Because semiconductor manufacturing consists of a large number of steps, silicon wafer processing often includes unique requirements. While standard equipment may be suitable to some extent, using custom equipment that is adapted to specific processes can usually improve production line performance.
Customization of a semiconductor manufacturing equipment can impact how well the silicon wafer processing equipment works in the following ways:
1) Physical customization of wet processing equipment
Semiconductor manufacturing
equipment often has to fit into a defined space or retrofitted into an existing
production line. In either case, the dimensions have to be customized to fit
the available space. Modutek can build processing stations and tanks with
special dimensions to fit and arrange components for less length or less depth as
required.
2) Customized software for special calculations
Modutek's SolidWorks Flow
Simulation and Simulation Professional software allows customers to calculate
chemical dosages and track chemical usage accurately. Custom installations that
support unique process requirements may require special calculations and the
software can be adapted to track chemical usage. Since Modutek writes and
supports their own software, any special requirements can be accommodated by adapting
the program code.
3) Automation with customized characteristics
Modutek's standard wet
processing equipment is available in fully automated, semi-automated, and
manual versions, but customers may require some automated functions while other
functions remain manual or semi-automatic. Manual controls are ideal for
prototypes that need to define basic process parameters. The process is then
optimized in semi-automatic operation while eventually running in fully
automatic mode when in full production.
4) Customized process components and subsystems
Process components and subsystems may include
chemical delivery, baths, or tanks, wafer handling, and wafer drying. Modutek can
integrate part of all of these functions into a single system or use separate units
in a customized configuration. With the company’s expertise and experience as a
leading wet bench manufacturer, Modutek can
design customized configurations that support the required wet process
functions and parameters required by a customer.
Modutek has a complete line of standard wet process stations, that are all designed and built in house. By working closely with customers Modutek ensures that any system customizations will meet the special process requirements that a customer may have.
For more details read the complete article, “How Customized Equipment Improves Silicon Wafer Processing”. Contact Modutek at 866-803-1533 or email modutek@modutek.com for a free consultation to answer any questions you have about your specific process requirements.
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