Quartz tube
cleaning stations have to be customized according to the requirements of the processes
it is used with. Quartz tubes are used in the processing of semiconductor
wafers at extreme temperatures in a diffusion furnace. Corrosive chemicals are
used during the cleaning process.
Modutek's
quartz tube cleaning stations cleans quartz tubes by rolling them during etching
which helps minimize chemical usage. Features also include customization
options and drying using nitrogen. Standard quartz tube cleaning stations are
built with white polypropylene and are available in manual and automated roller
systems. All stations also include an acid and rinse cycles.
Optional
automation features an automated tube roller system, automated program recipes,
drying and bottle washing. When automatic operation is selected, no further
action from the operator is needed. For more details on quartz tube cleaning
stations, read the main blog article “Quartz Tube Cleaning
Stations: What They Do and the Benefits They Provide.”
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