Evolution of Semiconductor Manufacturing and Wafer Fabrication Equipment

Over the past two decades, semiconductor manufacturing equipment like wafer processing systems or wet bench stations have changed considerably. They are more efficient in improving repeatability and increasing throughput while they process larger wafers that contain etching structures with smaller geometries and component parts that are more detailed.

Automation of wafer fabrication equipment to operate these processes is more complex and environmental factors have now become crucial. Modutek Corporation has played a vital role in this evolution by continuing to be at the leading edge of technical development and innovation.

Modutek's semiconductor manufacturing and wafer fabrication equipment has continued to provide continuous improvements and innovations. Modutek’s equipment has enhanced the process that leads to increased productivity. Its development of automation systems has also led to fewer errors while allowing semiconductor manufacturing systems to achieve better repeatability.

For more details read the complete blog article on Modutek’s site: The Evolution of Semiconductor Manufacturing and Wafer Fabrication Equipment. If you need high quality and reliable wet benches or wafer fabrication equipment, contact Modutek at 866-803-1533 or send an email to Sales@Modutek.com to discuss your specific needs.

Benefits of Using Modutek Acid Neutralization Systems

Modutek’s Acid Neutralization systems help regulate the pH level of a process stream in self-contained systems, whether it is continuous or in batches. These particular systems help counterbalance the pH value of a particular batch and only permit an action of discharge when the fixed criteria has reached.

These systems are available in many sizes, configurations, and designs and are built to suit the specific requirements of clients. While they do their job well in regulating the pH level of acid, these systems are also built with an emphasis on safety and dependability. Whether these batches are acid or alkaline, Modutek's Acid Neutralization Systems can fully function in automatic mode. With its range of neutralization options, it offers flexibility in application. Low-cost and affordable, as well as easy to install, it has comprehensive monitoring and alarm features which allow the operator to ensure the system is working as intended.

If you have questions about your specific requirements or want a quote for a Modutek Acid Neutralization system, send an email to sales@modutek.com or call at 866-803-1533.

Discovering the Modutek Rotary Wafer Etching Equipment

If you are looking for the most efficient, most reliable, and safest rotary wafer etching machine, you will discover the benefits of the rotary wafer etching equipment from Modutek. The company's Model SPS-rotary wafer etching equipment is a machine that is powerful and will rotate steadily for up to 80 revolutions per minute (rpm).

Presently, the Model SPS-rotary wafer etching equipment has been rated as one of most efficient, most dependable and safest rotary wafer etching machines on the market today. In terms of usability and control, this machine definitely cuts above the rest.

The system is an economical, automated, and ergonomically planned machine for batch processing. This rotary wafer etching equipment is specially manufactured the following processes: wafer reclaim, precise chemical etching, resist etching or cleaning substrates, and stripping developing.

Why this wafer etching system is so in-demand? Here are the things you will want to know about the system:

• It has a dual-tank wet station.
• The system supports wafer cleaning or rinsing. It will also handle chemical etching with transfers happening ergonomically between tanks.
• The system allows for easy operating. First, you load the wafer boats appropriately into the assembly carrier and then close the fume door. When this is done, all you have to do is to push the START button.
• The system has pre-programmed features. The carrier assembly brings the wafer boats directly to the tanks for chemical processing. This is followed by the rotational agitation for a specific preset time.
• As all systems processes can be pre-programmed, usually you will want to allow this pre-set time to elapse. After the pre-set time is complete and the system automatically turns off. You may, however, even cancel the process in the middle of it if needed. Once the system comes to a complete stop, the carrier assembly moves to a rinse tank for the rinse cycle. These cycles are also alternatively called Quench-Quick, Dump-Overflow rinsing.
• The last process of the system comes to rinsing. An audible alarm will let you know that the rinsing process has been finished.
• You may notice that the carrier assembly continues spinning until you physically press the RESET button. Once the RESET is pushed, the carrier moves to position to be removed from the driving unit.

Model-SPS Rotary Wafer Etching Equipment:

1. The system has a closed loop motor control. It comes with an encoder that can increase the rotational agitation precision.
2. High throughput.
3. Touch screen control and microprocessor power. It also comes with easy accessibility and has easy operable control functions.
4. Program is as many as five process procedures - or "recipes" - by way of a interface operated by touch screen. The interface displays all the recipes in a coordinated manner. It also displays results as a single interface, furthering convenience of monitoring.
5. During processing, the wafer boat continues to rotate. Then the rapid transfer occurs between the process bath and the quench tanks to ensure the results that are always consistent.
6. Environment friendly.
7. Double containment instruction.
8. Utilize the fail-safe feature when the N2 pressure's power is out.
9. Bath temperature control.
10. All parts are protected against fluids that are corrosive. These parts are either made from inert plastic or have been sealed appropriately.

