment, seismic bracing made of stainless steel, exhaust port, exhaust gauge, acid supply bottles, metering pumps, 2% mixing accuracy, mixing tanks, PLC main control, LED overhead lighting, and much more.

Modutek's chemical delivery systems can be used with plating stations, fume hoods, precision cleaning stations, acid exhaust hoods, and tech benches.