New SPM Process Provides 75% Improvement in Chemical Savings

Modutek has recently implemented the new SPM process and the company now has benchmark results from real process applications which show a significant improvement in chemical savings. The new SPM process requires the use of Modutek’s custom designed SPM process wet bench. Modutek designs and assembles wet benches and semiconductor manufacturing equipment at their facility in San Jose, California and provides systems that exactly meet their customers’ requirements.

Usually, the SPM mixture deteriorates as hydrogen peroxide turns to water and dilutes the concentration. The SPM mixture must be completely replaced at least every eight hours. This results in downtime during new mixture pour, replacement of the chemicals as well as neutralizing and disposal of the corrosive mixture in an environmentally safe way – and all these costs a lot. The SPM clean process is proven to provide results.

Modutek's “Bleed and Feed” system is designed to maintain the SPM mixture concentration automatically over extended periods. In this system, there is a “clean” tank and a “dirty” tank. A programmable amount of mixture goes out of the dirty tank, and another programmable mixture is automatically transferred from the clean tank to the dirty tank. To make up for that, an appropriate amount of sulfuric acid is added, and both tanks have hydrogen peroxide to restore and maintain the concentration.

One of Modutek’s customers that have used their semiconductor manufacturing equipment now has real life results from using the “Bleed and Feed” SPM process improvements. The results show remarkable improvements that include the reduction in volume of the following: sulfuric acid use, acid neutralizer use and chemical disposal volume. Costs in acid re-agent use are also significantly reduced. System drains are now cut down from three times a day to once a week. Downtime is not needed to drain and re-pour the mixture, and throughput is also increased. Safety is now improved due to reduced operater interaction with dangerous chemicals.

You can learn more about the new SPM Process by reading the complete article titled “New SPM Process Provides 75% Improvement in Chemical Savings.” Modutek is available to answer questions or provide a free consultation. You may reach them by calling 866-803-1533 or email modutek@modutek.com.