Selecting Silicon Wet Etching Equipment for Your Application

The use of high quality Silicon wet etching equipment is needed in the manufacture semiconductor components. Selecting the right equipment is essential for maintaining facility performance and excellent product quality. The products produced at manufacturing facilities range from relatively simple electronic parts to complex components with intricate microstructures. With these kinds of varying requirements, most systems must be customized for the specific application.

Selecting silicon wet etching equipment along with any appropriate accessories may require professional and expert help since system parts must be closely integrated and seamlessly move silicon wafers through multiple fabrication steps. Precise chemical dosages, as well as accurate temperature control and exact timing, are important for consistent results.

Tanks and baths
Each of them is specifically made to support certain chemical processes and should be made from high-quality materials to reduce contamination.

Quartz baths — for cleaning processes such as RCA and SPM.
Teflon tanks — for etching applications such as KOH and TMAH.
Stainless steel tanks — for solvent baths.

Automation
Wet benches can be operated manually, semi-automatically, or with full automation.

A manually controlled wet bench allows human operators to set process parameters and calculate chemical doses before beginning and monitoring the process.

A semi-automated wet bench features some process steps that are automated but it still requires the control from the operator.

A fully automated wet bench runs the entire process and improves the performance of silicon wet etching equipment in many ways, which include: reduced human error; reduced chemical use; increased etching accuracy; and improved etch rates.

Modutek provides excellent silicon wet etching equipment and you can learn more by reading the complete article “Selecting Silicon Wet Etching Equipment for Your Application.” You may request a free consultation or more information by contacting Modutek at 866–803–1533 or email Modutek@modutek.com.