Quartz Tube Cleaning Stations: What They Do and the Benefits They Provide

Quartz tube cleaning stations have to be customized according to the requirements of the processes it is used with. Quartz tubes are used in the processing of semiconductor wafers at extreme temperatures in a diffusion furnace. Corrosive chemicals are used during the cleaning process.

Modutek's quartz tube cleaning stations cleans quartz tubes by rolling them during etching which helps minimize chemical usage. Features also include customization options and drying using nitrogen. Standard quartz tube cleaning stations are built with white polypropylene and are available in manual and automated roller systems. All stations also include an acid and rinse cycles.

Optional automation features an automated tube roller system, automated program recipes, drying and bottle washing. When automatic operation is selected, no further action from the operator is needed. For more details on quartz tube cleaning stations, read the main blog article “Quartz Tube Cleaning Stations: What They Do and the Benefits They Provide.”

Modutek at Semicon Conference in China

Modutek Corporation, provider of leading-edge wet benches and wet process equipment, will have a factory representative at the Semicon Conference in Shanghai, China on March 15 to 17, 2016. Modutek will join their China Rep Laserwort in Hall N3 at booth 3401. Those who are interested in Modutek's wet benches and wet process equipment can stop by the booth to learn more about the company's Automated, Semi-Automated and Manual Wet Bench Process Stations, which feature several applications and benefits like KOH etching, quartz cleaning, ozone etching and more.

Modutek also provides IPA vapor drying and Megasonic cleaning equipment for your manufacturing applications. Aside from that, eco-friendly acid neutralization systems and air scrubbers are also all available with all their equipment.

For more information about the Semicon Conference in China, refer to this website at www.semiconchina.org. You can also read more at “Modutek at Semicon Conference in China.”

Wet Bench Ergonomics and Safety

Following the established safety guidelines provided in the Semiconductor Equipment and Materials International (SEMI) S8-0712, Modutek Corporation implements ergonomic engineering principles in their wet benches and other equipment. This implementation will help minimize operator strain and effort as well as prevent accidents.

Modutek's wet benches and other equipment feature ergonomic and safety features. Their equipment includes a swing arm interface mount that allows operators to position the monitor controls within easy reach while running the process or handling tools. The equipment also has easy to load wafer holding devices -- the robotic arms that move the wafer transporting trays to the front of the station to an optimal location for easier loading/unloading.

Modutek can also develop custom ergonomic solutions on either new equipment or retrofits existing installations. For more details, read the complete blog article on Modutek’s site: Wet Bench Ergonomics and Safety. Contact Modutek at 866-803-1533 or modutek@modutek.com to discuss upgrading your existing equipment or help selecting new equipment.