Why Your Company Should Consider Modutek's Wet Processing Equipment

Modutek has been providing top quality wet process equipment for almost forty years. The industry of chemical etching has been well served by the durability, reliability, and cost effectiveness provided by the complete product line of wet processing equipment.

The complete range of techniques used by the industry is supported. The processes that use Modutek's equipment include Metal Etch, Aqua Regia, KOH (Anisotropic Etch), HF, Piranha, Photo Resist Strip, Develop Process, Buffered Oxide Etch, RCA Clean (SC1 and SC2), Aluminum Etch, and Silicon Nitride Etch.

Modutek's wet processing equipment comes in a variety of lengths and sizes to fit the needs of your company. There are two options for construction: white polypropylene (used for processing with acids and bases) and stainless steel (for solvents). All stations include wiring per NFPA 70 & 79, an EPO mushroom button, and safety interlocks. An N2 head case purge is installed on all benches, photohelicly interlocked to the EPO. There is an included DI water manifold for continuous flow, and can be moved easily with build in casters and adjusted with levelers when the machine is in position. The manual is available both online and on paper, and a one-year warranty is provided on all equipment.

Optional features include PVC-C construction, seismic zone 4 structural certification, certification from such third parties as NFPA, NEC, or CE mark, HEPA fan filters, overhead deck lighting, three-color light towers, dedicated drains and carboys with DOT containment, and counterbalance safety shields.

Your company's needs are sure to be met through Modutek's wet processing equipment. The full line consists of automatic and manual equipment, as well as custom designs or standard. Offering a variety of options means that your company's requirements for price and safety can be met, as well as providing expansion capabilities that are built in to the high-end wet processing equipment that your company needs, both now and in the future.

Whether you are starting with a new etching station, upgrading the process you already have, or purchasing additional stations, Modutek can be of assistance to you. Modutek designs and manufactures the equipment in-house for every process. These include quartz for high temperature acid baths with filtration and circulation available, stainless steel for solvent applications with filtration and circulation, plastic for materials such as FM4910, Polypro, HDPE, Teflon, Halar, PVDF, and certified welders, and support equipment including chemical mixing, chemical collect, chemical delivery, sub-ambient systems, fume scrubber, chemical neutralizers, and IPA vapor dryers.

Over thirty-five years of operation during which Modutek has provided semiconductor, solar manufacturing, and MEMS equipment has resulted in experience that means quality and reliability for your business. Modutek partners with you to create, design, and build your custom wet processing equipment, as well as installing and maintaining it as necessary. Call us today at 866-803-1533 or visit us online at Modutek.com for more information.

Benefits of Modutek's Dry to Dry Etching Process Equipment

Modutek Corporation offers fully automated Dry to Dry wet process equipment for base / acid that can be configured in many different ways to suit your company's wet process requirements. This equipment, used for processing / etching or cleaning, has been designed with much effort by Modutek's engineering team in order to provide the most effectiveness. Glass substrates to 30" x 60" glass solar panels, and standard silicon wafers can be accommodated by the water carriers.

All components, whether for etching, wet process, or cleaning, are manufactured after being designed in-house and complete support is provided. The dry-to-dry station makes use of the IPA Vapor Dryer, which is labeled MVD series (Modutek Vapor Dryer). The integrated dryer prevents the necessity of a separate drying tool, reducing transfer time and increasing yield and throughput. This is all handled by the advanced software designed by the software team. Modutek experts design, assemble, and test the whole robotic system in the facility at San Jose, CA. DI water is used for all quality testing procedures.

Some of the standard features that make the wet process equipment useful for your every-day applications include PVC safety shields, white polypropylene construction, photohelic interlocked to EPO, DI water and Teflon N2 gun hand spray, casters and leg levelers, encoder feedback on servo motors, touch screen with graphic user interface (GUI) on the PLC, 1" lip exhaust on every wet process tank, NFPA 70 and 79 wiring on all stations, IPA Vapor Dryer on board, Emergency Power Off (EPO) on all safety locks, multiple size and length options, and two copies of the manual of which one is paper and one is digital.

The software for the equipment includes SolidWorks Simulation Professional and SolidWorks Flow Simulation. The software and robotic design are completed in house and are not outsourced. The design work, assembly, and quality testing is all handled in one location.

Some of the applications for which Modutek's dry-to-dry wet processing equipment can be used include SC1 and SC2 containing Megasonic Energy, SPM Clean, Silicon Nitride Etch, Buffered Oxide Etching (BOE), KOH Etching, Ozone Cleaning, Ozone Etching, and Diffusion Clean.

The ozone feature known as DryZone is a revolutionary solvent gradient dryer that has been patented. The volatile organic carbon (VOC) and total organic carbon (TOC) guidelines have been exceeded with this technology. In this optional feature, deionized water is used to rinse silicon substrates in order to wash away any inorganic impurities. The pieces then move into a solvent chamber where a boundary layer is developed, serving to expunge organic impurities. The next step is the ozone chamber, which may also include ultraviolet light, where any leftover organic traces are turned into carbon dioxide gas. The surface is then clear of all particles, including moisture and trace organics, leaving a stable hydrophilic surface on the substrates. The surface of silicon wafers is Si-O terminated, unless a hydrophobic surface is needed, in which case a 10 second conversion step after the ozone changes them to Si-H terminated.

An advantage to the dryer is the lack of VOCs in the exhaust. It supports initiatives for green chemistry, unlike dryers that consume isopropyl alcohol. The reactive chemistries used in the dryer make it particle reducing.

Modutek's engineering team has the expertise and experience to design the most effective wet processing equipment for cleaning or etching your application. Call for more information or a quote: 866-803-1533.

Find Out More about the Modutek Chemical Delivery System

Chemical process engineering requires reliability and effectiveness. The system must deliver consistent results every time, and must be durable so it will last through many uses, with as little maintenance as possible. Simplicity for the user is also helpful. Modutek has designed its chemical delivery systems to meet all of these needs.

The updated version of Modutek's system for chemical mixing and delivery offers better performance than competitors. Modutek also has the ability to customize it to meet your particular needs. The design is compact with an assortment of control features which, when combined with software that is user-friendly, providing your company with a machine that is cost effective, safe, and fast in delivering results.

Modutek offers wet processing equipment that ranges from manual wet processing stations to fully automated lines. These combine skill with technology in a way that allows the machines to deliver 100% of requirements for clean rooms.

Modutek designs the systems to work with your specifications. The interface for chemical delivery can use anything from 330 gallon totes down to one gallon bottles, based on what you need. The systems for delivery and mixing result in safe and precise chemical supplies for your projects.

Because control software for Modutek systems is all written in-house, and tests are run to verify proper processing and iron out bugs or errors, you can be sure that the machinery will work as you expect when it is installed into your facility. Software, testing, and design are never subcontracted; everything is done at the facility in San Jose, California. DI water is used for all tests, and each and every process and part is designed, then created and tested in-house. On point calculations can be expected from the SolidWorks Flow Simulation and also from the SolidWorks Simulation Professional.

Your company will benefit from the expertise involved in the manufacture and support of the systems by Modutek. Since they designed, created, and tested the entire process, its performance is familiar and they will be able to service it and provide support whenever needed in its lifetime.

You can rest assured that your project requirements will be met by the custom designers. The fluid path of the wet processing equipment is all Teflon. The user-friendly software is also custom designed. The fast chemical changes allow for throughput that is greater than other machines. The operator interface is no longer needed.

