Introducing Modutek’s Water Ring Seal (WRS) Option in Quartz Bath Equipment

In its thirty-plus years of experience in providing semiconductor manufacturing equipment solutions, Modutek Corporation introduces another product, the Water Ring Seal (WRS).

Modutek invented the Water Ring Seal in a bid to prolong the heater life of any high-temperature quartz bath. When you choose the WRS feature, it will make any high-temperature quartz bath have a standard 30-month warranty.

One of the advantages of adding the WRS feature to your quartz bath is the 360-degree water ring seal under the quartz bath's top flange. The water ring seal provides sufficient blockage against chemical fumes from getting into the quartz bath's heater chamber. Whether you do etching, stripping and cleaning, you will have no worries for your quartz bath as it's protected by the water ring seal.

Other benefits of the water ring seal (WRS) design for your high-temperature quartz bath, aside from the 30-month warranty:

• With the water ring seal giving such added extension to your quartz bath's heater life, it should reduce inventory control
• It will reduce the need for process downtimes
• It will improve process yields
• It will reduce the likelihood of having to ship your current quartz bath off for repairs

Modutek's Qa and QFa Series high-temperature quartz baths are ideal for the water ring seal option. The company's standard quartz baths are bonded with a heating element called Inconel (a trademark name for a nickel-chromium based super alloy) that will provide fast, efficient, balanced and constant heating. Modutek's QFa series is the more recently upgraded version of the Qa series quartz bath with an extra circulation feature.

Modutek's quartz baths also come with a seamless, sloped run-off flange which contributes to its longer vessel life. They are designed to decrease the likelihood of particulate contamination while they facilitate laminar flow (making it less turbulent). The quartz baths are also secure as they come with a dual safety snap switch.

Modutek is proud of its Qa and QFa series quartz baths that have been produced during the company's more than thirty years of designing and engineering evolutionary, innovative, high-quality quartz bath designs. As with all the other Modutek products, their quartz baths have one-year warranties. As for the water ring seal option for quartz baths, it has a 30-year warranty.

Modutek provides excellent support for the Quartz Baths and every product they sell. They will respond to your call within 24 hours (week days only). You may contact them at 1-866-803-1533 or by sending an email to Sales@Modutek.com.

Advanced Wet Benches and Wet Processing Equipment from Modutek

One of the renowned products of Modutek Corporation is their complete line of wet benches and wet process equipment. The company's wet benches are customizable to meet its clientele's requirements and specifications.

Wet benches are commonly seen in a semiconductor fabrication plant. These wet benches are used to clean off debris and/or etch away any non-essential films from semiconductor wafers. Wet benches are also used in priming the wafer's surface for the next step in the general process. There are other types of wet benches that clean other semiconductor components such as quartz.

Wet benches are classified into various types: Manual, Semi-Automated, Fully Automated, Linear Robot, Rotary Etch, Dry to Dry and Stainless Steel. The company offers high-quality cleanroom wet benches and other related semiconductor and batch immersion process tools and accessories, with prices that are within the client's budget.

Modutek's wet benches are also highly customizable, with a wide range of various features for the clients to choose from according to their own fab's specific requirements. These optional features include megasonic and ultrasonic tanks (sonic energy develops cavitations that help increase cleaning efficiency), robots, exhaust options and other features and materials that are left best to the requirements of the clients. The company's wet benches and wet processing systems are used in many major semiconductor laboratories, as well as medical and solar facilities here in the US and in other parts of the world.

Wet benches and wet processing equipment are designed for many specific purposes. Typically, they often incorporate cleaning aside from etching and stripping. Other wet benches may also include other related applications such as solar wafer processing, university research labs, precision parts cleaning, etc. Most wet benches like those from Modutek can handle acid or base chemistries.

In etching, the process applications include silicon, oxide, potassium hydroxide (KOH) and tetramethylammonium hydroxide (TMAH). In stripping, there are two kinds: solvent resist strip and acid resist strip. In cleaning, applications include pre-photo, photomask clean, pre-diffusion, pre-Epi, wafer reclaim, pre-panel build clean and post-saw clean. All of these procedures efficiently performed by Modutek's wet benches and wet processing equipment.

