Using a Marangoni Drying system, more commonly called IPA Vapor Dryer, is the current gold-standard drying method in semiconductor manufacturing and related industries. Modutek Corporation’s free standing IPA Vapor Dryer system uses one standard gallon bottle, allowing quick, uncomplicated bottle changes, thus eliminating down time. There are more advantages to using the Modutek Corporation IPA Vapor Dryer.
Marangoni Drying, first developed in 1990, is now the most popular method for semiconductor manufacture. IPA vapor drying produces an ultra clean, dry surface on a wafer or flat substrate. Nitrogen gas is used to break the wetting film’s surface tension, drying the substrate while the water/IPA gradually drains around the substrate wafer. The surface dries without feature damage or a watermark, with incredibly low particle counts.
The IPA (isopropyl alcohol) Vapor drying process has these benefits:
- Unlike spin-drying, the Modutek Corporation IPA Vapor Dryer doesn’t have moving parts, allowing the manufacture of thinner wafer substrates.
- Particle contamination caused by evaporation residues (a common problem in spin rinse dryers) is greatly reduced using IPA Vapor Dryers.
- The unique IPA Vapor Dryer system uses fewer chemicals than other drying processors. This reduces both the environmental impact as well as the costs of acquiring and disposing of chemicals.
- Quicker drying times (as quick as 10 to 15 minutes) reduces productions costs, while no moving parts reduces maintenance requirements.
- The IPA Vapor Dryer’s lower particle counts make it the superior drying process choice.
- Outstanding for high aspect ratio structures.
- The reduced possibility of substrate breakage during the IPA Vapor Dryer cleaning and drying process reduces production costs.
- An IPA Vapor Dryer increases production of quality substrates. With no electro-static build up between metallic surfaces and therefore no discharge, possible damage is avoided.
- The IPA Vapor Dryer prevents yield loss from watermarks, which is a common problem in other processes, but non existent with IPA vapor drying.
Not just the semiconductor industry, but industries dependent on them profit from the use of the IPA Vapor Drying system. Industries manufacturing products as varied as solar panels or computer disk drives, and any manufacturers using electro-chemical cells will benefit from this technology. The superior substrates manufactured by IPA Vapor Drying will be of great use to companies using micro-electronic mechanical systems (MEMS), including the medical equipment and automotive industries.
Consider Modutek Corporation’s IPA Vapor Dryer for your next drying process upgrade. Call us today at 866-803-1533 to discuss your requirements and to get a quote.
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