Some of the basic specifications for the wet processing equipment include a 5 acid mixing system, two 10 gallon delivery tanks, FM 4910 material construction, materials that are acid resistant, optical leak detect with the 150% double containment, seismic bracing made of stainless steel, exhaust port, exhaust gauge, acid supply bottles, metering pumps, 2% mixing accuracy, mixing tanks, PLC main control, LED overhead lighting, and much more.

Modutek's chemical delivery systems can be used with plating stations, fume hoods, precision cleaning stations, acid exhaust hoods, and tech benches.

Discovering the Modutek Rotary Wafer Etching Equipment

If you are looking for the most efficient, most reliable, and safest rotary wafer etching machine, you will discover the benefits of the rotary wafer etching equipment from Modutek. The company's Model SPS-rotary wafer etching equipment is a machine that is powerful and will rotate steadily for up to 80 revolutions per minute (rpm).

Presently, the Model SPS-rotary wafer etching equipment has been rated as one of most efficient, most dependable and safest rotary wafer etching machines on the market today. In terms of usability and control, this machine definitely cuts above the rest.

The system is an economical, automated, and ergonomically planned machine for batch processing. This rotary wafer etching equipment is specially manufactured the following processes: wafer reclaim, precise chemical etching, resist etching or cleaning substrates, and stripping developing.

Why this wafer etching system is so in-demand? Here are the things you will want to know about the system:

• It has a dual-tank wet station.
• The system supports wafer cleaning or rinsing. It will also handle chemical etching with transfers happening ergonomically between tanks.
• The system allows for easy operating. First, you load the wafer boats appropriately into the assembly carrier and then close the fume door. When this is done, all you have to do is to push the START button.
• The system has pre-programmed features. The carrier assembly brings the wafer boats directly to the tanks for chemical processing. This is followed by the rotational agitation for a specific preset time.
• As all systems processes can be pre-programmed, usually you will want to allow this pre-set time to elapse. After the pre-set time is complete and the system automatically turns off. You may, however, even cancel the process in the middle of it if needed. Once the system comes to a complete stop, the carrier assembly moves to a rinse tank for the rinse cycle. These cycles are also alternatively called Quench-Quick, Dump-Overflow rinsing.
• The last process of the system comes to rinsing. An audible alarm will let you know that the rinsing process has been finished.
• You may notice that the carrier assembly continues spinning until you physically press the RESET button. Once the RESET is pushed, the carrier moves to position to be removed from the driving unit.

Model-SPS Rotary Wafer Etching Equipment:

1. The system has a closed loop motor control. It comes with an encoder that can increase the rotational agitation precision.
2. High throughput.
3. Touch screen control and microprocessor power. It also comes with easy accessibility and has easy operable control functions.
4. Program is as many as five process procedures - or "recipes" - by way of a interface operated by touch screen. The interface displays all the recipes in a coordinated manner. It also displays results as a single interface, furthering convenience of monitoring.
5. During processing, the wafer boat continues to rotate. Then the rapid transfer occurs between the process bath and the quench tanks to ensure the results that are always consistent.
6. Environment friendly.
7. Double containment instruction.
8. Utilize the fail-safe feature when the N2 pressure's power is out.
9. Bath temperature control.
10. All parts are protected against fluids that are corrosive. These parts are either made from inert plastic or have been sealed appropriately.

Specifications:

1. Agitation - axial rotation over 0 – 80 rpm.
2. The process chemistry temperature can be controlled to +/- 1 / 2 degrees over ambient 100 degrees.
3. The process time can be set between 0 – 9999 seconds or 0.0 – 999.9
4. The product capacity can handle either 50 x 6" wafers or 25 x 8" wafers at the same time.
5. The pre-rinse time can be set between 0 – 9999 seconds.
6. The quick dump cycle can be set between 0 – 9999 seconds.

The system also offers these options:

1. gravity chemical refilling
2. fume condensation
3. process tank material options
4. resistivity monitoring in the rinse tank
5. chemical circulation
6. heating/cooling in process tanks
7. large-size wafer options are also available

Contact Modutek

Modutek is one of the leading semiconductor and wafer etching equipment suppliers in the San Jose, California area. The company has over 30 years of experience in providing electrical schematics that are considered industry-standard, solid models, as well as plumbing and instrumentation design and flow simulation. Modutek has been providing such services to high-tech manufacturers, universities, and research facilities. You can contact Modutek through this page http://www.modutek.com/contact-us/. Or you may visit our office at 6387 San Ignacio Avenue, San Jose.

Chemical Handling Equipment Addresses High Tech Manufacturing Needs

The usual issue for companies working with chemicals at various points of the manufacturing process is to find the right chemical handling equipment. They understand that the equipment needs to comply with all regulation requirements and be very dependable. Using chemicals is vital to many manufacturing processes. Any company that needs this type of equipment wants the services of a supplier who not only has extensive experience and expertise, but also offers excellent customer service if any issues are found. They want to know the issues are properly handled while using the equipment.

Modutek Corporation understands your company's needs and will meet your specifications. The right supplier will help you focus on the main concerns of your business like improving and developing manufacturing processes and procedures.

Leave all these things to an experienced company such as Modutek who is well-versed in chemical handling equipment. When you work with Modutek, you will now be able to focus your attention on other areas of your business without needing to worry about the quality, performance, and how reliable your chemical handling equipment is. We are confident we are able to provide you with right equipment to aid you in treating chemicals at any stage of your manufacturing process.

Modutek's Chemical Handling Products

Modutek offers a complete series of equipment for chemical handling to meet a wide range of manufacturing processes:

1. Fume Scrubbers
Modutek's fume scrubbers effectively remove hazardous fumes, gases, and other pollutants from the atmosphere using a minimum amount of water. With Modutek's fume scrubbers, you can achieve your goal of having quality air standards. Their fume scrubbers can also supply an air flow rate from 500 to 25,000 cubic feet per minute (CFM). These fume scrubbers are widely used by manufacturers working with plating and wet processing stations. Modutek also customizes their equipment to the company’s requirements and specifications.

2. Modutek's acid neutralization and acid neutralization systems generates a seamless, smooth process flow when used with other chemical processes. These systems offer continuous flow and batch systems. Modutek's throughput capacity for these systems can be customized and designed to comply with any production facilities' own specific requirements and regulations.

3. Modutek's chemical collections systems, chemical lift stations, and pump carts are a reliable set of equipment used for chemical handling that follows the flow of chemicals. This set of equipment has been designed to work together so that you are able to work with the chemical flow more easily. They are compatible so they function together. This ensures your process will not encounter any gaps. Furthermore, you won't face any issues with less efficient or less compatible equipment.

Advanced Equipment and Process Components

More than just handling specific chemicals, Modutek's chemical handling equipment has other useful functions:

1) Quartz baths - process quartz and reduce the chances of other chemical issues
2) Circulators - enable you to control both the cooling and heating processors' temperatures.
3) Vacuum metal etchers - provide you the needed safety for automated batch processors to move your product through several chemical processes

Modutek offers a number of reliable chemical handling equipment so that you can perform your manufacturing processes and procedures at their maximum capacity. Modutek's equipment can also assure you it offers safety at the highest level. Whether chemicals are your company's main line or simply a byproduct, you can rely on Modutek to provide the right equipment for your specific high-tech manufacturing needs. You may call us at 866-803-1533 if you would like additional information or to obtain a quote.