By using Modutek's state-of-the-art wet benches and wet processing equipment, clients will see several benefits:

• Flexible and upgradable platforms for the client’s needs
• User-friendly and well- controlled
• Low on maintenance
• Customizable designs to suit to your requirements and specifications
• Modutek knows up-time and reliability is everything to their customers. The components and spare parts are easily obtained and replaceable
• With the equipment's overall functional design, construction materials, safety interlocks, and Modutek's many years of industry experience and use of its own software, you can be sure of the wet benches and processing equipment's safety and reliability.

Modutek is also ready to provide assistance and support in regards to the equipment parts, installation, and operation of their Wet Benches and Wet Process Equipment, as well as the other products sold by the company. Their support section will respond to your call within 24 hours (week days only). You may reach Modutek by calling 1-866-803-1533 or sending an email from our website http://www.modutek.com.

Modutek Corporation Has Differences You Can Depend On

Get to know Modutek Corporation, one of the country's leading semiconductor manufacturing equipment solutions and wet processing equipment companies.

When it comes to providing wet processing equipment, Modutek is one name that has been proven and is trusted. Modutek Corporation has been around providing semiconductor manufacturing equipment solutions for over three decades and can be found in San Jose, California. The company has grown and evolved through the years as well as through their improvements in their products and services. They have also had other corporate developments such as company acquisitions.

Modutek never fails to have the ability to meet all of the customers' wet processing equipment needs with one manufacturer. Modutek is a one-stop shop company when it comes to providing our clients’ needs because all the designing and manufacturing the equipment is handled at one location. This is one characteristic that makes Modutek stand out from all the competition.

With Modutek's over 30 years of experience, the company caters to every client’s quotation requests and orders. Companies do not have to worry about catalog ordering. Instead, Modutek manufactures products that are customized, matched with its best service, commitment, high quality products, reliability, accessible support and equipment start-up. This helps Modutek stand out among its competition.

Modutek has provided high-quality wet processing equipment such as wet benches, along with an excellent line of semiconductor manufacturing equipment to over 500 companies all over the United States.

Modutek's state-of-the-art product line includes wet benches (manual, semi-automated and fully automated) and their upgrade, free-standing IPA Vapor Dryer, Megasonic cleaning systems, a comprehensive line of process components and rinsers, control systems for all applications. Our product line also includes rotary etchers, wet bench upgrade, air scrubbers, acid/base neutralization systems, chemical delivery systems and chemical mixing equipment, and chemical collection systems. Modutek also offers in-house service and support as well as accepts contract manufacturing.

Ensuring the quality of Modutek's products and accessories, the company offers one year warranties on everything they manufacture. Support is accessible 24/7 to answer ensure a response to all clients' inquiries and problems (call 1-866-803-1533). The company's fully automated equipment has remote access capability, enabling its house engineers to do the software update and troubleshooting anytime through Internet access. Modutek offers overall support that would depend on the clients' particular specifications and contract.

All of Modutek's equipment has been designed in-house. Since the company's products are customizable, its experienced team of engineers will first examine the customer's requests and specifications. Modutek will start manufacturing equipment by basing it on one of their established standard platforms, and then it will move on to create a specific customizable system. Modutek has created, designed and engineered hundreds of systems. These systems have involved and intricate processes for etching, chemical mixing, and other processes. The company's support offers various kinds of assistance through communication support, manual operation, and full-data logging in real time, as well as others that concern system issues.

Modutek has established its reputation as a company that works directly with its clients, aside from its top-grade product line. Visit their website at http://www.Modutek.com or contact them through telephone by calling 1-866-803-1533. If contacted during the work week, they will reply within 24 hours.

Modutek Makes Ordering Easy for Chemical Fume Hoods

Chemical Fume Hoods are ventilation equipment that prevents extensive exposure to hazardous or toxic chemical fumes. They also limit the exposure of harmful dust, gas or vapors. Semiconductor manufacturing solutions firms, such as Modutek Corporation, manufacture fume hoods that come in a wide range of designs and features.

