Etching Applications Need Modutek’s Temperature Control Circulator for Reliability

Temperature Control Circulators are important for businesses using Buffered Oxide Etch (BOE) and HF applications. Modutek Corporation manufactures the RCe Series of sub-ambient temperature control circulators. The temperature can be controlled by amounts as low as 0.2°C. This is a result of the interface between our temperature control circulator and the silicon wet etching bath or other etch baths in your facility. The same would be true if you purchased a new etch bath or continue using the existing equipment. The design of the unit is compact (20.5” x 25.0” x 15.5”) and fits easily under your wet processing station or behind it.

The 134A Freon Compressor with our temperature control circulator replaces the R22 Freon compressor that is not compliant. This is an advantage that ensures your unit will meet current code requirements. The compressor size, fluid part options and heater size will enable you to choose the temperature control circulator that will match your system requirements.

Our electrical box, which includes on-board logic controls, also monitors process temperatures, heating and cooling. Not only are temperatures monitored, it also monitors reservoir levels and will let you know if flow levels drop off by sounding an audible alarm. Process temperatures often require constant temperatures or a specific temperature. There is alarm if the temperature fluctuates too much, also.

All Modutek temperature control circulators come with a standard 1500 watt stainless steel heater. If you need a different heater, 2500 and 3500 watt heaters may be purchased to upgrade the circulator if it is needed. The units are upgraded to Deionized (DI) water within the stainless steel fluid path. This is unique to the circulators manufactured by Modutek. Our RCe-01 series uses industry standard city water or reverse osmosis.

The standard temperature control circulator has a ¼ hp compress but can be upgraded to ½ hp, ¾ hp or 1 hp. Since our engineers work closely with your team of engineers, they will be able to design a system that will meet your requirements. If modifications are needed, our team is entirely in-house, which means you work exclusively with us and not an outsourced firm.

CE compliance is important for all Modutek equipment. The temperature control circulator is both CE compliant and environmentally friendly. The external status display allows you to see what is happening in the system. It has its own circuit breaker protection and maintenance on the unit is relatively easy should it be necessary.

The RCe Series temperature control circulator has specific housing requirements. The main power for the RCe025-1500 requires 120 VAC, 50/60HZ, 20A rating. The RCe Series requires 208VAC, 4-wire Circuit rating. In addition, it will need a ½” FNPT outlet/inlet in order for fluids to circulate properly.

If the processes you use on a daily basis require precise temperature controls, turn to Modutek Corporation. We have silicon wet etching process and can replace any chillers in your systems that are not compliant. Our temperature control circulator has been designed to exceed other chiller/heater units available today. Not only is it reliable, it is also safe. When you’re ready to replace the non-compliant chillers at your company, call Modutek Corporation. You may reach us at 866-803-1533 or through email Sales@Modutek.com. We welcome your questions and a chance to provide a quote.

Choose Modutek Quartz Baths for Reliability and Safety

The Quartz Bath systems manufactured by Modutek Corporation are both safe and reliable. Not only this, the Modutek Quartz Bath is also reasonably priced. This will make integration into your current production system cost-effective. We have over 30 years experience designing and manufacturing quality quartz bath systems, as well as developing and improving their designs.

Quartz has inert properties which make it non-reactive with other substances. For this reason, quartz is an excellent medium for use when manufacturing semiconductors. Quartz is also stable at high temperature which is another advantage. On the Mohs scale, it has a hardness level of 7. It lacks cleavage; this makes it safe for demanding processes.

Modutek manufactures a number of Quartz Bath systems. One is the QFa Series. This bath includes quick and even heating of the 4-sided heating element which is recessed. It was designed with serrated overflow barriers that can heat to 360°F. It has a seamless, sloped flange design and includes a switch with dual safety snaps. The design prevents runaway temperatures which can minimize damage potential. It also boasts a longer-than-average vessel life. This makes the QFa Series more reliable increases up-time. Finally, contamination from particulates is reduced which makes laminar flow easier.

The QFa Series Quartz Bath can be used with a variety of chemicals. These include, but are not limited to, H2SO4, H2O2 and SC1. The system can be operated between 30°C and 180°C. Depending upon the controller and processor, the temperature can be moderated +/- 1°C. The system heats up to operating temperature at 2°C per minute. This is based on the fluid being used, what size system and other factors. The system can be used for etching, cleaning and stripping. The fluid circulates through a ¾” male Flaretek inlet/outlet. You may choose these optional items: quartz diffuser plate, process temperature controller, autolid, liquid level sensor and vessel size that can be customized to your specific needs.

Modutek also manufactures the Qa Series Quartz Bath. It is similar to the QFa Series but has a 5-sided heating element. This improves heating time, efficiency and overall even heating. It can be purchased with a magnetic stirrer, process controller, remote timer, dilution aspirator valve system, gravity drain, and quartz bubbler.

To learn more about any of the Quartz Bath systems, or other Modutek Corporation products, call 866-803-1533. We are happy to discuss your specific Quartz Bath needs and how we might customize a system for your company.