Ordering a Wet Bench Station for Your Specific Process Requirements

Semiconductor equipment manufacturers provide equipment that supports complex manufacturing process steps that must be followed and controlled in a very precise manner. The process requirements will typically include cleaning, etching, developing, and stripping along with the proper handling/disposal of caustic chemicals. The physical attributes required in the production line as well as special features (like recirculation and heating) may also have to be considered.

The three main physical factors that influence wet bench equipment specifications include available facility space, wafer size, and wafer throughput. Limited space for new installations or a requirement to integrate with an existing system may require that compact stations be used. Some functions, like rinsing and drying, can be integrated or may need separate spaces. Chemical delivery systems can take space or be placed some distance away or behind the production line.

Throughput is a crucial variable because this affects profitability. Automatic transfer of wafers between stations and automatic process control may save time. How the process is controlled may affect how long a chemical bath can take place without changing the chemicals and the need for downtime for maintenance.

Wet bench equipment and processes (such as RCA clean and Piranha) use aggressive and often dangerous chemicals. Therefore, the equipment should have a strong resistance to such corrosive substances as well as additional features to keep the operators safe.

These attributes can mean that almost every installation of wet bench equipment is customized to some extent. However, only an experienced semiconductor equipment manufacturer can offer a complete line of wet bench stations incorporating the latest technology and using their own software. A manufacturer should also offer other special features such as heating control accuracy and precise calculation of dosages which are essential for high-quality output. Suppliers who manufacture, assemble and develop their own equipment should also be available for complete after-sales support and service.

For more information read the article “Ordering a Wet Bench Station for Your Specific Process Requirements”. If you want a free consultation or have questions, contact Modutek at Modutek@modutek.com or call 866-803-1533.