Improved Process Control with Modutek's Silicon Nitride Wet Etching Bath

Modutek Corporation, known for manufacturing silicon wet etching equipment (including rotary wafer etching system and quartz baths) offers the Nb silicon nitride etch baths, upgrading their Na series.

Silicon nitride etching is done in a solution that contains 85% phosphoric acid and 15% deionized (DI) water. This acidic compound is set to a boiling point of 160 degrees C, leading to steaming and eventual water loss, which in turn results in increased boiling temperature. The Nb series features improved controls including:

•         A condenser which takes back some of the steam to the bath
•         A temperature controller that detects the rise of the boiling solution
•         A thermocouple that activates an interlock if there's no steam
•         Additional safety interlocks
•         An etched foil resistance heater

The Nb series' design allows for accurate nitride etching control, good etching consistency, boiling control, easy installation, and a high degree of safety. If you would like to learn more about any of Modutek’s silicon wet etching equipment, contact us at 866-803-1533 or by sending an email to sales@modutek.com to receive a free quote.