The IPA Vapor Dryer
from Modutek meets the demands of facilities and process engineers who are
continually looking for ways to improve silicon wafer processing time. This
system includes the SolidWorks Flow Simulation and Simulation Professional
software to ensure improved operations and drying time with one or two
150-450mm cassettes or glass substrates.
Modutek’s IPA Vapor Dryer
design has both
rinsing and drying capabilities. This Marangoni drying system incorporates a
single chamber to facilitate the final stages of the cleaning process. The
system provides high throughput along with other advantages including:
·
elimination of watermarks on substrates
and hydrophilic/hydrophobic films with no feature damage
·
15-minute batch drying for most
applications
·
secure system interface bottle change
that allows for fast, deck-level applications
The IPA
Vapor Dryer also has a variety of additional safety features and optional
features to provide optimal wafer processing
with wet processing equipment. If you have questions, call 866-803-1533 or
send an email to sales@modutek.com for answers.
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