Solvent wet bench equipment is designed for operations which include substrate cleaning, photoresist stripping, and liftoff pattern transfers. The wet bench stations provide a critical role in the semiconductor fabrication process. Since solvents are often highly inflammable, wet bench equipment needs to be designed to follow stringent safety codes.
Precautions related to fire and electrical safety is some of the most basic requirements in the design of wet bench stations. There are also requirements for safety alarms, carboy collections, heated solvent baths and process timers. Only well trained and authorized individuals should access the wet bench equipment. In many cases, added safety measures from simple approaches, such as using auto-lids made of Teflon or stainless steel used for sealing off chemical containers.
Solvent applications require the use of stainless steel. Modutek's solvent stations are constructed of 304 stainless steel, which makes them suitable for photoresist, IPA and acetone which are critical operations in the wafer processing. Plus, Modutek's solid works and professional flow simulation software provide improvements in productivity.
Precautions related to fire and electrical safety is some of the most basic requirements in the design of wet bench stations. There are also requirements for safety alarms, carboy collections, heated solvent baths and process timers. Only well trained and authorized individuals should access the wet bench equipment. In many cases, added safety measures from simple approaches, such as using auto-lids made of Teflon or stainless steel used for sealing off chemical containers.
Solvent applications require the use of stainless steel. Modutek's solvent stations are constructed of 304 stainless steel, which makes them suitable for photoresist, IPA and acetone which are critical operations in the wafer processing. Plus, Modutek's solid works and professional flow simulation software provide improvements in productivity.
Modutek's safety design for solvent processing involves every required feature:
- Wiring specified to meet NFPA 70 & 70 codes;
- Emergency power off design for every safety interlock;
- Lip exhausts on all solvent tanks;
- N2 head case purge design;
- Photohelic EPO interlocks;
- Safety shields;
- Teflon N2 guns;
- Continuous flow of the water manifolds;
Modutek's stainless steel solvent stations are available in manual, dry-to-dry, semi-and-fully automated designs. Wet bench design and construction is a complicated process, but Modutek ensures their systems that are designed to meet all industry safety requirements as well as the specific requirements of individual customers.
Our full article “How to Safely Use Solvents for Wafer Processing” explains more about this topic. Call Modutek at 866-803-1533 if you have questions or would like to get a free consultation or quote.
No comments:
Post a Comment