Modutek Corporation designs, manufactures, and delivers standard as well as customized silicon wafer cleaning equipment for semiconductor manufacturing facilities and research labs. Their silicon wafer cleaning equipment provides effective and efficient contaminant and particle removal to promote high yields and improved throughput. The following cleaning processes are supported:
- RCA Clean - This is based on a cleaning system developed by RCA Corporation. The solution consists of water, ammonium hydroxide, and hydrogen peroxide in appropriate amounts. The system removes organic impurities and leaves a thin layer of oxidized silicon on the silicon wafer's surface.
- Standard Clean 1 and 2 - This process prepares the silicon wafer for the next processing. The RCA cleaning process is carried in two steps:
- Standard Clean 1 (SC1) - It uses AMP (ammonia/peroxide mixture) solution of the RCA cleaning method to remove the organic particles.
- Standard Clean (SC2) - It uses the HPM (hydrochloric acid/hydrogen peroxide mixture) solution to remove metallic ions. These two steps prepare the silicon wafer for additional processing.
- Piranha Etch Clean - This cleans hard-to-remove or large amounts of organic materials. The solution -- consisting of hydrogen peroxide and sulfuric acid in measured amounts -- is used to clean silicon wafers and hydroxylate surfaces. This mixture is highly corrosive and needs to be handled with caution.
- Pre-diffusion Clean - This is the final and very critical step before the silicon wafer goes into the diffusion furnace. Make sure that the wafer is completely free from contaminants and particles; otherwise they would disrupt the diffusion process and will lead into a low-quality or defective semiconductor output.
For more details on the wafer cleaning solutions supported by Modutek read the article titled "Silicon Wafer Cleaning Solutions for Wet Processing Application" on the website. If you want a free consultation or quote on selecting Silicon Wafer Cleaning Equipment for your application, call 866-803-1533 or email Modutek@Modutek.com.