Specifications:

1. Agitation - axial rotation over 0 – 80 rpm.
2. The process chemistry temperature can be controlled to +/- 1 / 2 degrees over ambient 100 degrees.
3. The process time can be set between 0 – 9999 seconds or 0.0 – 999.9
4. The product capacity can handle either 50 x 6" wafers or 25 x 8" wafers at the same time.
5. The pre-rinse time can be set between 0 – 9999 seconds.
6. The quick dump cycle can be set between 0 – 9999 seconds.

The system also offers these options:

1. gravity chemical refilling
2. fume condensation
3. process tank material options
4. resistivity monitoring in the rinse tank
5. chemical circulation
6. heating/cooling in process tanks
7. large-size wafer options are also available

Contact Modutek

Modutek is one of the leading semiconductor and wafer etching equipment suppliers in the San Jose, California area. The company has over 30 years of experience in providing electrical schematics that are considered industry-standard, solid models, as well as plumbing and instrumentation design and flow simulation. Modutek has been providing such services to high-tech manufacturers, universities, and research facilities. You can contact Modutek through this page http://www.modutek.com/contact-us/. Or you may visit our office at 6387 San Ignacio Avenue, San Jose.

Chemical Handling Equipment Addresses High Tech Manufacturing Needs

The usual issue for companies working with chemicals at various points of the manufacturing process is to find the right chemical handling equipment. They understand that the equipment needs to comply with all regulation requirements and be very dependable. Using chemicals is vital to many manufacturing processes. Any company that needs this type of equipment wants the services of a supplier who not only has extensive experience and expertise, but also offers excellent customer service if any issues are found. They want to know the issues are properly handled while using the equipment.

Modutek Corporation understands your company's needs and will meet your specifications. The right supplier will help you focus on the main concerns of your business like improving and developing manufacturing processes and procedures.

Leave all these things to an experienced company such as Modutek who is well-versed in chemical handling equipment. When you work with Modutek, you will now be able to focus your attention on other areas of your business without needing to worry about the quality, performance, and how reliable your chemical handling equipment is. We are confident we are able to provide you with right equipment to aid you in treating chemicals at any stage of your manufacturing process.

Modutek's Chemical Handling Products

Modutek offers a complete series of equipment for chemical handling to meet a wide range of manufacturing processes:

1. Fume Scrubbers
Modutek's fume scrubbers effectively remove hazardous fumes, gases, and other pollutants from the atmosphere using a minimum amount of water. With Modutek's fume scrubbers, you can achieve your goal of having quality air standards. Their fume scrubbers can also supply an air flow rate from 500 to 25,000 cubic feet per minute (CFM). These fume scrubbers are widely used by manufacturers working with plating and wet processing stations. Modutek also customizes their equipment to the company’s requirements and specifications.

2. Modutek's acid neutralization and acid neutralization systems generates a seamless, smooth process flow when used with other chemical processes. These systems offer continuous flow and batch systems. Modutek's throughput capacity for these systems can be customized and designed to comply with any production facilities' own specific requirements and regulations.

3. Modutek's chemical collections systems, chemical lift stations, and pump carts are a reliable set of equipment used for chemical handling that follows the flow of chemicals. This set of equipment has been designed to work together so that you are able to work with the chemical flow more easily. They are compatible so they function together. This ensures your process will not encounter any gaps. Furthermore, you won't face any issues with less efficient or less compatible equipment.

Advanced Equipment and Process Components

More than just handling specific chemicals, Modutek's chemical handling equipment has other useful functions:

1) Quartz baths - process quartz and reduce the chances of other chemical issues
2) Circulators - enable you to control both the cooling and heating processors' temperatures.
3) Vacuum metal etchers - provide you the needed safety for automated batch processors to move your product through several chemical processes

Modutek offers a number of reliable chemical handling equipment so that you can perform your manufacturing processes and procedures at their maximum capacity. Modutek's equipment can also assure you it offers safety at the highest level. Whether chemicals are your company's main line or simply a byproduct, you can rely on Modutek to provide the right equipment for your specific high-tech manufacturing needs. You may call us at 866-803-1533 if you would like additional information or to obtain a quote.

Discover More about The Acid Neutralization Systems from Modutek Corporation

Modutek designs and manufactures a complete line of Acid Neutralization Systems. These include Continuous flow as well as Batch sequence reactor systems and are self-contained for treating industrial waste. Modutek designs these systems so they can easily be installed and operated. They are also compact and relatively inexpensive.

So what does an acid neutralization system do? It adjusts the pH level of process streams to a defined discharge range that is acceptable. Industrial applications will usually adjust the pH balance to a neutral pH range of 6 to 9 before they discharge water into public sewer system. Continuous flow Neutralization systems are appropriate for relatively high flows with mild alkaline or acidic (e.g., 2.0 < pH < 12.0) waste water.

