How Software Controls Support Unique Wet Processing Requirements

Automated software control systems can help improve wet bench operations, but the software has to be flexible to meet the specific needs of a wet processing application. Modutek can customize their software controls and wafer fabrication equipment to meet the specific needs of a manufacturer.

Software controls can increase dosage accuracy, timing reliability, and process safety. However, the process parameters or even the process itself can change due to many factors such as stricter regulations, varying customer requirements, as well as varying supplies. The ideal automated process station is custom built to meet the requirements of a specific application while retaining the software programming capability to respond to production line changes.

Modutek's fully automated wafer fabrication equipment features touch screens with a graphical user interface (GUI). This feature enables operators to check the status of the process, which may lead them to start or stop the steps if needed. Modutek can respond to unique requirements at the software level and add equipment to the GUI depending on the process changes.

Modutek also uses the SECS/GEM (SEMI Equipment Communications Standard/Generic Equipment Model) interface standard. It allows the company to integrate other equipment into its production line designs and easily make changes to the software.

Modutek can integrate higher-level controllers such as Omron machine automation controllers or controllers from specific manufacturers such as Allen Bradley. These special controllers are often required for a specific functionality or integration with existing systems.

Modutek's SolidWorks Simulation Professional and SolidWorks Flow Simulation software calculates chemical dosages and track chemical usage. The software ensures that the process environment for a particular batch is always the same and produces reliable etch rates and consistent throughput.

2020 marks Modutek’s 40^th year of operation as a wet processing equipment supplier and semiconductor equipment manufacturer. For more details read the complete article, “How Software Controls Support Unique Wet Processing Requirements”. Contact Modutek at 866-803-1533 or email Modutek@modutek.com to schedule a free consultation on your wafer processing equipment needs.