Guidelines for Using Modutek Wet Benches

Wet bench chemical equipment, including wet benches, is an integral part of the job when you are a process engineer or a lab tech. Because of this, it is extremely important to have the best quality equipment and tools to make your job more efficient. Reliability is important for manufacturing, and knowing which equipment is cutting-edge in the technology world will keep you from falling behind your competitors.

Because of this, we have been keeping up with the advances and offering updated products for over 30 years. Our equipment is based on expertise and research that allows us to offer wet bench stations that are manual, semi automated, and fully automated. Regardless which product you produce, from solar panels or flat panel displays to semiconductors or disk drives, or anything in between, our wet bench equipment is reliable, efficient, and top quality. It can also be geared especially to meet any requirements you have.

Helping You Choose the Right Equipment

Our experts will work with you to help you to choose the wet benches and chemical equipment that is best suited to your process. Our products are designed and built to be expandable for the future, so you can be confident that your equipment will suit your needs for a good long time.

Choosing the Right Equipment
When you are determining the wet bench that will best suit your company and your process, price is nearly always an important factor. This is why we have several options, one of which is sure to be the right one for you.

The option that is usually the most cost-effective is the manual wet bench station. Both solvent and acid applications can be handled by this station and there are many safety features and positive points even without robotic apparatus.

A mid-budget piece, semi-automated wet benches are high-tech and very configurable to meet the standards for your application. Process uniformity is accessible through this station without being required to pay top dollar for full automation.

Some prefer to have full robotics and all the bonuses and perks that come with it. For these, our fully automated wet bench stations will be appropriate. The operating software is uniquely generated at our location specifically for your unique configuration to allow you to begin using the equipment immediately after installation at your facility.

We Keep You Safe

Because your safety is important, we do everything we can to make sure that our wet bench processing equipment is made with the safety standards in mind. All safety standards are either met or exceeded. Safety shields and Emergency Power Off (EPO), along with safety interlocks, are in place to protect you and those with whom you work.

You can contact us by phone or email if you have other questions about our wet benches, or if you would like to discuss your company’s requirements and get a free quote. Our phone numbers are (866) 803-1533 or (408) 362-2000. You may send emails to sales@modutek.com for more information.

Suggestions on Selecting the Best Wet Bench Equipment for Your Application

When you select the best wet bench equipment for your application, your process will be more efficient and more cost-effective. In order to be sure that the equipment you have chosen is the best, you should use a trustworthy vendor who has experience and are experts who can meet your needs for equipment, upgrading, and support. The vendor you choose should have the important characteristics as explained below.

The equipment you choose needs to be high quality, and that goes for the company, as well. The company should be one that has high standards for quality and one that follows ASTM standards. They should have a warranty and a plan for ongoing service and support for all equipment they manufacture. If a supplier has insufficient quality control within their organization, serious problems can occur for the end user of the equipment.

Since each wet bench and wet bench chemical station has its own function, a vendor that offers a variety of options should be chosen. See if their custom machinery also includes repair at the end user's location and whether installation is included. Check what they offer for tech support, since maintenance is an important consideration when purchasing equipment.

The more you can get from the same vendor, with across the board quality control, the better the equipment will serve you. When the vendor offers parts for repairs and additions that have also been tested with the same standards, the equipment should be reliable.

Check the history of the vendor that you are considering. If the vendor has a good track record, there is a good chance they will provide continued service and support. A vendor who is new to the business may not have the ability to get you started and provide ongoing support, due to a smaller customer base and less experience. A vendor who has been in the business for many years and is established is more likely to be able to recognize issues that may arise and already know what is needed to correct them.

Check the product line of the vendor to see if their list includes items you may need in the future. Having a relationship with a vendor will be beneficial to both businesses. While the quality and reliability of wet etching equipment is important, a vendor who is able to meet and support your needs now and in the future is also important.

Modutek is a vendor that is able to meet all the criteria mentioned above and offers reliable, high-quality wet bench equipment for those in the high tech industry, and has been in business for over 30 years. You can reach a representative by calling 866-803-1533 or emailing sales@modutek.com with any questions.

Tips on Selecting the Right Semiconductor Manufacturing Equipment

When facility managers or engineers purchase semiconductor manufacturing equipment they need to make sure that the equipment chosen meets all the requirements for the application, and maintains a reliable manufacturing process. Because of this, it is important to work with companies and suppliers that offer the best customer service, upgradeable equipment, and product lines that encompass a full line of options. The list below will help those who need to sort through these items and choose the right equipment according to their needs.

• Instructions for the equipment are vital. Confirm thata comprehensive user manual is included. In order to make sure theperformance of the equipment is high quality, extensive documentation isnecessary. Included in the documentation for this complex equipment shouldbe details such as schematics and what replacement parts may be needed.Following instructions will not only increase effectiveness, but also thelongevity of the equipment, giving you a better return on your investment.
• Look for a company that offers a variety of options.Because each company has its own needs, a manufacturing company thatoffers many options will best serve all applications. For instance,Modutek's equipment includes support for plating, silicon etching, precisioncleaning, photo-resist strip, and ozone process for cleaning. Modutek’sequipment is also used to manufacture flat panel displays, and MEMS(microelectromechanical systems).  
• Up-to-date technology is important in today's world. Asnew advances are made, Modutek keeps customers informed and adds suitablemodifications to its equipment.
• Be safety-conscious, and look for a company that isalso safety-conscious. See that there is a clear explanation ofrequirements for safe and effective operation when you purchase anysemiconductor equipment.
• Ask about on-site repair. Since the equipment is largeand complex – and essential to the manufacturing process – it is good todeal with a company that is willing to do repairs at the purchasingcompany's location when necessary.
• Know what is included in the company's array ofproducts. Modutek has a variety of products to work with many differentapplications, including equipment for wet processing, chemicals stations,components for processing, and equipment for handling and cleaning.
• Check for a warranty and technical support. Both areimportant to keep the equipment functioning properly. A warranty will helpin case of equipment malfunction.
• Custom fabrication can be exactly what a company needsfor its applications. Whatever equipment is needed, the company can speakto the technical staff at Modutek and give the specifications needed toachieve its purpose. Our design team will do their best to design a pieceof equipment to meet those needs.
• Comprehension of equipment specifications will ensurethat the correct equipment is purchased for the job. It helps to work withexperts and engineers who you understand the products before purchasingsemiconductor manufacturing equipment.

Take advantage of the specialized knowledge and experience of a company that has been manufacturing equipment for an extended time. Modutek has been designing and manufacturing semiconductor manufacturing equipment for over 30 years and is ready to provide the needed equipment to meet your specific requirements.

Discover More about The Acid Neutralization Systems from Modutek Corporation

Modutek designs and manufactures a complete line of Acid Neutralization Systems. These include Continuous flow as well as Batch sequence reactor systems and are self-contained for treating industrial waste. Modutek designs these systems so they can easily be installed and operated. They are also compact and relatively inexpensive.

So what does an acid neutralization system do? It adjusts the pH level of process streams to a defined discharge range that is acceptable. Industrial applications will usually adjust the pH balance to a neutral pH range of 6 to 9 before they discharge water into public sewer system. Continuous flow Neutralization systems are appropriate for relatively high flows with mild alkaline or acidic (e.g., 2.0 < pH < 12.0) waste water.