Continuous flow systems are generally smaller and cost less when compared to Batch systems. However, they may also be more limited. Batch systems are used more for difficult and demanding industrial applications. This would include those with inconstant or constantly changing pH balance flows. It may also include treating flows that are determined to be highly acidic or alkaline waste water. In these cases a Batch system would be the best choice since it only discharges when the treated effluent meets specific discharge criteria.

Modutek's Acid Neutralization System products can also be modified to suit the specific dimensional requirements of nearly any working environment. Modutek also customizes the system's throughput capacity to match the size of the clients' production facilities.

Continuous flow Neutralization systems are best suited to specific applications that include:
1. Influent chemistry that is relatively fixed and does not have largely varying  incoming pH or chemistry
2. Influent flow that is also relatively constant and is not typified by large flow surges
3. Used as a single stage as part of a more complex application (such as fluoride or heavy metal reduction)
4. Effluent pH limit is not highly constrained (range of <2.0 pH units).

Continuous Flow Neutralization Systems
Modutek's Continuous flow Acid Neutralization Systems come in either two or three stages. Apart from being a self-contained product, it can also be installed indoors or outdoors. It has a final chamber for sampling and recording the pH discharge. It is also available either with a single or double containment, and provides a fully automatic operation to discharge within predefined limits. It is available in many sizes that range from 5 to 500 gpm.

Other features of this system:

1. Fully automatic operation that allows it to treat both acidic and alkaline waste waters in an automatic operation.

2. Designed as either a two or three stage system. The two stage systems are used for normal applications, while three stage systems are able to handle more demanding conditions.

3. Unitized construction including 5 to 100 gpm systems, that use steel-reinforced 1/2 thick thermo welded polypropylene. The larger sized designs have skid mounted process tanks made in polyethylene, fiberglass or lined steel.

4. Microprocessor based pH control. This ensures high accuracy, reliability and ease of calibration. It also includes a digital chart recorder which is used for digital monitoring and recording of pH discharge.

5. System Alarms

• Both low and high pH alarms in the final chamber
• Remote Ethernet access that is connected into relays in the control panel
• Double containment that contains a liquid sensor
• Low level reagent (testing agent) storage tanks

6. The electrical requirements are controlled to 115 volts (VAC), while mixers and pumps can be 115, 230 or 460 VAC.

Batch Sequence Reactor Systems
Modutek also manufactures Batch Sequence Reactor Systems to provide effective treatment of waste water that may contain several heavy metals such as copper, zinc, lead, and nickel. It also treats waste streams that contain fluorides, metal anions, and complex or chelated metals.

The Batch Sequence Reactor Systems can effectively address the following:

1. Precipitation and Flocculation effectively removes common heavy metals such as copper, lead, nickel, and zinc.
2. It also chemically reduces metal anions such as chromium and arsenic.
3. Calcium or magnesium effectively removes fluorides.
4. Ion Exchange resins or Flocculation removes trace metals.

High reliability and programmed automation are what Modutek’s Batch Sequence Reactor Systems provide. This includes the following features:

1. Programmed pH adjustment and chlorination to dispose of bacteria.
2. Programmed Reaction Sequences – Using multiple reagents such as polymer flocculent may be fed, to help the growth of precipitate particles.
3. Built-in Holding Tank - This is where waste water is collected and stored. The tank automatically processes the waste water when sufficient volume is collected.
4. Double containment - It features a triple-welded polypro outer shell including leak detection.
5. System alarms will sound to alert high and low pH, low regeant levels, and any leakage found in the double containment system. Specific ion measurements are available with Final Monitor and alarms.

For more information about any of the system specifications for the acid neutralization systems, visit our website. If you need more information about choosing the right acid neutralization system for your specific application or if you would like us to provide a quote, call Modutek Corporation at 866-803-1533.

Wet Bench and Wet Bench Station Uses in Industry

Wet benches and wet bench stations are the industry must-haves for all integrated circuit manufacturing. Semi-conductors, computer hardware, solar cells, and many medical components are all manufactured using this type of technology. They are particularly useful in clean room applications. Which wet bench or wet bench station option is chosen will vary, depending on the differing needs of a particular industry. Modutek Corporation is proud to offer a wide choice of wet bench stations. Options range from a basic manual wet bench to totally automated stations, with semi-automated models in between.

Modutek Corporation offers custom configuration of its already comprehensive line-up of production wet benches. We will work with your budget and your
specific needs to ensure that all of your requirements are met.

A Manual Wet Processing Station is a necessity in many, if not most, industries using clean rooms. Our manual wet stations are built to provide both acid and solvent application support. Our in-house design engineers will configure your wet bench station specifically to satisfy your exact application needs.

