Modutek Makes Quartz Baths That Are Both Reliable and Safe

Modutek Corporation has successfully created a safe, reliable Quartz Bath system. It is manufactured by Modutek and is reasonably priced, which will allow integration into current production systems in a cost-effective manner. Modutek is known as the quality standard for quartz baths after over 30 years of developing and improving the designs for these baths.

Because of the nearly inert properties of pure quartz, other substances will usually not react with it. This makes quartz an excellent selection to use in semiconductor processes. Besides being non-reactive, its stability even when heated is a great advantage. Its hardness level on the Mohs scale is 7 and it is safe for demanding processes due to its lack of cleavage.

One of the several Quartz Baths available from Modutek is the QFa Series. Some of the benefits of this bath include heating that is fast and even from a 4-sided heating element that is nested and has a serrated overflow barrier and which heats to 360 degrees Fahrenheit, a flange design that is seamless and sloped, and a dual safety snap switch. Its design prevents runaway temperatures, minimizing potential damage. A vessel life that is longer than the average results in better reliability and more up-time. Particulate contamination is reduced along with easier laminar flow.

Some of the chemicals that can be used with the QFa Quartz Bath include H2SO4, SC1, H2O2, and more. It can operate at temperatures between 30ºC - 180ºC. Control of the operating temperature, depending on the process and the controller, can be ±1ºC. The heat-up rate of the operating temperature is 2ºC per minute, depending on which fluid is used, the system’s size, and other factors. Uses include cleaning, etching, and stripping. Its circulating fluid inlet/outlet is a ¾” male Flaretek. Users can choose to add a quartz diffuser plate, autolid, process temperature controller, liquid level sensor, and custom vessel sizes to perfectly fit necessary specifications.

The Qa Series Quartz Bath has similar features to the QFa, with a 5-sided heating element rather than 4-sided, which improves speed, efficiency, and evenness of heating. Options include a magnetic stirrer, remote timer, process controller, gravity drain, aspirator (dilution) valve system, and quartz bubbler.

The size of the Quartz Bath of either series is customizable. Call for more information or a quote for the Modutek Corporation Quartz Bath that will best fit your needs at 866-803-1533.