Commercial Opportunities for MEMS Technology

Micro-electro-mechanical systems (MEMS), is a technology that involves the use of microscopic devices that range in size from several millimeters to less than one micron. MEMS usually have both electrical and mechanical functions and often include parts that can move in response to several factors such as process conditions, commands from outside the structure, or commands from integrated electronics.

Initially used in the automotive industry, the use of MEMS has expanded to other industries that include medical and optical fields. The MEMS sensors are comparatively inexpensive to produce but they perform better than the corresponding macroscopic sensors, which have been taken over by MEMS.

As MEMS fabrication methods became advanced, the systems were able to incorporate additional functions and different structures.

MEMS are manufactured by a process which is similar to that used to produce microelectronics. For the silicon-wafer based MEMS, the wafers are masked, etched, and cleaned in multiple steps. Silicon wet etching is the primary method used in manufacturing MEMs and offers a number of advantages.

Silicon wet etching using KOH (potassium hydroxide) is also known as KOH etching. It offers a number of advantages including low cost, reliability, as well as safe, quick and precise etching. This process can be repeated and controlled by changing the temperature, the KOH concentration, the crystal plane orientation of the silicon and the doping concentration.

Modutek offers a wide variety of wet bench equipment that supports KOH etching. Its KOH silicon etching tank is designed, developed, and manufactured in-house and can be designed according to the client's specific wet bench applications. The tanks are specially developed and manufactured to reduce impurities. The resulting process tanks deliver unparalleled performance and high-quality output. Custom installations for existing wet bench equipment can also be done.

For more details on KOH etching options for MEMS technology read the article titled “Commercial Market Opportunities for MEMS Technology”. If you have questions or would like a free consultation or quote contact Modutek at Modutek@modutek.com.