A few of the many advantages of Modutek Corporation’s Manual Wet Processing Stations include:

• Being designed to meet your unique process requirements
• Cost of ownership is lower compared to semi-automated or fully automated wet benches
• Competitive pricing for our high end manual equipment
• Meets, or exceeds, all current safety standards currently
• Designed to allow for future expansion

We want your new wet station to be an exact fit to your requirements. We encourage client input and involvement on the final design before we begin the manufacturing process. Let us review the different options offered with you, to guarantee your complete satisfaction with Modutek Corporation Wet Processing Station technology.

Semi-Automated Acid Stations can also be custom configured and manufactured according to a client’s specific needs. Many options are available. We offer in-house design and manufacture to ensure that you get all of the options you want and none of those you don’t need. The semi-automated acid stations we offer have the uniform processing and robotics you need without the greater expenses of fully automated systems. The top-of-the-line, servo-controlled robots in all of our semi-automated acid stations have 3° of freedom, which allows for precise and accurate developing, etching, and/or cleaning processes.

The Modutek Corporation Semi-Automated Stations offer these and other advantages:

• In-house software and robotics design and manufacture — no outsourcing
• SolidWorks Flow Simulation software
• SolidWorks Simulation Professional software
• Automation control using a touch screen
• Servo motor automation

Fully-Automated Acid/Base Stations offer the safety of hands-off processing. If your process necessitates complete automation, then the Modutek Corporation Fully-Automated Acid/Base Stations are the best choice. Processes from full-size 30”x 60” glass solar panels to tiny wafers can be reliably handled by our stations. Using information that your engineers specify, Modutek Corporation will configure the systems to meet your precise requirements. We never out-source so our team will be working hand-in-hand with yours to design the right wet bench station, its software, and its robotics perfect for your company’s needs.

Our Fully Automated Wafer Fabrication Equipment has these benefits:

• Everything is completed in one place - design, assembly and testing
• Our robotic and software design is also completed in-house, not outsourced
• SolidWorks Simulation Professional software
• SolidWorks Flow Simulation software
• More than 30 years experience and continuous operation
• Our goal is to provide outstanding customer support after the sale

For a quote or if you have any questions about any of our Wet Bench and Wet Bench Stations, call Modutek Corporation at 866-803-1533.

Using Advanced Ozone Cleaning Processing for Photoresist Strip, Etch and Clean

Companies may be spending more money than they would like for chemical disposal and chemicals. If this is the case, turn to the money-saving Advanced Ozone Cleaning Process equipment manufactured by Modutek. Our team of experienced designers will collaborate with you to create and manufacture the perfect ozone cleaning process for each company’s application.

Discover the many advantages of using Modutek’s ozone cleaning process. It has been awarded a Green Technology certificate. With it, the system can greatly reduce your process chemical dependency. The Modutek ozone cleaning process cleans, strips or etches wafers, solar devices and substrates for far less than conventional technology, often for half the normal cost.

Our technology is patented which permits the use of either Ozone or Ozone/water and mild acid to process components. This patented technology achieves the same results as expensive chemicals but in an environmentally friendly way.

See how our ozone cleaning process compares with the standard Piranha process and notice the advantages:

• The Modutek Ozone/water cleaning process is safer because it can operate at room temperature with the same or better results. The Piranha (which uses hydrogen peroxide and sulfuric acid) reaches temperatures to 130C.
• The Modutek system is quicker than the Piranha. It processes 100 Wafer Batches at 6 Batches per hour in each Process Tank (@1.2-1.5um)
• This Ozone cleaning process is well-matched with a number of Metal Films. The Piranha, however, is NOT suitable for the same Metal Films.
• The Ozone cleaning process leaves no particle or metal residue on Wafers; Piranha DOES leave them.
• Modutek’s system is less costly to run and has an EPA Approved (Green Chemistry) certificate. The Piranha, on the other hand, is More Expensive to operate and IS NOT EPA Endorsed.
• The Modutek Ozone cleaning solution has a lifetime of > 1 week with continuous operation. The solution used in the Piranha has a lifetime varying between 8 and 24 hours depending on the concentration of the Peroxide and Temperature it used in processing.

Break-Thru O₃ Technology

• Proven to work with Gold, Copper and Aluminum as well as Titanium, Tantalum, Tungsten and many others
• Distributes Exact Chemistry to the Point of Use
• Replaces 2 to 3 Traditional Wet Benches processes

Other Ozone processes replaced:

• Metal etch
• Resist removal
• Surface preparation
• Surface etch
• Final clean

Call our office, 866-803-1533, to set up an appointment to discuss your ozone cleaning process needs. We will process a sample of your product to allow you to discover what equipment we have to offer. It is our desire to help meet your ozone cleaning process needs and we look forward to the opportunity to speak with you toward that end.