Fume hoods may be in the form of a table top exhaust hood or a freestanding hood that is equipped with a HEPA (High-efficiency particular air) filter. But there's no limit to design choices because Modutek designs and manufactures custom-made fume hoods, depending on the clients' particular needs, lab equipment requirements and specifications. These fume hoods are also ideal for wet processing.

Modutek manufactures and designs excellent fume hoods. The materials used are uncompromisingly of high-grade quality: stainless steel which can handle any solvent application you may have and white polypropylene which is suitable to withstand base and acid processes.

Modutek's fume hoods come with an electrical outlet at the deck level. Usually fume hood units can be manufactured using a standard outlet, a ground-fault circuit interrupter (GFI), or an electrical outlet that is explosion proof. Most states will require the use of GFI outlets because they offer the best protection from electric shock. Chemical Fume Hoods can also be fitted with the outlets needed depending on the clients' specific manufacturing requirements.

Fume hoods can also be manufactured with a built-in utility sink and a faucet (we offer a gooseneck faucet as an option), overhead fan filter units (FFU), carboy chemical containment system (that traps waste solvents during wet processing), counterbalanced safety shields, LED lighting (that is also fitted on-deck), DI hand spray, lift stations equipped into the benches, and many more. As Modutek offers customizing products, fume hoods can be designed according to its clients' current product specifications and requirements. The size and length of a chemical fume can be modified to meet the company’s processing needs. The company's fume hoods and exhaust stations are also designed to control the temperature of chemical baths.

If your company needs chemical fume hoods with specific requirements such as dedicated drains or carboys with DOT containment, call us at 866-803-1533. If your requirements include lift stations that are designed into the benches, HEPA fan filters, or D.I. water hand spray, Modutek would like the opportunity to build the chemical fume hood your company needs.

A Chemical Delivery System That Is State-of-the-Art

A Chemical Delivery System, as well as Chemical Mixing Equipment, is designed to minimize waste and labor costs in delivering and mixing chemicals. Certain companies like Modutek Corporation unveil delivery and chemical mixing systems that are compatible with a line of wet benches (lab benches and similar equipment that are used for liquid solution tests.) These wet benches include manual, semi-automated, fully automated, and stainless steel.

These state-of-the-art delivery systems are designed to lessen the overall operational costs in handling and transporting chemical liquids. Accurate mixing systems are efficient in avoiding erroneous manual pouring, thus reducing excessive chemical wastage. These systems are ideal inside a cleanroom environment.

Many companies that engage in manufacturing wet process components in the semiconductor industry use handling equipment that comes in different types. The reliable equipment can be used in handling, delivery, distribution, recovery and transport of 100% pure and clean chemicals. These chemicals are used with new or currently-used wet benches and wet processing systems.

Many of these wet processing systems are customizable and built for a client's specific requirements for chemical delivery and transportation as well as mixing and recovery. These systems, especially made by Modutek Corporation, are used for a variety of industrial processes and applications including MEMs (microelectromechanical systems) and semiconductor processes. System controls and software are designed and engineered to be completely efficient, reliable and user-friendly. Other tools and accessories are also available such as totes, drums, bottles, and carboys.

Aside from precise mixing as well as suitability for use in various wet benches there are other beneficial features of using a chemical delivery system. This system also allows the control of handling and delivery of chemicals in large volumes, detects leaks, has data logging and Teflon plumbing, calculates delivery accurately through SolidWorks Simulation Professional and SolidWorks Flow Simulation, and has multiple configurations in order to meet your requirements.

Some chemical delivery systems are also manufactured and engineered to be compatible with existing wet processing benches in other brands. The Modutek Chemical Delivery System is also ideal for use in tech benches, fume hoods, precision cleaning stations, plating stations, and acid exhaust hood.