Continuous flow systems are generally smaller and cost less when compared to Batch systems. However, they may also be more limited. Batch systems are used more for difficult and demanding industrial applications. This would include those with inconstant or constantly changing pH balance flows. It may also include treating flows that are determined to be highly acidic or alkaline waste water. In these cases a Batch system would be the best choice since it only discharges when the treated effluent meets specific discharge criteria.

Modutek's Acid Neutralization System products can also be modified to suit the specific dimensional requirements of nearly any working environment. Modutek also customizes the system's throughput capacity to match the size of the clients' production facilities.

Continuous flow Neutralization systems are best suited to specific applications that include:
1. Influent chemistry that is relatively fixed and does not have largely varying  incoming pH or chemistry
2. Influent flow that is also relatively constant and is not typified by large flow surges
3. Used as a single stage as part of a more complex application (such as fluoride or heavy metal reduction)
4. Effluent pH limit is not highly constrained (range of <2.0 pH units).

Continuous Flow Neutralization Systems
Modutek's Continuous flow Acid Neutralization Systems come in either two or three stages. Apart from being a self-contained product, it can also be installed indoors or outdoors. It has a final chamber for sampling and recording the pH discharge. It is also available either with a single or double containment, and provides a fully automatic operation to discharge within predefined limits. It is available in many sizes that range from 5 to 500 gpm.

Other features of this system:

1. Fully automatic operation that allows it to treat both acidic and alkaline waste waters in an automatic operation.

2. Designed as either a two or three stage system. The two stage systems are used for normal applications, while three stage systems are able to handle more demanding conditions.

3. Unitized construction including 5 to 100 gpm systems, that use steel-reinforced 1/2 thick thermo welded polypropylene. The larger sized designs have skid mounted process tanks made in polyethylene, fiberglass or lined steel.

4. Microprocessor based pH control. This ensures high accuracy, reliability and ease of calibration. It also includes a digital chart recorder which is used for digital monitoring and recording of pH discharge.

5. System Alarms

• Both low and high pH alarms in the final chamber
• Remote Ethernet access that is connected into relays in the control panel
• Double containment that contains a liquid sensor
• Low level reagent (testing agent) storage tanks

6. The electrical requirements are controlled to 115 volts (VAC), while mixers and pumps can be 115, 230 or 460 VAC.

Batch Sequence Reactor Systems
Modutek also manufactures Batch Sequence Reactor Systems to provide effective treatment of waste water that may contain several heavy metals such as copper, zinc, lead, and nickel. It also treats waste streams that contain fluorides, metal anions, and complex or chelated metals.

The Batch Sequence Reactor Systems can effectively address the following:

1. Precipitation and Flocculation effectively removes common heavy metals such as copper, lead, nickel, and zinc.
2. It also chemically reduces metal anions such as chromium and arsenic.
3. Calcium or magnesium effectively removes fluorides.
4. Ion Exchange resins or Flocculation removes trace metals.

High reliability and programmed automation are what Modutek’s Batch Sequence Reactor Systems provide. This includes the following features:

1. Programmed pH adjustment and chlorination to dispose of bacteria.
2. Programmed Reaction Sequences – Using multiple reagents such as polymer flocculent may be fed, to help the growth of precipitate particles.
3. Built-in Holding Tank - This is where waste water is collected and stored. The tank automatically processes the waste water when sufficient volume is collected.
4. Double containment - It features a triple-welded polypro outer shell including leak detection.
5. System alarms will sound to alert high and low pH, low regeant levels, and any leakage found in the double containment system. Specific ion measurements are available with Final Monitor and alarms.

For more information about any of the system specifications for the acid neutralization systems, visit our website. If you need more information about choosing the right acid neutralization system for your specific application or if you would like us to provide a quote, call Modutek Corporation at 866-803-1533.

Choosing Modutek Corporation's Teflon Tanks with KOH and TMAH Etching Processes

Modutek Corporation, a leader in wet processing equipment, manufactures products for the semiconductor industry which include the TFa and TI series PFA Teflon tanks.The products fully support the KOH etching (using Potassium Hydroxide) and TMAH etching (using Tetramethylammonium hydroxide) processes.
Modutek's line of heated Teflon tanks is available in three forms: Temperature Controlled Recirculating Baths, Temperature Controlled Static Baths, and Teflon® Ambient Baths.

Teflon tanks are constructed with a modular design, and come with two available heat sources. They are equipped with a fluid path which is also lined with Teflon®. They have control temperatures of ± 0.5º C while the processing takes place, and process etch uniformity from wafer to wafer is <2%. Teflon®-lined tanks are constructed with 360-degree overflow filtering and draining.

KOH and TMAH are anisotropic silicon etches used to make cavities in silicon. Therefore they are ideal for creating V-grooves, holes and membranes through wafers and other devices. These etches can be deep or shallow, and have the tendency to etch any exposed silicon -- that's why a masking layer is needed to protect the silicon.

Between the two (and all other hydroxides), KOH provides the best etching results. It also etches the fastest, and this process is also safe and easy to implement. Another plus for KOH etching is that it definitely costs less than other etching processes. TMAH, on the other hand, has a slower etch rate, and this is preferable if the masking layer used is made of silicon oxide.

Teflon®-lined tanks are created and designed to reduce the contaminants and non-essential byproducts caused by progressive welding techniques with PFA (tetrafluoroethylene and perfluoroalkylvinylether copolymer) sheet material. They provide effective corrosion resistance. After the first process has been performed, there's no need for constant adjustment to the Si (silicon) etching process.

Modutek creates and designs its all of their Teflon® tanks according to the needs and specifications requested by their customers. The company is best at what it does – designing, creating, and constructing products that are compatible and suitable with other wet bench equipment, per their customer’s specifications.

KOH and TMAH etching is best implemented when it uses wet bench equipment with Modutek's TFa or TT series of PFA Teflon-lined tanks. The Teflon® -lined tanks come with a manual cover with an overlapping seal. They are constructed to minimize the chances of liquid loss. When it's used for a long etch time, you will never encounter any concentration deficiency.

Modutek's Teflon® tanks offer two heat source options: Teflon® inline heating, and immersion heating. As the company customizes its Teflon® tanks, it also augments additional features and options. These customized options include unlimited size of the tanks, bottom drain features, magnetic stirrer for agitation, water condensing refluxor technique (available for all baths), and spiking system for both de-ionized (DI) water and isopropyl alcohol (IPA).

Modutek is known for its world-class service as well as its installation and support for their Teflon tanks and any of their other related wet bench equipment. Their products and services focus on precision, reliability, throughput, up-time and usability. You can learn more about the Teflon tanks or any of the other equipment Modutek designs and manufactures by calling them at 866-803-1533 or sending an email to Sales@Modutek.com.

Introducing Modutek’s Water Ring Seal (WRS) Option in Quartz Bath Equipment

In its thirty-plus years of experience in providing semiconductor manufacturing equipment solutions, Modutek Corporation introduces another product, the Water Ring Seal (WRS).

Modutek invented the Water Ring Seal in a bid to prolong the heater life of any high-temperature quartz bath. When you choose the WRS feature, it will make any high-temperature quartz bath have a standard 30-month warranty.

One of the advantages of adding the WRS feature to your quartz bath is the 360-degree water ring seal under the quartz bath's top flange. The water ring seal provides sufficient blockage against chemical fumes from getting into the quartz bath's heater chamber. Whether you do etching, stripping and cleaning, you will have no worries for your quartz bath as it's protected by the water ring seal.

