Silicon Wafer Strip Solutions for Wet Processing Equipment Applications

 Modutek Corporation offers a wide range of wet processing equipment that is also customizable to deliver solutions for specialized applications. Silicon wafer strip solutions, the company can deliver various types of equipment that will support the following applications:

Silicon Nitride Strip
The silicon nitride strip removes silicon nitride from silicon wafers containing integrated circuits in a hot acid bath. The main factors for a high quality result are the selectivity of the bath strip solution along with consistently repeating all the process variables. 

The Modutek Nb series silicon nitride etch bath regulates the bath temperature while adding de-ionized water to control the water-to-acid ratio which provides the desired selectivity and repeatability of the process.

Resist Strip
For the photoresist strip, Modutek offers and advanced ozone cleaning process which can clean, etch or strip silicon wafers without the use of harsh chemicals. Thus this process is lower in cost and is also more environmentally-friendly.

Oxide Strip (Buffered Oxide Etch - BOE)
Modutek’s F Series filtered sub-ambient circulation baths for BOE applications can reduce acid use while removing particles and improving yields.

Solvent-Based Resist Strip
Modutek's SFa series temperature-controlled stainless steel recirculating baths can support a vast range of solvents such as IPA, acetone and resist strip solutions.

SPM Photo Resist Strip
Modutek's QFa high temperature recirculation quartz baths can handle photo resist strip using sulphuric acid and hydrogen peroxide mixture for the SPM processes.

Process engineers who are considering various silicon wafer strip solutions can rely on Modutek to provide the appropriate wet processing equipment for their application. For a free consultation or quote on selecting equipment for specific wafer strip applications call Modutek at 866-803-1533 or email Modutek@modutek.com. You can read more details about Modutek’s silicon wafer solutions by reading the article entitled “Silicon Wafer Strip Solutions for Wet Processing Equipment Applications.”

How Modutek Supports Customers Using Semiconductor Manufacturing Equipment

Modutek Corporation tailors its line of semiconductor manufacturing equipment to meet the specific requirements for each client. Modutek's experienced service teams and customer support ensures that their equipment installations perform efficiently, deliver high throughput and experience low levels of downtime. Here are the ways Modutek supports customers using its wet processing equipment:

1. Equipment testing
Modutek conducts final acceptance testing (FAT) of equipment at its facilities in San Jose, CA. Clients can come to Modutek’s facility during this verification process to review of the final testing. Customer site acceptance testing (SAT) includes onsite start-up training with experienced Modutek personnel showing operators how the equipment works. In addition follow up operational training can be provided to facility managers and any other customer personnel.  

2. Service contracts
Modutek provides service contracts to make sure that the equipment is operating optimally and that all controls and adjustments work according to specifications. Modutek offers service contacts for both new and used equipment.

3. Preventive maintenance contracts
Modutek offers preventive maintenance contracts to help ensure that the client's equipment is continues to work optimally. Service checks on Modutek’s equipment as well as equipment of some competitors can are done to detect problems that could slow production, affect quality or lead to unexpected downtime.

4. Field service and support
Besides testing, training and service contracts, Modutek also offers field service for customers who are in need for repairs or upgrade for their equipment, or for clients who want more customizable parts to facilitate the improvement of their process.

To learn more about how Modutek can support your company’s needs read the complete article on the site titled “How Modutek Supports Customers Using Semiconductor Manufacturing Equipment.” You deserve quality service and support from your semiconductor manufacturing equipment supplier. Call Modutek to get free quote or consultation at 866-803-1533 or send an email to Modutek@Modutek.com.  

How the Ozone Cleaning Process Improves Silicon Manufacturing Yields

Compared to the traditional cleaning process, the ozone cleaning process (using water or a mild acid) can clean or strip wafers faster and more cost-effectively. Modutek Corporation has developed its own Advanced Ozone Cleaning Process which doesn't necessitate the use of expensive cleaning solutions and eliminates waste while improving the cleaning process.

The ozone cleaning process works by providing cleaner silicon wafers with decreased particle amounts. For example, in Modutek's DryZone gradient dryer, the process cleanses substrates with DI water to eliminate inorganic impurities before exposing them to ozone in an ozone chamber. The result is a cleaner substrate surface -- free from impurities and moisture and become stable hydrophilic surfaces.

The wafers in Modutek's Organostrip process are exposed to an organic solvent incorporated with ozone at room temperature. This technology yields very high ozone solubility in the liquid. It results in faster resist removal. All types of tested metals (including aluminum, copper, gold, tantalum and titanium) are compatible in this process.

The ozone cleaning process has many advantages over the Piranha process. These advantages include more rapid processing, better compatibility with metals, fewer particles on the surfaces, improved safety, and lower operating costs.

Discover more about the Ozone Cleaning Process by reading the recent article titled “How the Ozone Cleaning Process Improves Silicon Manufacturing Yields” on Modutek’s website. For a free consultation or quote on using Modutek’s ozone cleaning process to improve your manufacturing yields, call 866-803-1533 or email modutek@modutek.com.