Improved Process Control with Modutek's Silicon Nitride Wet Etching Bath

Modutek Corporation, known for manufacturing silicon wet etching equipment (including rotary wafer etching system and quartz baths) offers the Nb silicon nitride etch baths, upgrading their Na series.

Silicon nitride etching is done in a solution that contains 85% phosphoric acid and 15% deionized (DI) water. This acidic compound is set to a boiling point of 160 degrees C, leading to steaming and eventual water loss, which in turn results in increased boiling temperature. The Nb series features improved controls including:

•         A condenser which takes back some of the steam to the bath
•         A temperature controller that detects the rise of the boiling solution
•         A thermocouple that activates an interlock if there's no steam
•         Additional safety interlocks
•         An etched foil resistance heater

The Nb series' design allows for accurate nitride etching control, good etching consistency, boiling control, easy installation, and a high degree of safety. If you would like to learn more about any of Modutek’s silicon wet etching equipment, contact us at 866-803-1533 or by sending an email to sales@modutek.com to receive a free quote.

How the IPA Vapor Dryer Improves Wafer Processing Time

The IPA Vapor Dryer from Modutek meets the demands of facilities and process engineers who are continually looking for ways to improve silicon wafer processing time. This system includes the SolidWorks Flow Simulation and Simulation Professional software to ensure improved operations and drying time with one or two 150-450mm cassettes or glass substrates.

Modutek’s IPA Vapor Dryer design has both rinsing and drying capabilities. This Marangoni drying system incorporates a single chamber to facilitate the final stages of the cleaning process. The system provides high throughput along with other advantages including:

·         elimination of watermarks on substrates and hydrophilic/hydrophobic films with no feature damage

·         15-minute batch drying for most applications

·         secure system interface bottle change that allows for fast, deck-level applications

The IPA Vapor Dryer also has a variety of additional safety features and optional features to provide optimal wafer processing with wet processing equipment. If you have questions, call 866-803-1533 or send an email to sales@modutek.com for answers.