Other benefits of the water ring seal (WRS) design for your high-temperature quartz bath, aside from the 30-month warranty:

• With the water ring seal giving such added extension to your quartz bath's heater life, it should reduce inventory control
• It will reduce the need for process downtimes
• It will improve process yields
• It will reduce the likelihood of having to ship your current quartz bath off for repairs

Modutek's Qa and QFa Series high-temperature quartz baths are ideal for the water ring seal option. The company's standard quartz baths are bonded with a heating element called Inconel (a trademark name for a nickel-chromium based super alloy) that will provide fast, efficient, balanced and constant heating. Modutek's QFa series is the more recently upgraded version of the Qa series quartz bath with an extra circulation feature.

Modutek's quartz baths also come with a seamless, sloped run-off flange which contributes to its longer vessel life. They are designed to decrease the likelihood of particulate contamination while they facilitate laminar flow (making it less turbulent). The quartz baths are also secure as they come with a dual safety snap switch.

Modutek is proud of its Qa and QFa series quartz baths that have been produced during the company's more than thirty years of designing and engineering evolutionary, innovative, high-quality quartz bath designs. As with all the other Modutek products, their quartz baths have one-year warranties. As for the water ring seal option for quartz baths, it has a 30-year warranty.

Modutek provides excellent support for the Quartz Baths and every product they sell. They will respond to your call within 24 hours (week days only). You may contact them at 1-866-803-1533 or by sending an email to Sales@Modutek.com.

Advanced Wet Benches and Wet Processing Equipment from Modutek

One of the renowned products of Modutek Corporation is their complete line of wet benches and wet process equipment. The company's wet benches are customizable to meet its clientele's requirements and specifications.

Wet benches are commonly seen in a semiconductor fabrication plant. These wet benches are used to clean off debris and/or etch away any non-essential films from semiconductor wafers. Wet benches are also used in priming the wafer's surface for the next step in the general process. There are other types of wet benches that clean other semiconductor components such as quartz.

Wet benches are classified into various types: Manual, Semi-Automated, Fully Automated, Linear Robot, Rotary Etch, Dry to Dry and Stainless Steel. The company offers high-quality cleanroom wet benches and other related semiconductor and batch immersion process tools and accessories, with prices that are within the client's budget.

Modutek's wet benches are also highly customizable, with a wide range of various features for the clients to choose from according to their own fab's specific requirements. These optional features include megasonic and ultrasonic tanks (sonic energy develops cavitations that help increase cleaning efficiency), robots, exhaust options and other features and materials that are left best to the requirements of the clients. The company's wet benches and wet processing systems are used in many major semiconductor laboratories, as well as medical and solar facilities here in the US and in other parts of the world.

Wet benches and wet processing equipment are designed for many specific purposes. Typically, they often incorporate cleaning aside from etching and stripping. Other wet benches may also include other related applications such as solar wafer processing, university research labs, precision parts cleaning, etc. Most wet benches like those from Modutek can handle acid or base chemistries.

In etching, the process applications include silicon, oxide, potassium hydroxide (KOH) and tetramethylammonium hydroxide (TMAH). In stripping, there are two kinds: solvent resist strip and acid resist strip. In cleaning, applications include pre-photo, photomask clean, pre-diffusion, pre-Epi, wafer reclaim, pre-panel build clean and post-saw clean. All of these procedures efficiently performed by Modutek's wet benches and wet processing equipment.

By using Modutek's state-of-the-art wet benches and wet processing equipment, clients will see several benefits:

• Flexible and upgradable platforms for the client’s needs
• User-friendly and well- controlled
• Low on maintenance
• Customizable designs to suit to your requirements and specifications
• Modutek knows up-time and reliability is everything to their customers. The components and spare parts are easily obtained and replaceable
• With the equipment's overall functional design, construction materials, safety interlocks, and Modutek's many years of industry experience and use of its own software, you can be sure of the wet benches and processing equipment's safety and reliability.

Modutek is also ready to provide assistance and support in regards to the equipment parts, installation, and operation of their Wet Benches and Wet Process Equipment, as well as the other products sold by the company. Their support section will respond to your call within 24 hours (week days only). You may reach Modutek by calling 1-866-803-1533 or sending an email from our website http://www.modutek.com.

Modutek Corporation Has Differences You Can Depend On

Get to know Modutek Corporation, one of the country's leading semiconductor manufacturing equipment solutions and wet processing equipment companies.

When it comes to providing wet processing equipment, Modutek is one name that has been proven and is trusted. Modutek Corporation has been around providing semiconductor manufacturing equipment solutions for over three decades and can be found in San Jose, California. The company has grown and evolved through the years as well as through their improvements in their products and services. They have also had other corporate developments such as company acquisitions.

Modutek never fails to have the ability to meet all of the customers' wet processing equipment needs with one manufacturer. Modutek is a one-stop shop company when it comes to providing our clients’ needs because all the designing and manufacturing the equipment is handled at one location. This is one characteristic that makes Modutek stand out from all the competition.

With Modutek's over 30 years of experience, the company caters to every client’s quotation requests and orders. Companies do not have to worry about catalog ordering. Instead, Modutek manufactures products that are customized, matched with its best service, commitment, high quality products, reliability, accessible support and equipment start-up. This helps Modutek stand out among its competition.

Modutek has provided high-quality wet processing equipment such as wet benches, along with an excellent line of semiconductor manufacturing equipment to over 500 companies all over the United States.

Modutek's state-of-the-art product line includes wet benches (manual, semi-automated and fully automated) and their upgrade, free-standing IPA Vapor Dryer, Megasonic cleaning systems, a comprehensive line of process components and rinsers, control systems for all applications. Our product line also includes rotary etchers, wet bench upgrade, air scrubbers, acid/base neutralization systems, chemical delivery systems and chemical mixing equipment, and chemical collection systems. Modutek also offers in-house service and support as well as accepts contract manufacturing.

Ensuring the quality of Modutek's products and accessories, the company offers one year warranties on everything they manufacture. Support is accessible 24/7 to answer ensure a response to all clients' inquiries and problems (call 1-866-803-1533). The company's fully automated equipment has remote access capability, enabling its house engineers to do the software update and troubleshooting anytime through Internet access. Modutek offers overall support that would depend on the clients' particular specifications and contract.

All of Modutek's equipment has been designed in-house. Since the company's products are customizable, its experienced team of engineers will first examine the customer's requests and specifications. Modutek will start manufacturing equipment by basing it on one of their established standard platforms, and then it will move on to create a specific customizable system. Modutek has created, designed and engineered hundreds of systems. These systems have involved and intricate processes for etching, chemical mixing, and other processes. The company's support offers various kinds of assistance through communication support, manual operation, and full-data logging in real time, as well as others that concern system issues.

Modutek has established its reputation as a company that works directly with its clients, aside from its top-grade product line. Visit their website at http://www.Modutek.com or contact them through telephone by calling 1-866-803-1533. If contacted during the work week, they will reply within 24 hours.

Modutek Makes Ordering Easy for Chemical Fume Hoods

Chemical Fume Hoods are ventilation equipment that prevents extensive exposure to hazardous or toxic chemical fumes. They also limit the exposure of harmful dust, gas or vapors. Semiconductor manufacturing solutions firms, such as Modutek Corporation, manufacture fume hoods that come in a wide range of designs and features.

