How Megasonic Cleaning Reduces Cost and Improves Silicon Wafer Yields

Semiconductor manufacturing relies on wafer cleaning to remove material from previous process steps and microscopic contaminating particles. As the size of structures and circuits on wafers decreases, the tiniest particles can interfere with etching and the creation of circuits and micro-structures. Such interference can cause defects in the final semiconductor product, lower product performance, or cause reduced product lifespan.

Therefore, megasonic cleaning is the ideal cleaning process because it removes particles thoroughly but gently, leaving the wafer and its circuits and structure undamaged.

Megasonic cleaning systems generate microscopic cavitation bubbles in the cleaning solution. When the bubble bursts, it produces a tiny but powerful jet that dislodges particles from the parts' surfaces to be cleaned. Lower frequencies generate comparative larger bubbles and more powerful jets, while high frequencies produce smaller bubbles and less powerful jets.

Megasonic cleaning produces a quick and thorough cleaning of silicon wafers and does not require cleaning chemicals. As a result, it reduces the need to purchase, store, handle, and dispose of hazardous chemicals, therefore reducing costs. As megasonic cleaning reduces the need for cleaning chemicals, it results in a safer working environment for the operators who do not need to wear protective clothing when handling chemicals, which can otherwise reduce their productivity.

The effective use of megasonic cleaning that Modutek provides is through the partnership the company has with Kaijo Corporation. Kaijo is world leader in megasonic and ultrasonic cleaning technology, which provides megasonic cleaning to semiconductor manufacturing. Modutek has integrated Megasonic Cleaners into the company's wet bench equipment to produce exceptional low particle counts.

For further details read the blog article titled “How Megasonic Cleaning Reduces Cost and Improves Silicon Wafer Yields”. If you questions, or would like to set up a consultation, please call 866-803-1533 or email Modutek@modutek.com.