How Megasonic Cleaners Improve Silicon Wafer Manufacturing

One of the key process steps in semiconductor manufacturing is the cleaning of silicon wafers. This has become even more crucial as micro geometrics continues to shrink on 300 mm silicon wafers. Sub-micron particles must be removed without damaging the wafer surface from the previous steps. Particles that remain on the wafer substrate may result in defective semiconductor components or low-quality devices with sub-par performance.

That's where megasonic cleaning comes into the wafer cleaning process. It helps in removing sub-micron particles and contaminants without damaging or altering the wafer surface.

Megasonic cleaning systems use a high-frequency generator to create high-frequency sound waves using a transducer that is submerged in the cleaning liquid inside a tank. The sound generates compression waves that create high pressure at their peaks and low pressure at their troughs. Small cavitation bubbles are generated from the troughs and collapse in high-pressure peaks. The collapse of the bubbles creates a high-energy scrubbing action that effectively dislodges particles and contaminants from the surfaces being cleaned.

The right frequency and power selection are crucial factors to achieve effective and thorough cleaning. Lower ultrasonic frequencies in the 20-100 kHz range generate larger bubbles that are ideal for more robust cleaning. For semiconductor cleaning megasonic cleaning the megahertz frequency range is required since it generates smaller cavitation bubbles that produce a thorough but gentler cleaning, without damaging the wafer surface.

The use of megasonic cleaning in silicon wafer manufacturing improves the overall effectiveness of the chemical cleaning solution. The powerful scrubbing action of the energetic cavitation bubbles helps in removing sub-micron contaminants and particles from the wafer surface.


Read the complete article titled “How Megasonic Cleaners Improve Silicon Wafer Manufacturing,” for more details about how Modutek incorporates the use of Megasonic cleaners in wet bench equipment. For a free consultation or quote call Modutek at 866-803-1533 or send an email to Modutek@modutek.com.