How Wet Bench Stations Are Tailored for Specific Manufacturing Process Requirements

The fabrication of semiconductor wafers requires precise, closely controlled, and consistently-repeated procedures. These factors are critically important especially for industries that fabricate semiconductors, medical equipment, and photovoltaic cells. They require the use of custom-made wet benches designed to assist the safe and precise control of corrosive chemicals at high temperatures.

Modutek, with over 35 years of experience in wet bench stations, manufactures a full range of wet bench equipment to address the specific needs of semiconductor manufacturing facilities and research centers. Wet bench stations are tailor made based on the manufacturing requirements of each customer. Modutek’s wet bench equipment for the semiconductor industry meets all UL2360/FM4910 standards for fire and contamination safety.

Sulfuric acid-peroxide is a powerful chemical that is critical to the cleaning process applied to semiconductor wafers. Effective application of this chemical mixture is inherently unstable and therefore it needs to be constantly controlled and re-balanced to maintain efficiency.Modutek’s wet bench equipment ensures the precise chemical concentration levels are maintained and insures the most cost-effective use using an exclusive chemical re-use system.

The silicon nitride wet etching process is another semiconductor fabrication stage that is used to mask chemical etchings on silicon wafers. It also requires high precision and control. Once the etching is successfully done, the masking material should be removed. Precise control of certain chemical mixtures used in wet etching (such as phosphoric acid and DI water) will prevent the possibility of dangerous overheating and explosions. Modutek's wet bench stations are constructed with high-tech safety features and the use of precision software to address such challenges.

Read the complete article titled “How Wet Bench Stations Are Tailored for Specific Manufacturing Process Requirements” for additional information about Modutek’s wet bench stations and process control features. If you have questions or would like to discuss your wet bench requirements, please call Modutek at 408-362-2000 or email modutek@modutek.com.