The
manufacture of semiconductor components involves cleaning, stripping, and
etching of semiconductor wafers. Since this process requires the use of
corrosive chemicals such as sulfuric or hydrochloric acids, a well-designed quartz bath should be the
effective solution because it withstands such chemicals even in high
temperatures. A high-quality quartz bath should also conduct heat effectively
in order to facilitate fast and even heating.
The Modutek Series QFa quartz baths are high-temperature recirculating units which use grade flame polished quartz to minimize possible contamination, as well as functions for fast and even heating.
The Modutek Series QFa quartz baths are high-temperature recirculating units which use grade flame polished quartz to minimize possible contamination, as well as functions for fast and even heating.
The Modutek
Qa series is made of made of internally flame polished virgin fused quartz,
which is boron free. It has accurate temperature controls of 1 degree Celsius
with a heat-up rate of 2 degrees C to ensure constant temperature.
Modutek's
quartz baths are cost-effective but safe, reliable and efficient units to
improve the process of semiconductor components.
Our recent
article “How Quartz Baths
Are Used in a Manufacturing Process” explains more. If you have questions, please
call 866-803-1533 or email sales@modutek.com.
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