Silicon Wafer Etching Processes for Wet Processing Applications

Manufacturing semiconductor components like processors and integrated circuits relies on silicon wafer etching of various processes including KOH etching to generate the required structures and connections.

Modutek's wet benches and other equipment can be used for a wide range of wet processing applications, which include:

KOH Etching – This involves the use of potassium hydroxide (KOH) in etching silicon wafers. This process is used to create microscopic structures in the silicon. It is important to note that KOH etching is a repeatable process that is inexpensive and etches quickly. Modutek's PFA Teflon tanks of their TFa or TT series are suitable for this etching application.

Silicon Nitride Etch – This is deposited on the silicon wafer in a thin film form and is etched with a hot phosphoric acid. It is used as a masking material in the fabrication of integrated circuits. Modutek's silicon nitride etch baths are suitable and safe for supporting this etching process.

Piranha Etch – This is used to clean silicon wafers during the semiconductor manufacturing process. The cleaning agent in this application consists of a mixture of sulfuric acid and hydrogen peroxide. Modutek can evaluate the customer's specific cleaning requirements and propose suitable solutions from its vast product line of wet processing equipment.

Metal Etch - Etching metals such as aluminum, gold and copper can be challenging process. Effective etching depends on selecting the right chemicals to use with the process. Modutek's vacuum metal etcher was developed and designed for precise wet etching of aluminum layers.

Gallium Arsenide (GaAs) Etch – Modutek's wet process solutions can handle the etching of Gallium Arsenide, which is used in the manufacture of integrated circuits and other electric and electronic devices. The solutions used consist of hydrogen peroxide, usually combined with sulfuric, hydrochloric, and phosphoric acids.

Modutek’s Wet Bench Solutions deliver reliable, repeatable results that are safe and accurate. For a free quote or assistance in selecting the right equipment for your silicon wafer etching process, contact Call Modutek at 866-803-1533 or send an email to Modutek@modutek.com. You can learn more about Modutek’s silicon wafer etching processes by reading “Silicon Wafer Etching Processes for Wet Processing Applications.”