Chemical Delivery Systems That Meet Your High Tech Manufacturing Requirements

Modutek designs and develops custom chemical delivery systems to meet the specific requirements of manufacturing customers. These customers consist of industrial and research facilities who use chemicals for their processes and need a reliable and safe chemical system to store chemicals for ready use.

Typical applications of these systems include wet processing stations, wet benches, fume hoods, plating stations, precision cleaning stations, and acid exhaust hoods.

These custom chemical delivery systems feature all-Teflon fluid paths with double containment cabinet construction and leak detection. All chemical delivery is automated with a touch screen which provides important data including levels and alarms. Modutek's proprietary Solid Works Simulation Professional and SolidWorks Flow Simulation software allows customers to mix chemicals and perform delivery calculations to their specifications.

Modutek's chemical delivery systems are built to the highest standards and according to the customer's preferences. Customers can also request to be present at final testing at Modutek’s facility to ensure that the equipment meets all their specifications and they are fully satisfied with the results.

The advanced technology and high quality components used in Modutek’s chemical delivery systems reduce customer costs, reduce hazardous waste, and improve productivity and higher throughput. They are also safe and reliable, which helps customers achieve performance and productivity goals. Modutek’s chemical delivery systems can also be designed specifically to meet customer specifications.

For a free consultation or quote on selecting a chemical delivery system call Modutek at 866-803-1533 or email Modutek@modutek.com. You can read more details about Modutek’s chemical delivery systems by reading the blog article on the main site entitled “Chemical Delivery systems That Meet Your High Tech Manufacturing Requirements.”

Silicon Wafer Etching Processes for Wet Processing Applications

Manufacturing semiconductor components like processors and integrated circuits relies on silicon wafer etching of various processes including KOH etching to generate the required structures and connections.

Modutek's wet benches and other equipment can be used for a wide range of wet processing applications, which include:

KOH Etching – This involves the use of potassium hydroxide (KOH) in etching silicon wafers. This process is used to create microscopic structures in the silicon. It is important to note that KOH etching is a repeatable process that is inexpensive and etches quickly. Modutek's PFA Teflon tanks of their TFa or TT series are suitable for this etching application.

Silicon Nitride Etch – This is deposited on the silicon wafer in a thin film form and is etched with a hot phosphoric acid. It is used as a masking material in the fabrication of integrated circuits. Modutek's silicon nitride etch baths are suitable and safe for supporting this etching process.

Piranha Etch – This is used to clean silicon wafers during the semiconductor manufacturing process. The cleaning agent in this application consists of a mixture of sulfuric acid and hydrogen peroxide. Modutek can evaluate the customer's specific cleaning requirements and propose suitable solutions from its vast product line of wet processing equipment.

Metal Etch - Etching metals such as aluminum, gold and copper can be challenging process. Effective etching depends on selecting the right chemicals to use with the process. Modutek's vacuum metal etcher was developed and designed for precise wet etching of aluminum layers.

Gallium Arsenide (GaAs) Etch – Modutek's wet process solutions can handle the etching of Gallium Arsenide, which is used in the manufacture of integrated circuits and other electric and electronic devices. The solutions used consist of hydrogen peroxide, usually combined with sulfuric, hydrochloric, and phosphoric acids.

Modutek’s Wet Bench Solutions deliver reliable, repeatable results that are safe and accurate. For a free quote or assistance in selecting the right equipment for your silicon wafer etching process, contact Call Modutek at 866-803-1533 or send an email to Modutek@modutek.com. You can learn more about Modutek’s silicon wafer etching processes by reading “Silicon Wafer Etching Processes for Wet Processing Applications.”