Silicon Etching Equipment Options

Does your company use silicon etching equipment? If so, turn to Modutek. We have over 30 years experience manufacturing silicon wet etching products, along with semiconductor manufacturing equipment and ozone cleaning process equipment. You can turn with confidence to our in-house manufacturing team that will work with you to design the products you need for your applications.

Silicon wet etching, when used to make Micro-Electrical-Mechanical Systems (MEMS) components, will involve very tiny parts, often 0-100 microns in size. You will find the MEMS components in many products in a number of industries. Two of the most common industries using MEMs components are the medical and automotive industries. Some of the products that use them are MEMS accelerometers for car air bag sensors and Diabetic blood glucose meters.

Modutek offers different options for any company needing silicon etching equipment. The Sub-Ambient System (BOE), Quartz Baths, Nitride Etch Baths or Temperature Controlled Circulator are some of the equipment available. We work with you to understand your specific needs so we are able to build your silicon wet etching equipment to your specifications. We look forward to discussing your needs during our initial conversation.

• The QFa Series Quartz Bath, a recirculation quartz bath for high temperature liquids, has these options: quartz diffuser plate, liquid level sensor, auto lid, process temperature controller, and custom vessel sizes.
• The Qa series Quartz Bath has a 5-sided bonded circuit heating element, seamless flange design and redundant safety devices. You may also choose from the following: gravity drain, magnetic stirrer, remote operation timer switches, dilution valve system, quartz bubbler and process controller.
• The F Series Sub-Ambient Circulation Bath, for BOE applications, allows for continuous filtration to reduce acid consumption. It has high and low temp flow sensors, N2 blanket, 120VAC, 60Hz standard electrical service, pneumatic or electrical pump, and various sizes of micron filters available.
• The Nb Series Silicon Nitride Etch Bath was planned to supply the ultimate in process control. It is among the safest and most flexible silicon etching equipment. These are some of the options available for this equipment: pneumatically actuated auto cover, Teflon® gravity drain system, aspirator valve system, and remote operation timer switches. Learn more about the Theory of Operation document on our website.

When determining your requirements for silicon etching equipment, you will want to think about the following questions: What does the equipment need to accomplish? Will the silicon wet etching product produce what is needed? It is our goal to help you to decide if silicon etching equipment will meet your needs or if there is a different piece of equipment better suited to your application, as well as the options to help you meet your requirements.

If your company uses silicon etching equipment, and not every industry or business will, Modutek has the knowledgeable and experienced team you need. Our team will help to plan a silicon wet etching product that will best meet your company’s application and needs.