How Quartz Tube Stations Work and the Benefits They Provide

High-temperature operations that include diffusion of materials into the silicon wafers are some of the processing steps involved in the manufacture of semiconductor components. Quartz tubes are the ideal vessel for such processing steps because they can withstand even the highest temperatures and are inert enough to reduce contamination.

Usually, the silicon wafers are placed in a horizontal quartz tube that is big enough to contain wafers and their supports. In horizontal quartz tube cleaning stations, the tube is inserted into the cleaning enclosure and cleaned with an acid spray. The acid dissolves and removes the contaminants from the high temperature furnace. A couple of cycles are then followed: the rinse cycle which removes the traces of the acid, and the drying cycle which speeds up the drying process without introducing particles into the cleaning enclosure. Mechanical handling of the tubes helps in minimizing possible damage due to human error and decreases the chances of contamination from foreign particles.

Modutek’s quartz tube cleaning stations offer a lot of advantages, especially when they're customized to accommodate the requirements of a specific application. Aside from providing customized equipment, Modutek can supply the degree of automation requested by the client. Cleaning process steps can be performed manually or fully automated. Full automation minimizes human error and keeps operators safe by allowing them to remotely monitor the cleaning process.

Modutek's horizontal quartz tube cleaning stations provide an excellent solution for semiconductor manufacturers and research facilities. Rugged and reliable, the basic unit offers many options for additional features according to specific customer requirements such as: holding tanks, automation features, a T/C sheath cleaner or a bottle washer. As a leading semiconductor equipment manufacturer Modutek provides continuous product innovations and improvements and offers the highest degree of customer service and support.

For more details read the complete article “How Quartz Tube Stations Work and the Benefits They Provide”. To discuss your specific needs, contact Modutek at 866-803-1533 or email Modutek@modutek.com to schedule a free consultation.

How Teflon Tanks Are Used in Wet Processing Applications

Modutek's Teflon tanks are custom-made and compatible with both new and existing wet processing stations. Their modular configuration makes it easy to install in existing clean room facilities. Modutek can also design and build specific tanks to meet a customer’s requirements. The advanced PFA Teflon welding techniques reduce contamination and undesirable by-products in the process. Heated models are also available for use in processes requiring temperature control.

Modutek's Teflon tanks are available in standard sizes (single or double capacity); the company can also build custom-sized tanks. There are also other features and functions that make the Teflon tanks ideal for various wet bench applications.

Modutek provides three types of Teflon tanks:

·         The "TT series" (ambient temperature baths)

·         The "TI series" (temperature controlled static baths)

·         The "TFa series" (temperature controlled overflow recirculating baths)

Modutek's static and recirculating temperature-controlled Teflon tanks are ideal for anisotropic etching of silicon using KOH (potassium hydroxide) and TMAH (tetramethyl ammonium hydroxide) processes. Process temperature control is accurate to within +/- 0.5 degrees centigrade and an optional Teflon refluxor with Teflon cooling coils is also available. Providing fast and accurate temperature controls lets operators achieve excellent consistency and repeatability for temperature sensitive process for TMAH and KOH etching.

Modutek’s state-of-the-art Teflon tank design, features and functions, result in fewer defects in output and a higher quality control overall. These tanks ensure uniform heating in the bath, rapid but accurate temperature control and process etch variability wafer to wafer less than 2%. Modutek also offers in house maintenance and support for the product.

Read the complete article titled “How Teflon Tanks Are Used in Wet Processing Applications” for more details. Whether you need Teflon tanks or a complete line of wet process semiconductor equipment, Modutek can help determine what the requirements are and suggest optimal equipment solutions. You may contact Modutek at 408-362-2000 for a free consultation and quote.

Get to Know Modutek Corporation

If you don’t know much about Modutek Corporation or what we do, we’d like to give you an abbreviated history to help you get to know us a little better.

Modutek Corporation was founded in 1980 to manufacture wet process equipment components for the Semiconductor industry. During the past 30 plus years, we have expanded our specialties to include nitride etch baths and rinsing systems, sub-ambient filtration systems and high temperature quartz heated baths. Although we originally marketed to both original equipment manufacturers (OEMs) and the end users who purchased wet process stations.

The impact of semiconductor manufacturing on the environment came to the forefront of many in the industry during the 1990s. Modutek became proactive and purchased Shannon Engineering and then created a new environmental group called Pollution Control Laboratories (PCL), run as a Modutek Corporation subsidiary. The group manufactured acid neutralization systems, chemical delivery systems and air scrubbers. By the end of the 90s, however, the subsidiary was dropped and all systems manufactured by it were manufactured as Modutek products.

Modutek continued to expand both its acquisitions and the wet process equipment it manufactured throughout the coming years. The Vacuum Etch System (VES) and Spin Process System (SPS) were added in 2002 when Modutek acquired Sysmax, Inc. These unique systems were manufactured as a subsidiary for two years and then they were moved under the Modutek Corporation, as well.

Since 2000, the semiconductor wet process equipment manufacturing and Tech industry have undergone some downturns. Many of the processes developed and manufactured for OEM wet process bench manufacturers are now used in other Tech industries. This enabled Modutek to expand and begin offering turnkey bench manufacturing operations.

We are proud of our working relationships with existing and new customers. Together, we have been able to develop the wet process equipment they need. Some of these include the IPA vapor dryer, Ozone Cleaning process and Megasonic cleaning technology. If your business needs a clean room, facilities upgrade or specific wet process equipment, we would like to show you how we can meet your needs.