How the IPA Vapor Dryer Improves Wafer Processing Results

Silicon wafers require cleaning, rinsing, and drying at certain stages of the fabrication process. The results need to be as flawless as possible, leaving no watermarks and only minimal particle contamination. However incorrect cleaning and drying may lead to contamination, which can cause serious product malfunction and high failure rates. That’s why many semiconductor manufacturers and research facilities use an IPA Vapor Dryer.

Simple methods like rapid spinning and heat drying will no longer work with the latest high-density wafers. Since water is hard to remove from these complex shapes, drying without leaving watermarks is essentially impossible.

This is why cleaning with isopropyl alcohol (IPA) is necessary. IPA drying using the vapor method delivers wafers that are completely free of watermarks and with minimal contamination. Modutek’s IPA vapor dryer features a design which obtains high-quality results by serving IPA vapor at the upper reaches of the drying tank, which ensures the distribution is even. Since the IPA's surface tension is lower than that of water, such vapor serving introduces a gradient of surface tension where IPA meets with a layer of water on the water surface.

Using the “Marangoni drying effect” water quickly leaves the surface and leaves the surface completely dried and clean. Since water never actually evaporates, it leaves no watermarks behind. Ozone is applied into the drying tank to make sure that the drying process does not leave any trace of contamination. The process takes no longer than 15 minutes.

Modutek's in-house team of experts in IPA vapor dryer design will work with a client’s technical team to design and create IPA Vapor Dryers that will specifically meet their application requirements. Clients can also come to Modutek’s facility to review testing results and confirm the equipment will work as needed.

Read the complete article “How the IPA Vapor Dryer Improves Wafer Processing Results” to learn more about Modutek’s IPA vapor dryers. For a free consultation or quote contact Modutek at modutek@modutek.com or call 866-803-1533.