Modutek's DR
Series Quick Dump Rinser is designed for use during the rinse cycle in a silicon wet etching
process. The use Deionized
water (DI) during the rise cycle provides an essential step that is needed for
particle and defect density reduction.
The DR Series Quick
Dump Rinser provides a thorough and economical cleaning process. Its features and
functionality allow for limited DI water use and ease of installation into new
and existing stations. Our specialists can easily upgrade existing rinsing
modules and install newly manufactured wet bench process stations to suit a client's
needs.
The DR
Series Quick Dump Rinser is compatible with the Modutek C15sa Rinser
Controller, which is designed specifically for the rinse module. It also
provides convenience to the cleaning process and is also highly adjustable.
The DR
Series can also be used with Modutek's own Resistivity Motor RM30a for a
more meticulous supervision of the cleaning process.
If you
would like to learn more about Modutek’s DR Series Quick
Dump Rinser, contact us at 866-803-1533 or email us at sales@modutek.com.
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