A 55-gallon self-contained chemical drum is also available in every chemical delivery system and chemical mixing equipment. This drum is designed for delivery and recapture of the chemical contents. Each Chemical Delivery System and Chemical Mixing Equipment is also equipped with a dedicated controller, five-gallon reserve tank, expandable drum or tote, and a five-gallon carboy. These unbeatable features make the delivery, handling, transporting, recapturing and mixing of chemicals precise, flexible, and controllable.

Contact Moduek by sending an email to Sales@Modutek.com or calling us at 866-803-1533 if you would like to learn more or receive a quote for your specific requirements.

Modutek’s Nitrite Etch Bath's Use in Silicon Wet Etching

Modutek Corporation has been providing semiconductor manufacturing equipment solutions for more than 30 years, creating and designing Silicon Wet Etching components and similar wet processing equipment and services. Modutek presents the "Nb" series which is part of their Silicon Nitrite Etch Bath products, a remarkable improvement to the previous "Na" series.

So what does Modutek's Silicon Nitride Etch Bath line of products do and what advantage does it give? They have been created, designed and engineered to give superlative process control.

The "Nb" series of Modutek's Silicon Nitride Etch Bath's distinct feature is its two-tiered diagnostic system. The advantages of the Nb series Silicon Nitride Etch Bath system are as follows:

• Its two-tiered diagnostic system, it lets the user control the temperature
• It controls the acid-to-water ratio through supplemented D.I. (de-ionized) water through its remote DI water metering system
• It retains consistency and uniformity in Silicon Nitride Wet Etching
• It allows control in boiling chemicals to avoid what is called "bumping"

Wet etching is a technique that removes certain materials through soaking the sample into an etch bath which has the liquid solution. The etchant is a kind of acid or corrosive chemical solution used for this purpose.

In this case, etches for silicon nitrides are a combination of 85% phosphoric acid, (H3PO4) and 15% D.I. water. The water boils typically at 160°C. Since the water boils, it will evaporate and carry the solution away as steam. To abate the steaming, the Nb series silicon nitride etch bath contains a refluxor will help carry the steam back into the water, thus condensing and maintaining its composition. Be aware, though, that these refluxors aren't 100% guaranteed to be effective, so it's still advisable to add the D.I. water to the solution from time to time.

Adding water to acid isn't usually advisable, except in this case. If the acid solution rapidly boils, it is required to add a small amount of water (a safe procedure). Otherwise, when you add water to the acid solution which doesn't boil, the resulting outcome is that the water will merely float on top of the acid. The top layer of the acid will be added with more water. As the water gradually takes in the heat, this is where it starts to boil. As long as the correct reaction takes place, the water will thoroughly blend with the acid solution.

The heater in the Silicon Etching System does not have to be controlled like other systems require. You have the option to regulate it though. If you leave the heater switch on, the heater will be on. By choosing not to regulate the heater, it will leave the solution still boiling no matter what the concentration is. While the solution is boiling, the water is added to the concentration. The water will remain sitting on top of the solution.

Some features of the Silicon Wet Etching and Nitrite Etch Bath systems include an etched-foil resistance heater, Teflon-fortified refluxor with safety cover, vapor thermocouple and uniformity heat transfer. These systems are also easy to install, as well as repair, in existing process stations or in new ones.

System specifications include the ideal operating temperature range (30-180ºC), required liquid solutions (water and phosphoric acid), a vapor thermocouple (a temperature-measuring device), PVDF refluxor with Teflon© cooling coils, process temperature control: ± 0.5° C, and chemical usage: H20, H3PO4. It also comes with a one-year warranty.

The Silicon Wet Etching system can be customized depending on the clients' needs. Companies may choose additional features for their system will be able to work with Modutek to ensure that it will meet the company’s needs and specifications. These options include gravity drain system reinforced with Teflon©, process controller and timer, and remote operator timer switches, pneumatically actuated auto cover, and RS232 interface.

Modutek Corporation can provide the system you need for Silicon Wet Etching. Our products can be redesigned for your current Nitride Etch Baths or other equipment you may have. Call us at 866-803-1533 to learn more.