How the IPA Vapor Dryer Further Improves Wafer Processing

When silicon wafers are dried after rinsing, the wafer surface has to be free of water marks and contaminating particles.

After hydrofluoric acid removes the silicon oxide layer during the final etching before the next process steps, the silicon wafers are exposed to diffusion and surface contamination. If the wafer surface is not cleaned before undergoing further processing, it will subsequently result in defective or low-quality components. Modutek’s IPA Vapor Dryer delivers clean wafers while reducing operation costs.

In Modutek’s IPA Vapor Dryer, the IPA vapor is introduced into the drying chamber from the top to ensure even distribution, reducing the amount of IPA required and further reducing costs. When the IPA vapor condenses on the wafers, a surface tension gradient develops between the IPA and the remaining water. The water flows off the wafer surfaces, taking the contaminating particles with it. The wafer surface comes out dry as it doesn’t have any more water marks and is now free of particles.

Advantages and benefits of using Modutek’s IPA Vapor Dryer:

·         It lets operators transfer the silicon wafers from the last etch processing station to the dryer chamber without any further movement from the wafers.

·         It is a gentler alternative to heat drying or rotating the wafers to spin off excess water.

·         IPA dryer cabinets are a compact 30 inches wide and made of polypropylene.

·         It uses SolidWorks Simulation Professional and SolidWorks Flow Simulation software to calculate process flow characteristics and reduces the required drying time.

·         It can be customized and be designed to fit into the customer’s existing wet process equipment lines and meet customer requirements.

If you would like to learn more about the topic, read our latest article, “How the IPA Vapor Dryer Further Improves Wafer Processing.” You may also set up a free consultation to discuss your particular needs by emailing Modutek@modutek.com or by calling 866-803-1533.

The Advantages of Using Modutek’s Quartz Tube Cleaning System

After a quartz tube is used in a high-temperature semiconductor manufacturing process, it has to be completely cleaned to get rid of contaminants. Modutek’s Quartz tube cleaning stations create clean tubes that are free of particles and ready for use again.

Quartz tubes are used as an inert container for semiconductor manufacturing processes, such as vapor deposition and diffusion. The wafers inside the quartz tube are inserted into a furnace that can reach 1,000 degrees centigrade. During these process steps, the semiconductor characteristics and the circuit paths of semiconductor components are created.

These same process steps leave traces of diffused material on the tube and the high-temperature furnace leaves contaminants. Before the quartz tube can be used again, it has the be cleaned in a way that minimizes the particle counts on its surface.

Minimizing the particle count is especially important for the following semiconductor manufacturing steps like etching or masking. Even a single particle can affect a microstructure or block a current path, subsequently resulting in defective or poor-quality semiconductor components. Manufacturing facility throughput can be reduced by a large number of rejected product and output quality can suffer.

In a quartz tube cleaner, an acid spray dissolves the surface contaminants and washes them away. The cleaned tube is rinsed with DI water and dried carefully without introducing new contaminants.

Modutek’s horizontal Quartz Tube Cleaning System offers many benefits, including customization, rugged and reliable construction, safe operation, and a host of options. It can be also operated manually or automatically. Since quartz tubes are fragile and handling them can introduce new contamination, a degree of automation can be highly beneficial.

Modutek’s Quartz Tube Cleaning System deliver reliable cleaning with the degree of automation ideal for specific process applications. Automation reduces handling of the tubes (which can otherwise introduce new contamination). As a result, a high degree of cleanliness is achieved consistently.

Modutek’s complete product line of Wet processing equipment is developed in-house so systems can be designed and built to meet each customer’s specific requirements.

Read our latest article, “The Advantages of Using Modutek’s Quartz Tube Cleaning Stations” to learn more. You may also call Modutek at 866-803-1533 or send an email to modutek@modutek.com to set up a free consultation to discuss your specific needs.