Using Acid Fume Scrubbers to Maintain a Clean Work Environment

When semiconductor manufacturing process steps involve etching or cleaning with acids, the process station produces fumes, which can be harmful. Acid droplets in the exhaust can cause health risks for workers and corrode equipment.

To address these issues, semiconductor manufacturers need acid fume scrubbers to remove and neutralize acid droplets in the process exhaust. Once the acidic mist passes through the scrubbers, the resulting air is clean enough to be discharged into the workplace or outside. It results in a cleaner and safer work environment for workers.

Acid fume scrubbers work by passing the mist over a wet bed made up of special, large surface packing material. The scrubber has to be able to handle the flow volume from the process exhaust.

Acid fume scrubbers from Modutek use a high surface area packing material made by industry leader Lantec. The packing material is kept wet with a solution that contains acid neutralizing chemicals. As the acid mist passes over the surface of the wet packing material, the acid droplets dissolve in the neutralizing chemicals, removing them almost completely. The discharge air will now be mostly free of acid mist, resulting in a clean and non-corrosive air output.

Modutek’s acid fume scrubbers can remove up to 99% of acid mist. They are available in sizes ranging from 500 to 25,000 CFM. This capacity range will satisfy the flow requirements from the smallest to the largest process volumes.

Benefits and advantages of using Moduteks’s acid fume scrubbers:

• The high acid mist removal improves workplace air quality.
• The user-friendliness of the scrubbers means operators do not need extensive training and can reliably achieve operational targets.
• Low cost of operation and maintenance allows for a quick return on investment.
• The design flexibility and wide range of capacities ensure that there is a system suitable for most applications.

In addition to wet process station applications, acid fume scrubbers can be used with other chemical handling equipment Modutek offers to provide a clean and safe working environment.

Modutek has additional information in their recent article, “Using Acid Fume Scrubbers to Maintain a Clean Work Environment.” If you have questions after reading the complete article, or would like to set up a free consultation, contact Modutek via email at Sales@modutek.com or by calling 866-803-1533.