How Quick Dump Rinsers Improve Silicon Wet Etching Process

Quick dump rinsers provide fast and effective rinsing of silicon wafers from chemicals and particles. During semiconductor fabrication silicon wafers are etched with chemicals and particles, which have to be rinsed off to prevent continued etching.

Modutek's quick dump rinser uses de-ionized water to wash away all traces of chemicals while introducing no new particle contamination source. It uses state-of-the-art engineering techniques that allow it to reduce de-ionized water consumption while featuring a short rinsing time and particle reduction. The large trap door and the contoured rinsing vessel shorten dump times and promote laminar flow to rinse away contaminants. The machined dump door doesn't have any seals or gaskets that could entrap particles, and the smooth polypropylene construction of the tank ensures that it is not a source of new particle contamination.

Once the silicon wafers are placed in the rinser, de-ionized water jets rinse the chemicals from the wafer surfaces. The tank fills, bringing the rinsed contaminants to the surface where they leave the tank through the overflow weir. A nitrogen bubbler produces gas bubbles that rise through the water and remove additional particles and contaminants. At the final stage of the rinse cycle, the trap door at the bottom of the tank opens to drain the water.

The entire rinsing process is fast and thorough without introducing new contamination. The use of Modutek's quick dump rinsers can improve production and output quality. When quick dump rinsers work rapidly, effectively removing chemicals, particles, and contaminants leads to an increase of throughput and reduced chances of product rejection.

Rinsing is required after most of the wet process production steps, and any time saved with a quick dump rinser is multiplied by the number of times rinsing takes place in the semiconductor production process. Modutek's quick dump rinser provides these benefits by addressing overall semiconductor manufacturing requirements.

Modutek's quick dump rinsers provide additional benefits, such as reduced costs and faster production line operation. Reduced de-ionized water lowers costs, and an optional reclaim system can result in extra savings. Besides quick dump rinsers, Modutek also supports customers with full line of standard or customized silicon wet etching equipment.

For more details read the complete article, How Quick Dump Rinsers Improve Silicon Wet Etching Process. If you have questions, or would like to set up a free consultation, call 866-803-1533 or email modutek@modutek.com.

How Chemical Carts Support Chemical Disposal

 

Chemical disposal is often associated with adhering to increasing local regulatory compliance. The solution is to either remove used chemicals for off-site disposal or use dedicated equipment for disposal according to official guidelines to address these difficulties.

 

Chemical carts remove chemicals quickly and safely. They can be rolled over to process stations and can pump used chemicals to a container on the cart. The used chemicals can then be turned over to a disposal company or neutralized and treated at the onsite facility. The manufacturing process can continue with a fresh batch of chemicals while documentation and handling of the used chemicals can be carried out according to local regulations.

 

Once the chemicals for a process step has been used, they have to be drained from the process tank so that the next process batch can begin. The use of chemical handling equipment, such as pump carts, provides a flexible solution that allows operators to remove used chemicals from the process tanks for different process steps.

 

The operator can roll the chemical pump cart to the tank that holds the used chemicals and use the suction wand to pump the chemicals out of the process tank. The used chemicals are pumped into a dedicated storage tank on the chemical pump cart; after that, the chemical cart can be rolled out to a designated disposal area.

 

Whether the company has chemical neutralization and disposal in-house or not, the chemicals can be transferred to a disposal system or turned over to an external chemical specialist. Either way, the company must prepare documentation for handling chemicals according to local laws and regulations before proceeding to the final disposal.

 

Modutek's chemical pump carts are compact and easy to roll out. They are built with white polypropylene and can be moved with swivel casters (with brakes) and have individual suction and discharge tubes. Pumping is with a 3/8th-inch pneumatic pump. The five-gallon chemical tank features a double containment system and is DOT-approved. For additional safety, the cart has a high-level sensor, which is interlocked with the pump. The plumbing is all Teflon, and each cart can handle multiple applications. 

 

Several options that can be included in the tank include chemical carts delivered in a stainless-steel design for solvent applications; a pressure interlock safety switch; a large capacity tank; a double dump design, among others. Customers can decide on any of these options to meet specific requirements.

Learn more by reading the complete article How Chemical Carts Support Chemical Disposal as well as Modutek’s complete line of chemical handling equipment. To schedule a free consultation or quote, contact Modutek at modutek@modutek.com or call 866-803-1533.