Fume hoods may be in the form of a table top exhaust hood or a freestanding hood that is equipped with a HEPA (High-efficiency particular air) filter. But there's no limit to design choices because Modutek designs and manufactures custom-made fume hoods, depending on the clients' particular needs, lab equipment requirements and specifications. These fume hoods are also ideal for wet processing.

Modutek manufactures and designs excellent fume hoods. The materials used are uncompromisingly of high-grade quality: stainless steel which can handle any solvent application you may have and white polypropylene which is suitable to withstand base and acid processes.

Modutek's fume hoods come with an electrical outlet at the deck level. Usually fume hood units can be manufactured using a standard outlet, a ground-fault circuit interrupter (GFI), or an electrical outlet that is explosion proof. Most states will require the use of GFI outlets because they offer the best protection from electric shock. Chemical Fume Hoods can also be fitted with the outlets needed depending on the clients' specific manufacturing requirements.

Fume hoods can also be manufactured with a built-in utility sink and a faucet (we offer a gooseneck faucet as an option), overhead fan filter units (FFU), carboy chemical containment system (that traps waste solvents during wet processing), counterbalanced safety shields, LED lighting (that is also fitted on-deck), DI hand spray, lift stations equipped into the benches, and many more. As Modutek offers customizing products, fume hoods can be designed according to its clients' current product specifications and requirements. The size and length of a chemical fume can be modified to meet the company’s processing needs. The company's fume hoods and exhaust stations are also designed to control the temperature of chemical baths.

If your company needs chemical fume hoods with specific requirements such as dedicated drains or carboys with DOT containment, call us at 866-803-1533. If your requirements include lift stations that are designed into the benches, HEPA fan filters, or D.I. water hand spray, Modutek would like the opportunity to build the chemical fume hood your company needs.

A Chemical Delivery System That Is State-of-the-Art

A Chemical Delivery System, as well as Chemical Mixing Equipment, is designed to minimize waste and labor costs in delivering and mixing chemicals. Certain companies like Modutek Corporation unveil delivery and chemical mixing systems that are compatible with a line of wet benches (lab benches and similar equipment that are used for liquid solution tests.) These wet benches include manual, semi-automated, fully automated, and stainless steel.

These state-of-the-art delivery systems are designed to lessen the overall operational costs in handling and transporting chemical liquids. Accurate mixing systems are efficient in avoiding erroneous manual pouring, thus reducing excessive chemical wastage. These systems are ideal inside a cleanroom environment.

Many companies that engage in manufacturing wet process components in the semiconductor industry use handling equipment that comes in different types. The reliable equipment can be used in handling, delivery, distribution, recovery and transport of 100% pure and clean chemicals. These chemicals are used with new or currently-used wet benches and wet processing systems.

Many of these wet processing systems are customizable and built for a client's specific requirements for chemical delivery and transportation as well as mixing and recovery. These systems, especially made by Modutek Corporation, are used for a variety of industrial processes and applications including MEMs (microelectromechanical systems) and semiconductor processes. System controls and software are designed and engineered to be completely efficient, reliable and user-friendly. Other tools and accessories are also available such as totes, drums, bottles, and carboys.

Aside from precise mixing as well as suitability for use in various wet benches there are other beneficial features of using a chemical delivery system. This system also allows the control of handling and delivery of chemicals in large volumes, detects leaks, has data logging and Teflon plumbing, calculates delivery accurately through SolidWorks Simulation Professional and SolidWorks Flow Simulation, and has multiple configurations in order to meet your requirements.

Some chemical delivery systems are also manufactured and engineered to be compatible with existing wet processing benches in other brands. The Modutek Chemical Delivery System is also ideal for use in tech benches, fume hoods, precision cleaning stations, plating stations, and acid exhaust hood.

A 55-gallon self-contained chemical drum is also available in every chemical delivery system and chemical mixing equipment. This drum is designed for delivery and recapture of the chemical contents. Each Chemical Delivery System and Chemical Mixing Equipment is also equipped with a dedicated controller, five-gallon reserve tank, expandable drum or tote, and a five-gallon carboy. These unbeatable features make the delivery, handling, transporting, recapturing and mixing of chemicals precise, flexible, and controllable.

Contact Moduek by sending an email to Sales@Modutek.com or calling us at 866-803-1533 if you would like to learn more or receive a quote for your specific requirements.

Modutek’s Nitrite Etch Bath's Use in Silicon Wet Etching

Modutek Corporation has been providing semiconductor manufacturing equipment solutions for more than 30 years, creating and designing Silicon Wet Etching components and similar wet processing equipment and services. Modutek presents the "Nb" series which is part of their Silicon Nitrite Etch Bath products, a remarkable improvement to the previous "Na" series.

So what does Modutek's Silicon Nitride Etch Bath line of products do and what advantage does it give? They have been created, designed and engineered to give superlative process control.

The "Nb" series of Modutek's Silicon Nitride Etch Bath's distinct feature is its two-tiered diagnostic system. The advantages of the Nb series Silicon Nitride Etch Bath system are as follows:

• Its two-tiered diagnostic system, it lets the user control the temperature
• It controls the acid-to-water ratio through supplemented D.I. (de-ionized) water through its remote DI water metering system
• It retains consistency and uniformity in Silicon Nitride Wet Etching
• It allows control in boiling chemicals to avoid what is called "bumping"

Wet etching is a technique that removes certain materials through soaking the sample into an etch bath which has the liquid solution. The etchant is a kind of acid or corrosive chemical solution used for this purpose.

In this case, etches for silicon nitrides are a combination of 85% phosphoric acid, (H3PO4) and 15% D.I. water. The water boils typically at 160°C. Since the water boils, it will evaporate and carry the solution away as steam. To abate the steaming, the Nb series silicon nitride etch bath contains a refluxor will help carry the steam back into the water, thus condensing and maintaining its composition. Be aware, though, that these refluxors aren't 100% guaranteed to be effective, so it's still advisable to add the D.I. water to the solution from time to time.

Adding water to acid isn't usually advisable, except in this case. If the acid solution rapidly boils, it is required to add a small amount of water (a safe procedure). Otherwise, when you add water to the acid solution which doesn't boil, the resulting outcome is that the water will merely float on top of the acid. The top layer of the acid will be added with more water. As the water gradually takes in the heat, this is where it starts to boil. As long as the correct reaction takes place, the water will thoroughly blend with the acid solution.

The heater in the Silicon Etching System does not have to be controlled like other systems require. You have the option to regulate it though. If you leave the heater switch on, the heater will be on. By choosing not to regulate the heater, it will leave the solution still boiling no matter what the concentration is. While the solution is boiling, the water is added to the concentration. The water will remain sitting on top of the solution.

Some features of the Silicon Wet Etching and Nitrite Etch Bath systems include an etched-foil resistance heater, Teflon-fortified refluxor with safety cover, vapor thermocouple and uniformity heat transfer. These systems are also easy to install, as well as repair, in existing process stations or in new ones.

System specifications include the ideal operating temperature range (30-180ºC), required liquid solutions (water and phosphoric acid), a vapor thermocouple (a temperature-measuring device), PVDF refluxor with Teflon© cooling coils, process temperature control: ± 0.5° C, and chemical usage: H20, H3PO4. It also comes with a one-year warranty.

