Designing Semiconductor Manufacturing Equipment for Ergonomics and Safety

Safety is something that semiconductor equipment suppliers need to incorporate into all aspects of their equipment since the manufacturing process involves the routine use of chemical processing.

Safety guidelines, such as the SEMI S2, published by the global industry of microelectronics manufacturers, ensures suppliers implement safe operating protocols. Better ergonomic design of semiconductor manufacturing equipment as described in SEMI S8, helps promote a safer operating environment to reduce operator fatigue and strain.

Old installations may not meet the current safety standards or satisfy the owner's safety goals. It's better to purchase brand-new equipment that incorporates the use of upgraded safety features to ensure that the equipment and work environment will be as safe as possible.

Modutek follows the SEMI safety and ergonomics guidelines by designing equipment that's easy to use and reduces strain and fatigue. These include the wafer holding tray on Modutek wet benches which uses a robot arm whose function is to hold and move the tray to the front of the station for optimal loading with less effort. The wafer holding tray is just one of the examples of how Modutek implements ergonomic design to help operators do their work safely and with less effort. This results in fewer accidents, increased productivity and a better work environment.

Manufacturing facilities and research centers need to prioritize safety when purchasing semiconductor manufacturing equipment. While manufacturing facilities and research labs use clean rooms fitted with sprinkler systems, fire alarms and other kinds of fire protection, they can reduce the likelihood of fire accidents by minimizing the use of flammable equipment. Many wet bench processes use corrosive chemicals in tanks and pipes made of plastics or other synthetic materials that can be flammable. Modutek can support efforts of reducing the use of flammable materials by supplying equipment that complies with the FM 4910 flammability specifications to further reduce the likelihood of fire.

Find out more about how Modutek’s ergonomic designs can benefit your facility by reading the complete article “Designing Semiconductor Manufacturing Equipment for Ergonomics and Safety.” Call Modutek if you have questions or would like to discuss your specific semiconductor equipment requirements.

Tips on Selecting Chemical Delivery Systems for Your Application

Chemical delivery systems handle the chemical distribution required to maintain a variety of industrial processes. Corrosive or hazardous chemicals are securely stored and delivered to the process in specific concentrations or mixtures.

Chemical delivery systems integrated in processes like semiconductor manufacturing using wet bench equipment, allow safe operation with accurate amounts and quick change from one chemical to another. Chemical delivery system design needs to utilize correct storage methods and provide customization to meet the requirements of specific applications.

The list below includes specific factors that should be considered in selecting chemical delivery systems for your application:

·         How much of a particular chemical is used in the process?

·         How does the system calculate the required chemicals and how is the software for calculations supported?

·         What are the control options and do they integrate easily and well with wet bench controls?

·         What safety, error and leak detection features are available?

·         Is the system flexible enough to adapt to specific process requirements and can the supplier undertake such customization?

Apart from these questions, the supplier should have an excellent reputation and a wealth of experience in designing and handling chemical delivery systems.

One such company, Modutek Corporation, has vast experience designing and constructing chemical delivery systems that meet customers' specific requirements. It has a wide range of storage options from large volume storage to drums to carboys. These chemical delivery systems integrate seamlessly with the company's own wet bench stations and can typically work with wet benches from other companies. Modutek's chemical delivery systems are also safe, reliable, provide excellent performance and quick changeovers, and are also customizable to a customer’s specific requirements. Modutek has the internal expertise to evaluate customer requirements and will make appropriate recommendations that best support the application. Contact Modutek by email Modutek@modutek.com to learn more or read the complete article titled “Tips on Selecting Chemical Delivery Systems for Your Application.”

Modutek's Wet Bench Design Process

Modutek's services place a lot of emphasis in designing its line of wet bench equipment to meet the needs of their customer’s requirements.

While aiming to meet and exceed customer's expectations, Modutek also implements a wet bench design process as well. The resulting product should have a high throughput with a long service life and a low level of downtime.

The company has direct contact with its customers who identify the specific requirements and features they need for their equipment. Then Modutek’s personnel gather the details of the customers' application as well as develop its own criteria in order to arrive at a successful wet bench design. Modutek uses only the most advanced design tools which ensure the accuracy and precision of the models. Modutek coordinates with the customer to make sure the design, engineering, manufacturing, and integration as well as the final delivery and setup are successful. This insures that each customer will have high-quality and reliable wet bench equipment that meets (or exceeds) the requirements for their application.

Learn more about this design process by reading the article “Modutek’s Wet Bench Design Process.”

Modutek DR Series Quick Dump Rinsers for Wafer Manufacturing

The deionized (DI) water rinse cycle is one of the most critical steps in all of wafer manufacturing. DI water is likely to be the primary substance to which your product is exposed, usually more than any other fluid in the entire process. A properly effective rinsing system is a dramatic contributor to reducing particles and defect densities. We have put much time into making it affordable and simple for you to transition into our quick dump rinser (DR series). You can upgrade or install a new wet process station, and we have a plan that will work for you.

There are two major features designed into our DR series Quick Dump Rinser. These are easy installation, whether you are installing into used or new equipment, and low consumption of DI water, thanks to rinse features.

Modutek equipment offers consistent, superior rinsing. Four factors that contribute to this are DI nozzles that are strategically located to spray efficiently, bottom filling, N2 agitation, and an optional bottom fill that results in vortex agitation within the rinse tank.

The DR Series Quick Dump Rinser’s interior volume has been reduced to a size that is the minimum possible to use with the wafer cassette. This reduced volume and 360º overflow weir, along with the quick dump, remove all contaminants of all sizes quickly from the wafer’s surface and anywhere around it, resulting in no recontamination.

Modutek also offers the C15sa Rinser Controller to be used with the DR Series Quick Dump Rinser. The controller is designed specifically to provide the wafer rinse system with flexibility. The controller allows the user to program several areas, including the dump cycle, the fill cycle, the start cascade, and the spray delay. Resistivity can also be programmed and an access code is incorporated to keep the program safe from tampering.

The optional Modutek Resistivity Monitor RM30a can be used with the DR Series to rinse to resistivity. The RM30a is useful for monitoring resistivity along with temperature inside the Quick Dump Rinser. It will also monitor the wet bench’s incoming water. When the resistivity setting has been reached, the rinse cycle discontinues when the level is full inside the DR Series rinser, resulting in a process specific rinse, and keeping the DI water usage to a minimum.

Since the Quick Dump Rinser is designed by Modutek to be easily added to a wet bench regardless if it is new or used, you can upgrade very easily without adding the new wet bench cost. The savings from less DI water usage and the increase in throughput will, together, help cover the upgrade’s overall cost. More information is available about the Quick Dump Rinser from Modutek and how it can be beneficial to your wafer manufacturing process by contacting us at 866-803-1533 or Sales@Modutek.com.