How Quick Dump Rinsers Improve Silicon Wet Etching Process

Quick dump rinsers provide fast and effective rinsing of silicon wafers from chemicals and particles. During semiconductor fabrication silicon wafers are etched with chemicals and particles, which have to be rinsed off to prevent continued etching.

Modutek's quick dump rinser uses de-ionized water to wash away all traces of chemicals while introducing no new particle contamination source. It uses state-of-the-art engineering techniques that allow it to reduce de-ionized water consumption while featuring a short rinsing time and particle reduction. The large trap door and the contoured rinsing vessel shorten dump times and promote laminar flow to rinse away contaminants. The machined dump door doesn't have any seals or gaskets that could entrap particles, and the smooth polypropylene construction of the tank ensures that it is not a source of new particle contamination.

Once the silicon wafers are placed in the rinser, de-ionized water jets rinse the chemicals from the wafer surfaces. The tank fills, bringing the rinsed contaminants to the surface where they leave the tank through the overflow weir. A nitrogen bubbler produces gas bubbles that rise through the water and remove additional particles and contaminants. At the final stage of the rinse cycle, the trap door at the bottom of the tank opens to drain the water.

The entire rinsing process is fast and thorough without introducing new contamination. The use of Modutek's quick dump rinsers can improve production and output quality. When quick dump rinsers work rapidly, effectively removing chemicals, particles, and contaminants leads to an increase of throughput and reduced chances of product rejection.

Rinsing is required after most of the wet process production steps, and any time saved with a quick dump rinser is multiplied by the number of times rinsing takes place in the semiconductor production process. Modutek's quick dump rinser provides these benefits by addressing overall semiconductor manufacturing requirements.

Modutek's quick dump rinsers provide additional benefits, such as reduced costs and faster production line operation. Reduced de-ionized water lowers costs, and an optional reclaim system can result in extra savings. Besides quick dump rinsers, Modutek also supports customers with full line of standard or customized silicon wet etching equipment.

For more details read the complete article, How Quick Dump Rinsers Improve Silicon Wet Etching Process. If you have questions, or would like to set up a free consultation, call 866-803-1533 or email modutek@modutek.com.