The Silicon Wet Etching system can be customized depending on the clients' needs. Companies may choose additional features for their system will be able to work with Modutek to ensure that it will meet the company’s needs and specifications. These options include gravity drain system reinforced with Teflon©, process controller and timer, and remote operator timer switches, pneumatically actuated auto cover, and RS232 interface.

Modutek Corporation can provide the system you need for Silicon Wet Etching. Our products can be redesigned for your current Nitride Etch Baths or other equipment you may have. Call us at 866-803-1533 to learn more.

Etching Applications Need Modutek’s Temperature Control Circulator for Reliability

Temperature Control Circulators are important for businesses using Buffered Oxide Etch (BOE) and HF applications. Modutek Corporation manufactures the RCe Series of sub-ambient temperature control circulators. The temperature can be controlled by amounts as low as 0.2°C. This is a result of the interface between our temperature control circulator and the silicon wet etching bath or other etch baths in your facility. The same would be true if you purchased a new etch bath or continue using the existing equipment. The design of the unit is compact (20.5” x 25.0” x 15.5”) and fits easily under your wet processing station or behind it.

The 134A Freon Compressor with our temperature control circulator replaces the R22 Freon compressor that is not compliant. This is an advantage that ensures your unit will meet current code requirements. The compressor size, fluid part options and heater size will enable you to choose the temperature control circulator that will match your system requirements.

Our electrical box, which includes on-board logic controls, also monitors process temperatures, heating and cooling. Not only are temperatures monitored, it also monitors reservoir levels and will let you know if flow levels drop off by sounding an audible alarm. Process temperatures often require constant temperatures or a specific temperature. There is alarm if the temperature fluctuates too much, also.

All Modutek temperature control circulators come with a standard 1500 watt stainless steel heater. If you need a different heater, 2500 and 3500 watt heaters may be purchased to upgrade the circulator if it is needed. The units are upgraded to Deionized (DI) water within the stainless steel fluid path. This is unique to the circulators manufactured by Modutek. Our RCe-01 series uses industry standard city water or reverse osmosis.

The standard temperature control circulator has a ¼ hp compress but can be upgraded to ½ hp, ¾ hp or 1 hp. Since our engineers work closely with your team of engineers, they will be able to design a system that will meet your requirements. If modifications are needed, our team is entirely in-house, which means you work exclusively with us and not an outsourced firm.

CE compliance is important for all Modutek equipment. The temperature control circulator is both CE compliant and environmentally friendly. The external status display allows you to see what is happening in the system. It has its own circuit breaker protection and maintenance on the unit is relatively easy should it be necessary.

The RCe Series temperature control circulator has specific housing requirements. The main power for the RCe025-1500 requires 120 VAC, 50/60HZ, 20A rating. The RCe Series requires 208VAC, 4-wire Circuit rating. In addition, it will need a ½” FNPT outlet/inlet in order for fluids to circulate properly.

If the processes you use on a daily basis require precise temperature controls, turn to Modutek Corporation. We have silicon wet etching process and can replace any chillers in your systems that are not compliant. Our temperature control circulator has been designed to exceed other chiller/heater units available today. Not only is it reliable, it is also safe. When you’re ready to replace the non-compliant chillers at your company, call Modutek Corporation. You may reach us at 866-803-1533 or through email Sales@Modutek.com. We welcome your questions and a chance to provide a quote.

Choose Modutek Quartz Baths for Reliability and Safety

The Quartz Bath systems manufactured by Modutek Corporation are both safe and reliable. Not only this, the Modutek Quartz Bath is also reasonably priced. This will make integration into your current production system cost-effective. We have over 30 years experience designing and manufacturing quality quartz bath systems, as well as developing and improving their designs.

Quartz has inert properties which make it non-reactive with other substances. For this reason, quartz is an excellent medium for use when manufacturing semiconductors. Quartz is also stable at high temperature which is another advantage. On the Mohs scale, it has a hardness level of 7. It lacks cleavage; this makes it safe for demanding processes.

Modutek manufactures a number of Quartz Bath systems. One is the QFa Series. This bath includes quick and even heating of the 4-sided heating element which is recessed. It was designed with serrated overflow barriers that can heat to 360°F. It has a seamless, sloped flange design and includes a switch with dual safety snaps. The design prevents runaway temperatures which can minimize damage potential. It also boasts a longer-than-average vessel life. This makes the QFa Series more reliable increases up-time. Finally, contamination from particulates is reduced which makes laminar flow easier.

The QFa Series Quartz Bath can be used with a variety of chemicals. These include, but are not limited to, H2SO4, H2O2 and SC1. The system can be operated between 30°C and 180°C. Depending upon the controller and processor, the temperature can be moderated +/- 1°C. The system heats up to operating temperature at 2°C per minute. This is based on the fluid being used, what size system and other factors. The system can be used for etching, cleaning and stripping. The fluid circulates through a ¾” male Flaretek inlet/outlet. You may choose these optional items: quartz diffuser plate, process temperature controller, autolid, liquid level sensor and vessel size that can be customized to your specific needs.

Modutek also manufactures the Qa Series Quartz Bath. It is similar to the QFa Series but has a 5-sided heating element. This improves heating time, efficiency and overall even heating. It can be purchased with a magnetic stirrer, process controller, remote timer, dilution aspirator valve system, gravity drain, and quartz bubbler.

To learn more about any of the Quartz Bath systems, or other Modutek Corporation products, call 866-803-1533. We are happy to discuss your specific Quartz Bath needs and how we might customize a system for your company.

Modutek DR Series Quick Dump Rinsers for Wafer Manufacturing

The deionized (DI) water rinse cycle is one of the most critical steps in all of wafer manufacturing. DI water is likely to be the primary substance to which your product is exposed, usually more than any other fluid in the entire process. A properly effective rinsing system is a dramatic contributor to reducing particles and defect densities. We have put much time into making it affordable and simple for you to transition into our quick dump rinser (DR series). You can upgrade or install a new wet process station, and we have a plan that will work for you.

There are two major features designed into our DR series Quick Dump Rinser. These are easy installation, whether you are installing into used or new equipment, and low consumption of DI water, thanks to rinse features.

Modutek equipment offers consistent, superior rinsing. Four factors that contribute to this are DI nozzles that are strategically located to spray efficiently, bottom filling, N2 agitation, and an optional bottom fill that results in vortex agitation within the rinse tank.

The DR Series Quick Dump Rinser’s interior volume has been reduced to a size that is the minimum possible to use with the wafer cassette. This reduced volume and 360º overflow weir, along with the quick dump, remove all contaminants of all sizes quickly from the wafer’s surface and anywhere around it, resulting in no recontamination.

Modutek also offers the C15sa Rinser Controller to be used with the DR Series Quick Dump Rinser. The controller is designed specifically to provide the wafer rinse system with flexibility. The controller allows the user to program several areas, including the dump cycle, the fill cycle, the start cascade, and the spray delay. Resistivity can also be programmed and an access code is incorporated to keep the program safe from tampering.

The optional Modutek Resistivity Monitor RM30a can be used with the DR Series to rinse to resistivity. The RM30a is useful for monitoring resistivity along with temperature inside the Quick Dump Rinser. It will also monitor the wet bench’s incoming water. When the resistivity setting has been reached, the rinse cycle discontinues when the level is full inside the DR Series rinser, resulting in a process specific rinse, and keeping the DI water usage to a minimum.

