Improvements to the Silicon Wet Etching Process

Continuous improvements to equipment design and materials has enabled the silicon wet etching process to produce improved wafer yields with less minimized defects on smaller sized geometries. To promote further improvements, Modutek strives to provide equipment designed to promote efficiency, safety, and low cost. 

·         Modutek's QFa Series High Temperature Recirculating Quartz Baths/Qa Series Constant Temperature Quartz Baths have been designed for etching, stripping, and heating.

·         Teflon Tanks - Standard and customized carrier sizes, different tank configurations, inline heating, and immersion heating are also available.

·         Silicon nitride etch baths - deliver exceptional process control while retaining flexibility in installation and operation.

·         Quick Dump Rinsers - can boost process efficiency by reducing rinse times and DI water consumption.

Modutek provides equipment and solutions that meet customer requirements. For more information on this topic read the blog article titled “Improvements to the silicon wet etching process”. For any questions on selecting the right manufacturing equipment for your requirements call Modutek at 866-803-1533.