Discovering the Modutek Rotary Wafer Etching Equipment

If you are looking for the most efficient, most reliable, and safest rotary wafer etching machine, you will discover the benefits of the rotary wafer etching equipment from Modutek. The company's Model SPS-rotary wafer etching equipment is a machine that is powerful and will rotate steadily for up to 80 revolutions per minute (rpm).

Presently, the Model SPS-rotary wafer etching equipment has been rated as one of most efficient, most dependable and safest rotary wafer etching machines on the market today. In terms of usability and control, this machine definitely cuts above the rest.

The system is an economical, automated, and ergonomically planned machine for batch processing. This rotary wafer etching equipment is specially manufactured the following processes: wafer reclaim, precise chemical etching, resist etching or cleaning substrates, and stripping developing.

Why this wafer etching system is so in-demand? Here are the things you will want to know about the system:

• It has a dual-tank wet station.
• The system supports wafer cleaning or rinsing. It will also handle chemical etching with transfers happening ergonomically between tanks.
• The system allows for easy operating. First, you load the wafer boats appropriately into the assembly carrier and then close the fume door. When this is done, all you have to do is to push the START button.
• The system has pre-programmed features. The carrier assembly brings the wafer boats directly to the tanks for chemical processing. This is followed by the rotational agitation for a specific preset time.
• As all systems processes can be pre-programmed, usually you will want to allow this pre-set time to elapse. After the pre-set time is complete and the system automatically turns off. You may, however, even cancel the process in the middle of it if needed. Once the system comes to a complete stop, the carrier assembly moves to a rinse tank for the rinse cycle. These cycles are also alternatively called Quench-Quick, Dump-Overflow rinsing.
• The last process of the system comes to rinsing. An audible alarm will let you know that the rinsing process has been finished.
• You may notice that the carrier assembly continues spinning until you physically press the RESET button. Once the RESET is pushed, the carrier moves to position to be removed from the driving unit.

Model-SPS Rotary Wafer Etching Equipment:

1. The system has a closed loop motor control. It comes with an encoder that can increase the rotational agitation precision.
2. High throughput.
3. Touch screen control and microprocessor power. It also comes with easy accessibility and has easy operable control functions.
4. Program is as many as five process procedures - or "recipes" - by way of a interface operated by touch screen. The interface displays all the recipes in a coordinated manner. It also displays results as a single interface, furthering convenience of monitoring.
5. During processing, the wafer boat continues to rotate. Then the rapid transfer occurs between the process bath and the quench tanks to ensure the results that are always consistent.
6. Environment friendly.
7. Double containment instruction.
8. Utilize the fail-safe feature when the N2 pressure's power is out.
9. Bath temperature control.
10. All parts are protected against fluids that are corrosive. These parts are either made from inert plastic or have been sealed appropriately.

Specifications:

1. Agitation - axial rotation over 0 – 80 rpm.
2. The process chemistry temperature can be controlled to +/- 1 / 2 degrees over ambient 100 degrees.
3. The process time can be set between 0 – 9999 seconds or 0.0 – 999.9
4. The product capacity can handle either 50 x 6" wafers or 25 x 8" wafers at the same time.
5. The pre-rinse time can be set between 0 – 9999 seconds.
6. The quick dump cycle can be set between 0 – 9999 seconds.

The system also offers these options:

1. gravity chemical refilling
2. fume condensation
3. process tank material options
4. resistivity monitoring in the rinse tank
5. chemical circulation
6. heating/cooling in process tanks
7. large-size wafer options are also available

Contact Modutek

Modutek is one of the leading semiconductor and wafer etching equipment suppliers in the San Jose, California area. The company has over 30 years of experience in providing electrical schematics that are considered industry-standard, solid models, as well as plumbing and instrumentation design and flow simulation. Modutek has been providing such services to high-tech manufacturers, universities, and research facilities. You can contact Modutek through this page http://www.modutek.com/contact-us/. Or you may visit our office at 6387 San Ignacio Avenue, San Jose.