Since the Quick Dump Rinser is designed by Modutek to be easily added to a wet bench regardless if it is new or used, you can upgrade very easily without adding the new wet bench cost. The savings from less DI water usage and the increase in throughput will, together, help cover the upgrade’s overall cost. More information is available about the Quick Dump Rinser from Modutek and how it can be beneficial to your wafer manufacturing process by contacting us at 866-803-1533 or Sales@Modutek.com.

Modutek Makes Quartz Baths That Are Both Reliable and Safe

Modutek Corporation has successfully created a safe, reliable Quartz Bath system. It is manufactured by Modutek and is reasonably priced, which will allow integration into current production systems in a cost-effective manner. Modutek is known as the quality standard for quartz baths after over 30 years of developing and improving the designs for these baths.

Because of the nearly inert properties of pure quartz, other substances will usually not react with it. This makes quartz an excellent selection to use in semiconductor processes. Besides being non-reactive, its stability even when heated is a great advantage. Its hardness level on the Mohs scale is 7 and it is safe for demanding processes due to its lack of cleavage.

One of the several Quartz Baths available from Modutek is the QFa Series. Some of the benefits of this bath include heating that is fast and even from a 4-sided heating element that is nested and has a serrated overflow barrier and which heats to 360 degrees Fahrenheit, a flange design that is seamless and sloped, and a dual safety snap switch. Its design prevents runaway temperatures, minimizing potential damage. A vessel life that is longer than the average results in better reliability and more up-time. Particulate contamination is reduced along with easier laminar flow.

Some of the chemicals that can be used with the QFa Quartz Bath include H2SO4, SC1, H2O2, and more. It can operate at temperatures between 30ºC - 180ºC. Control of the operating temperature, depending on the process and the controller, can be ±1ºC. The heat-up rate of the operating temperature is 2ºC per minute, depending on which fluid is used, the system’s size, and other factors. Uses include cleaning, etching, and stripping. Its circulating fluid inlet/outlet is a ¾” male Flaretek. Users can choose to add a quartz diffuser plate, autolid, process temperature controller, liquid level sensor, and custom vessel sizes to perfectly fit necessary specifications.

The Qa Series Quartz Bath has similar features to the QFa, with a 5-sided heating element rather than 4-sided, which improves speed, efficiency, and evenness of heating. Options include a magnetic stirrer, remote timer, process controller, gravity drain, aspirator (dilution) valve system, and quartz bubbler.

The size of the Quartz Bath of either series is customizable. Call for more information or a quote for the Modutek Corporation Quartz Bath that will best fit your needs at 866-803-1533.

Wafer Processing Equipment Intended to Meet Your Needs

Those needing Wafer Processing Equipment designed to meet their business needs turn to Modutek Corporation, a leading design and production manufacturing company for more than 30 years. If continuity, experience and expertise are important when choosing reliable Wafer Processing Equipment, you can turn to Modutek with trust.

To achieve the consistent results required for manufacturing integrated circuits on semiconductor wafers, it takes Wafer Processing Equipment that produces the needed reduced geometry sizes. Because technology changes in this field, Modutek Corporation pays attention to these changes and applies them to new semiconductor wafer processing equipment designs. Modutek’s Wafer Processing Equipment will meet your business’ requirements whether you are in the solar, military, industrial, medical or other industries.

• Wet Processing Manual Stations manufactured by Modutek can be configured to handle acid and solvent applications. They meet or exceed safety standards currently in place, cost less than fully or semi-automated systems, and they can be customized to fit your specific needs.
• Semi-Automated Stations are also able to be customized for your business’ needs. With the robotics included in these systems, you can expect uniform processing at a lower price than the fully automated system. When precise developing, etching or cleaning processing is vital, the Semi-Automated Stations by Modutek will do what your company needs. Some benefits of this system include the SolidWorks Flow Simulation and SolidWorks Simulation Professional software which we develop in-house and can modify to fit your needs. Automation control and servo motor automation are controlled through an easy-to-use touch screen.
• The Fully Automated Stations are perfect for silicon wafer processing using a higher degree of automation. Our team of experienced engineers works closely with you to ensure you purchase the right Wafer Processing Equipment needed for your company’s application. Both the equipment and SolidWorks Flow Simulation software can be customized to your specifications. You can turn with confidence to Modutek Corporation to manufacture the Wafer Processing Equipment your company needs because we have over 30 years of continued operation as well as customer support that is first-rate.
• The Rotary Wafer Etching System provides chemical etching, developing, resist etching and stripping of semiconductor substrate in automated batch processing. Its dual-tank wet station is designed to be compact. Once the preset processing is complete, the carrier assembly is transferred to the Quench-Quick Dump-Overflow rinse cycle. With the Rotary Wafer Etching System, you can expect a quick transfer from process to rinse as well as adjustable continuous rotation up to 80 rpm. It is freestanding, compact and handles wafers of various sizes.
• Silicon Wafer Cleaning Equipment is now a major factor in semiconductor wafer technology partially due to the increase in wafer reclamation marketing last year. Modutek has provided over 30 years of semiconductor manufacturing as well as wafer cleaning equipment. We also specialize in microelectronic cleaning.

Contact us if you would like to discuss your company’s Wafer Process Equipment needs. We are happy to provide a quote at no-cost for any of our equipment. You may reach us by calling 866-803-1533 or email us at Sales@Modutek.com if you would like more information.

Acid Neutralization Systems Designed and Built by Modutek

Acid Neutralization Systems are extremely important for companies that utilize chemicals during manufacturing. Before discharging chemicals, they must be neutralized to a maximum 10 pH, but it would be better for the pH to be reduced to 6 or lower. Modutek Corporation’s Acid Neutralization System is explained further.

In the 1990s Modutek began designing and manufacturing semiconductor equipment including Acid Neutralization Systems. These systems are inexpensive to operate, self-contained and are easy to install at your facility. Our systems are designed in-house so they can be customized to fit your available space. More than being physically customizable, the throughput capacity of the Acid Neutralization System can also be changed to meet your production specifications.

The Acid Neutralization Systems made by Modutek are normally used by these industries, as well as others: Pharmaceutical or Biotechnology, Photovoltaic Solar Cell Manufacturers, Aerospace, Chemical Processors and Manufacturers, Metal Plating and Finishing, Semiconductors and those building medical devices. When you’re looking for an Acid Neutralization System you can trust, the Modutek Corporation systems have benefits you will find appealing:

• They are self-contained
• They are compact and can be designed as two-stage or three-stage systems
• They can be designed in size ranging from 5 to 500 gpm
• Installation can be indoors or outdoors depending upon your needs
• They treat acidic and alkaline waste streams within a fully automatic operation
• They automatically discharge when desired limits are reached
• They provide a final monitor chamber to sample and record pH levels prior to discharge
• They allow for continuous monitoring with the Stripchart recorders that record discharge pH
• Each Acid Neutralization System includes an alarm at the final chamber for high and low pH readings as well as PLC with Touch Screen

Modutek’s Acid Neutralization Systems also has these options:

• Surge Pumps
• Integrated Lift Stations
• Data Logging
• BMS Systems
• Paperless Chart Recorders
• Process Equipment Integration
• Remote Alarm Panels

As an added benefit, it is easy to incorporate the Modutek Acid Neutralization System with other equipment currently in use for your manufacturing process. There are numerous sizes available and each can be customized to your exact specifications. You can learn more about the Acid Neutralization System by calling us at 866-803-1533 or sending an email to Sales@Modutek.com.