How Silicon Nitride Etch Processing Is Supported by Modutek

The silicon nitride etch process is used to selectively remove silicon nitride in relation to silicon oxide using wet or dry etching. This process is common in the manufacture of integrated circuits.

The silicon nitride etch process is quite intricate. The quality of etching equipment from semiconductor equipment manufacturers plays a large role in allowing engineers and process specialists to develop greater expertise and achieve better yield results. The silicon nitride etch process is facilitated by Modutek's Nb Series Operation Process. When this process is used with Modutek’s silicon nitride etch bath, it regulates the temperature while maintaining acid to water ratio via D.I. water supplementation.

Modutek's Nb Series is easy to install and can be implemented in new or existing stations, thanks to its new remote metering system. Process engineers trust Modutek's high-quality products and services, as the company puts emphasis on using the latest technology, meeting the customer's specific needs, and offering excellent technical support. For more information read our blog article titled “How the Silicon Etch Process Is Supported by Modutek” or contact Modutek at 866-803-1533 or 408-362-2000.

Developing a Requirements List For Buying Wet Bench Equipment

A manufacturing company or research facility faces a huge challenge when they are purchasing wet bench equipment. Such equipment is a big investment that involves reviewing a detailed set of technical requirements. You need to confirm that the equipment supports all the chemical processing and through put specifications needed for your applications.

Below are seven things you need to consider when choosing wet bench equipment:

• ·         Wafer or substrate size
• ·         Cassettes per bath
• ·         Is FM approval required?
• ·         Is CO2 fire system required?
• ·         Is a third party electrical inspection needed?
• ·         Wafer volume requirements per day/week
• ·         Exhaust/chemical fume hood filtration requirements

Pump requirements, in-line heater needs, and station layout are a few other things you may want to consider. For more information read our blog article titled “How to Develop a Requirements List When Buying Wet Bench Equipment” or contact Modutek at 866-803-1533 or 408-362-2000.