How Chemical Delivery Systems Are Designed to Meet Facility Requirements

Different semiconductor manufacturing facilities or other users of chemicals have varying needs and specifications. That is why suppliers of chemical delivery systems need to able to customize their equipment to satisfy the specific requirements at different facilities. Suppliers who also manufacture their equipment in-house are better at adapting their standard products to meet the specific requirements of their clients, compared to third-party manufacturers.



The operation of chemical delivery systems can be divided into storage, delivery, and disposal functions. These functions are influenced by chemical volumes, the number of different chemicals, and facility layout. Operations that require a larger volume of chemicals, storage, and delivery options are different from smaller operations. Other determinants that also impact the execution of the chemical delivery system include the facility's space and equipment layout. A supplier needs to evaluate all these relevant factors and requirements before designing and building the custom system.



For example, a large operation requiring very few chemicals will only need few and simple controls. A different operation, which involves spiking with some chemicals and mixes others, will require complex controls with high precision. Requirements for repeatability, accuracy and quality control all come into the specifications for the design and configuration of the system. The system provided to a facility needs to incorporate each of these specific requirements.



Operator safety and system reliability are a paramount concern. However, the actual safety features required for the installation may still depend on the kind of chemicals used. Non-hazardous chemicals may not need any special safety measures, while hazardous and inflammable chemicals may require explosion-proof designs that must be certified safe by both the NEC and the NFPA.



In addition, operational strategies must be included to prevent workers from being exposed frequently to chemicals. For this reason, a degree of automation is required to enhance safety and reduce operation error. Semi-automatic and fully automatic systems usually have corresponding safety interlocks and automatic shut-down for dangerous conditions. In every case, the specific operating characteristics of the chemical delivery system must be evaluated and a custom solution needs to be designed and installed.



Read the complete article “How Chemical Delivery Systems Are Designed to Meet Facility Requirements” to learn more. For a free consultation to discuss your specific requirements contact Modutek at 866-803-1533 or email to modutek@modutek.com.

How Specialized Manufacturing Equipment Provides Safety for Using Solvents

Specialized wet bench equipment is used to reduce the risk of fire and explosion from the use of volatile solvents in manufacturing operations. Semiconductor manufacturing facilities use solvents (such as acetone) for various applications such as stripping, cleaning and pattern transfers. Such solvents are inflammable which is why the equipment has to meet stringent safety regulations. Safety measures focus on ensuring electrical components don't cause ignition of solvents or their vapors and operator safety through training.

When inflammable solvents are used safety regulations require specific features and along with operating measures to keep workers safe. Some of the features include the following:

•  Design to hazardous location Class 1 Division 1 or Division 2 certification.

•  Design electrical equipment to use low-power signals too weak to generate sparks that could set off an explosion.

•  Wiring per NFPA 70 and 79.

•  Use of carboys to collect solvent waste.

•  Detection of liquid spills.

•  Process monitoring with safety alarms for dangerous conditions.

•  Emergency power off mushroom button. 

•  Gaseous automatic fire suppression systems such as those using carbon dioxide.

An experienced wet bench equipment manufacturer incorporates these features in all their solvent station designs to ensure an integrated safety concept provides safe operation.

Modutek's stainless steel solvent stations meet all safety requirements. They manufacture the SFa and Sa series of stainless-steel solvent baths for solvent applications including IPA, acetone and resist strippers. The baths meet NEC Class 1 Division 1 Group D requirements for hazardous locations and are specially designed for safe operation. The baths are made of 304 stainless steel and are inert for any kind of solvents used. The SFa bath is a temperature-controlled recirculating bath while the Sa bath is constant temperature.



The SFa and Sa baths have all the required safety features including:

• NFPA 70 and 79 fire warning
• Fire suppression
• N2 head case purge
• 1-inch lip exhaust
• PVC safety shields
• Safety interlocks
• Emergency off mushroom button
• Teflon N2 gun
• De-ionized water hand spray
• Continuous flow de-ionized water manifold

Solvent stations are able to deliver improved yields while maintaining a high level of safety with fast heating and accurate temperature control. Modutek's stations are available in manual, semi-automated and fully automated systems. As a wet bench manufacturer, Modutek is able to both design and build a customized or standard equipment to meet your requirements.



For more details read the complete article, “How Specialized Manufacturing Equipment Provides Safety for Using Solvents”. If you have questions, or would like to set up a free consultation, contact Modutek at 866-803-1533 or email Modutek@modutek.com.