Why Teflon Tanks Are Used with the KOH Etching Process

KOH etching is more preferred compared to many other silicon wafer fabrication methods because it works rapidly and reliably, while handling of the chemicals is relatively safe. The KOH etching process controls the etching speed by relying on a contamination-free environment and using the temperature and KOH concentration.

Only Teflon tanks are used in this process because Teflon is stable and doesn't deteriorate or corrode from using KOH etching.

The KOH etching process controls allow precise and repeatable temperature controls for positive fabrication results and high-quality production. KOH etching in Teflon tanks, along with temperature control, is an exceptional process for silicon wafer nanostructure fabrication in both manufacturing facilities and research environments.

KOH or potassium hydroxide etches silicon quickly and at a stable rate which relies on the concentration of the solution and the temperature of the liquid. Aside from that, this etching process is also influenced by the crystal planes of the silicon and the doping concentration. These factors can be applied for direct etching in certain directions and stop etching at defined points. The result is that KOH etching can produce the accurate nanostructures required if the crystal planes and the doping are used accurately.

Modutek, a company with over 30 years of experience providing semiconductor equipment solutions, offers Teflon tanks that are specifically designed to support the KOH etching process, which ensures high-quality wafer fabrication.

Teflon tanks are used because aside from its stability, they have the ability to eliminate contamination from the tanks or fluid paths by making sure that the KOH solution only comes in contact with Teflon. Teflon is not affected by the corrosive chemical. In addition Modutek’s Teflon tanks are welded using advanced PFA sheet welding techniques, which guarantees reduction of contaminants.

The complete article “Why Teflon Tanks Are Used with the KOH Etching Process” explains more about the necessity of using Teflon tanks when doing KOK etching. If you have questions or would like a free consultation or quote on equipment to support the KOH etching process, please call 866-803-1533 or send an email to modutek@modutek.com.