How to Improve Your Silicon Wet Etching Process

The silicon wet etching processes used by fabrication facilities and research labs needs to deliver quality results in a consistent way.  The processes involved in semiconductor manufacturing include multiple steps that include cleaning, masking, and etching. These processes involve the use of various chemical baths, each of them intended to achieve a different and specific result. At the end of these accurately implemented processes, the silicon wafers that have been etched will be ready for testing.

Among the different requirements for an error-free process, the two primary ones include: 1) accurate monitoring over the speed at which the etching is done; and 2) the ability to achieve extreme levels of cleanliness in work areas in which etching is being done.

There are many ways to improve the silicon wet etching process, these include:

1)      Silicon nitride – Silicon nitride is applied to mask parts of wafers during the phosphoric acid etching process. A greater precision is a must in this process to attain superior results.

2)      Potassium hydroxide – The use of potassium hydroxide solution is required in the creation of microscopic structures on semiconductor wafers. Close monitoring over the concentration of the solution, the temperature, the orientation of the silicon crystal and silicon purity are required to achieve error-free and precise etches.

3)      Buffered oxide etch – This process uses hydrofluoric acid apart from the buffering agent to etch fine masking films of silicon oxide or silicon nitride.

When it comes to improving the silicon wet etching process, one of the most important factors is using high quality processing equipment from an experienced and reputable vendor that provides good support. With over 35 years of experience, Modutek Corporation is ready to answer this requirement not only by supplying the right silicon wet etching equipment, but also by advising its clients on which customizations are needed to match their requirements.

If you have questions about any equipment for silicon wet etching, read our recent article titled “How to Improve Your Silicon Wet Etching Process”. Contact Modutek by phone at 866-803-1533 or email modutek@modutek.com. 

Determining Which Wafer Processing Station Will Meet Your Requirements

Wet benches stations are available in various configurations which are designed for different applications. Because of this, clients may have a difficult time deciding which equipment to choose that will best meet their requirements. One way to reduce the uncertainty and to make the selection more defined is to focus on three areas where your requirements must be met.

A wafer processing station needs to address the following items: 

1) Compliance with standards
Wet bench stations should comply with the following industry standards to ensure safe operation and resistance to combustion:

• NFPA – National Fire Protection
• NFPA 79 – Safety of Industrial Machinery
• NEC – National Electrical Code
• UL 508a – Standard for Industrial Control Panels

If wet bench stations have to be installed outside the US, Modutek is also able to comply with a foreign country's own local and national safety standards. In addition, Modutek can supply third-party certification for compliance.

2) Applications
Modutek can supply the right systems and advise on the benefits and advantages of certain products from their complete line of wet bench equipment, depending on the process or application required.

3) Automation
Modutek offers manual, semi-automated and fully automated wet bench stations. You should know your needs first before deciding whether you want a manual or automated model:

• Manual – ideal for low volume custom or prototype device processes. It has the most competitive pricing among the three models.
• Semi-automated – has some automated features and provides uniform processing without the higher priced associated with fully-automated models
• Fully automated – ideal for hands-off operation and higher volume with standard processes. It improves higher throughput and minimizes human errors.

Modutek's wafer processing stations are developed and manufactured with the same high-quality materials but it can also supply the appropriate degree of automation that will meet the customer’s needs and specifications.

Read our complete article entitled “Determining Which Wafer Processing Station Will Meet Your Requirements”. If you have questions after reading it, please give Modutek a call at 866-803-1533 or send an email to modutek@modutek.com.